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SEMI E123.1-0703 © SEMI 2003 8 RELATED INFORMATION 1 NOTICE : This related information is not an official part of SEMI E123.1 an d was derived from the work of th e originating committee. Th is related information was ap…

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SEMI E123.1-0703 © SEMI 2003 7
7 Additional Alarm Management Requirements
7.1 Alarm Definition
7.1.1 SEMI E30 has a very restrictive definition of alarms conflicting with the SEMI E5. This standard requires the
broader SEMI E5 definition.
7.1.2 Messages S5,F1 through S5,F8 of this section provide basic alarm messages. The messages S5,F9 through
S5,F18 provide extended capabilities for Exception Handling. When using messages F1–F8, alarms may be divided
into categories as follows:
Table 5 Alarm Code Mapping
Alarm Name ALCD Description
Personal Safety 1 Condition may be dangerous to people.
Equipment Safety 2 Condition may harm equipment.
Parameter Control Warning 3 Parameter variation outside of preset limits — may harm product.
Parameter Control Error 4 Parameter variation outside of reasonable control limits — may indicate an
equipment malfunction.
Irrecoverable Error 5 Intervention required before normal use of equipment can resume.
Equipment Status Warning 6 An unexpected condition has occurred, but operation can continue.
Attention Flags 7 A signal from a process program indicating that a particular step has been reached.
Data Integrity 8 A condition that may cause loss of data; usually related to Stream 6.
7.1.3 For messages F1 through F8, it will be the equipment’s responsibility to categorize the alarm. Some alarm
conditions may cause more than one type of alarm to be issued. For example, a parameter control error on over
temperature may also trip a protective device that makes the alarm irrecoverable without some intervention.
• Exceptions reported with an ALCD with a category of 1–3 and 5 should cause a transition to
ALARM_PAUSED.
7.2 Recoverable Exceptions
7.2.1 Any exception that may be programmatically recoverable should be reported as an exception using S5F9
Exception Post Notify (EXPN) with a minimum recovery action of RETRY.
7.2.2 If a machine reports recoverable exceptions it should implement the other S5 functions for Exception Clear,
Recovery Request, and Recovery Request Abort.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
SEMI E123.1-0703 © SEMI 2003 8
RELATED INFORMATION 1
NOTICE: This related information is not an official part of SEMI E123.1 and was derived from the work of the
originating committee. This related information was approved for publication by full letter ballot procedures.
R1-1 Scenarios
R1-1.1 The purpose of this section is to document possible HSEM-specific operational scenarios.
R1-1.2 Normal Run Scenario
R1-1.2.1 This is an error-free run of a single lot with a single test-site. All optional SEMI E30 events are turned off
by default.
COMMENT HOST EQUIPMENT COMMENT
Host selects process program. S2,F41-->
<--S2,F42 Equipment Ack
Setting Up
Setup Complete
<--S6,F11 Event : PPLoadOk
Host Ack S6,F12-->
Process
Process.SettingUp
Process.Ready
Host commands start S2,F41-->
<--S2,F42 Equipment Acks Start.
Handler cycles devices...
...until empty...
<--S6,F11 Event : Empty
Host Acks Event S6,F12-->
Host commands Purge. S2,F41-->
<--S2,F42 Handler acks Rmt.Cmd.
Stopping
<--S6,F11 Event : Lot Completed
Host Acks Event S6,F12-->
Idle
SEMI E123.1-0703 © SEMI 2003 9
R1-1.3 Normal SPC Scenario
R1-1.3.1 This is a normal SPC run with all optional SEMI E30 events turned off by default.
COMMENT HOST EQUIPMENT COMMENT
Host selects GEM Alarms S5,F3-->
to enable (list).
<--S5,F4 Alarms xyz ON
Host selects GEM Events S2,F37-->
to enable (list).
<--S2,F38 Events xyz ON
Host selects process S2,F41-->
program.
<--S2,F42 Equipment Ack
Setting Up
Setup Complete
<--S6,F11 Event : PPLoadOk
Host Ack S6,F12-->
Process
Process.SettingUp
Process.Ready
Host requests S6,F15-->
start-of-lot report.
<--S6,F16 Equipment sends report
items.
Host commands S2,F41-->
start
<--S2,F42 Equipment Acks Start.
<--S5,F1 Alarm : NoDevicesPresent
Host Acks Alarm S5,F2-->
Time Passes.
<--S6,F11 Event : PortLoaded
Host Acks Event S6,F12-->
Handler cycles devices...
... until ...
<--S5,F1 Alarm : LoadDeviceFail