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SEMI E118.1-1104 © SEMI 2003, 2004 1 SEMI E118.1-1104 SPECIFICATION FOR SECS-I AND SECS-II PROTOCOL FOR WAFER ID READER COMMUNICATION INTERFACE STANDARDS This specification was technically approved by the Global Informat…

SEMI E118-1104

RELATED INFORMATION 3

APPLICATION NOTES

NOTE: This related information is not an official part of SEMI E118 and was derived from work of the originating

task force. This related information was approved for publication by full letter balot procedures on July 19, 2002.

R3-1 Combined State Model

R3-1.1 Figure R3-1 shows the combined state model for the WIDR unit with nn heads, from HEAD01 TO

HEADnn. The WIDR is considered as IDLE when and only when it is in OPERATING and all of its heads are

IDLE.

WIDR

HEAD01

OPERATING

BUSY

IDLE

NOT OPERATING

HEADnn

INITIALIZING

ALARMS

MAINTENANCE

ALARM STATUS

OPERATIONAL

RUNNING

IDLE

BUSY

OPERATING

BUSY

IDLE

NOT OPERATING

.....

Figure R3-1

Combined State Model

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SEMI E118.1-1104 © SEMI 2003, 2004 1

SEMI E118.1-1104

SPECIFICATION FOR SECS-I AND SECS-II PROTOCOL FOR WAFER

ID READER COMMUNICATION INTERFACE STANDARDS

This specification was technically approved by the Global Information and Control Committee and is the

direct responsibility of the Japanese Information and Control Committee. Current edition approved by the

Japanese Regional Standards Committee on July 23, 2004. Initially available at www.semi.org September

2004; to be published November 2004. Originally published March 2003; last published March 2004.

1 Purpose

1.1 This document maps the services and data of the

Wafer ID Reader (WIDR) standard to SECS-II streams

and functions and data definitions.

2 Scope

2.1 This document applies to all implementations of

WIDR that use the SECS-II message protocol (SEMI

E5).

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI E4 — SEMI Equipment Communications

Standard 1 Message Transfer (SECS-I)

SEMI E5 — SEMI Equipment Communications

Standard 2 Message Content (SECS-II)

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Abbreviations and Acronyms

4.1.1 SECS — SEMI Equipment Communications

Standard

4.1.2 WIDR — Wafer ID Reader

5 Physical Requirements

5.1 The WIDR using the SECS-I protocol shall use a

9-pin female connector.

6 Service Message Mapping

6.1 Table 1 shows the specific SECS-II streams and

functions that shall be used for SECS-II

implementations of the service messages defined in

SEMI E118

6.2 Request and notification messages are mapped to

primary (odd-numbered) SECS-II functions and

response messages are mapped to secondary (even-

numbered) SECS-II functions.

6.3 In some cases, a common set of parameters allows

more than one service to be mapped to the same stream

and function, with an additional SECS-II data item used

to differentiate between the two services.

Table 1 Services Mapped to SECS-II Messages

Message Name Stream,Function SECS-II Name

ChangeState S18,F13/F14 Subsystem Command Request/Acknowlege

Get Attributes S18,F1/F2 Read Attribute Request/Data

Get Status S18,F13/F14 Subsystem Command Request/Acknowledge

Perform Diagnostics S18,F13/F14 Subsystem Command Request/Acknowledge

Read WID S18,F9/F10 Read ID Request/Data

Reset S18,F13/F14 Subsystem Command Request/Acknowledge

Set Attributes S18,F3/F4 Write Attribute Request/Acknowledge

Read WIDC S18,F15/F16 Read 2D Code Condition Request/Data

SEMI E118.1-1104 © SEMI 2003, 2004 2

7 Service Parameter to Data Item Mapping

7.1 Table 2 shows the mapping between message parameters defined by WIDR and data items defined by SECS-II.

For parameters specified in the definitions of a WIDR service, either the parameters themselves, or individual

elements of complex parameters, map to a specific data item.

Table 2 Service Parameters to Data Item Mapping

Parameter Name SECS-II Data Item Format Values

Attribute ID ATTRID 20 Name of attribute

Attribute Value ATTRVAL 20

HeadID TARGETID 20 “00”-“31”

Identifies either an individual head (“01”-

“31”) or the WIDR subsystem itself (“00”).

PM Information STATUS 20 “NE” = Normal execution, “MR” =

Maintenance required

Result Status SSACK 20 “NO” = Normal operation;

“EE” = Execution error;

“CE” = Communication error;

“HE” = Hardware error

StateRequest CPVAL 20 “OP”, “MT”

Status STATUSLIST L,4

1. <PMInformation>

2. <AlarmStatus>

3. <OperationalStatus>

4. <HeadStatus>

Current values of PM Information with the

corresponding attributes for WIDR and Head

(if applicable). See Tables 4 and 5.

Wafer ID MID 20

2D Code Read Condition CONDITIONLIST L,7

1. <Cell Size>

2. <Contrast>

3. <Damage Percent>

4. <Number Error Bits>

5. <Read Time>

6. <Matrix Style>

7. <Matrix Polarity>

Current values of Cell Size, Contrast,

Damage Percent, Number Error Bits, Read

Time, Matrix Style, Matrix Polarity with the

corresponding attributes for Code Condition.

See Table 6.

CONDITIONLIST data shall be formatted in

the fixed order as in Format column.

NOTE 1: There are also data items used in SECS-II messages that do not map to specific services parameters. Services with the same set of

parameters are mapped to the same SECS-II message by adding an additional data item to differentiate between the services. Table 3 contains the

SECS-II data items that have not a corresponding WIDR service parameter.

Table 3 Additional Data Requirements Table

SECS-II Data Item Function Value

SSCMD Used to differentiate between different subsystem commands

indicated.

“ChangeState”

“GetStatus”

“Perform Diagnostics”

“Reset”