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SEMI E135-0704 © SEMI 2004 2 6 Test Apparatus 6.1 Digital Oscilloscope — The Digital Oscilloscop e is used to measure the RF enable sig nal, the RF set point signal, and th e RF power out put signal. It shall have a digi…

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SEMI E135-0704 © SEMI 2004 1
SEMI E135-0704
TEST METHOD FOR RF GENERATORS TO DETERMINE TRANSIENT
RESPONSE FOR RF POWER DELIVERY SYSTEMS USED IN
SEMICONDUCTOR PROCESSING EQUIPMENT
This test method was technically approved by the Global Metrics Committee and is the direct responsibility
of the North American Metrics Committee. Current edition approved by the North American Regional
Standards Committee on April 22, 2004. Initially available at www.semi.org on June 2004; to be published
July 2004.
1 Purpose
1.1 The purpose of this document is to define a test
method used to determine the transient response for an
RF Generator used in RF power delivery systems for
semiconductor processing equipment to support SEMI
E113.
2 Scope
2.1 This document specifies the testing procedures and
test equipment required for determining the transient
response of an RF generator operating into a nominal
50-ohm load as a function of the change in set point
level, including the time delay between the request for
power (i.e., RF enable signal) and the start or stop of
the RF output signal.
2.2 The primary focus for this document is
semiconductor processing equipment including, but not
limited to, the following tool types:
• Dry etch equipment,
• Film deposition equipment (CVD and PVD).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This standard addresses RF generators used in RF
systems that primarily operate in the frequency range of
0.2–100 MHz. It does not address higher frequency RF
systems or microwave systems.
3.2 This standard is meant for analyzing RF generators
that are designed to have a nominal characteristic
impedance of 50 ohms. This standard can also be used
with RF generators with a different characteristic
impedance if the appropriate standard terminations are
used.
3.3 International, national, and local codes, regulations
and laws should be consulted to ensure that the
equipment and procedures meet regulatory
requirements in each location.
3.4 This standard does not address any safety or
performance issues related to RF emissions or electrical
codes (e.g., Underwriter’s Laboratory, Inc. (UL), the
National Electrical Code (NEC), Federal
Communications Commission (FCC)). It is the
responsibility of the users of this standard to conform to
the appropriate local codes and regulations as applied to
this type of equipment, some of which are covered by
referenced documents.
4 Referenced Standard
4.1 SEMI Standard
SEMI E113 — Specification for Semiconductor
Processing Equipment RF Power Delivery Systems
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 CVD — Chemical Vapor Deposition
5.1.2 PVD — Physical Vapor Deposition
5.1.3 RF — Radio Frequency
5.1.4 VSWR — Voltage Standing Wave Ratio
5.2 Definitions of Terms
5.2.1 cable assembly — the section of cable
(transmission line), including the connectors, used to
connect various parts of the RF power delivery system.
5.2.2 device under test (DUT) — the RF generator to
be tested.
5.2.3 load impedance — the load impedance is the
impedance to which a generator is attached.
5.2.4 RF enable signal — the signal that a generator
receives to turn on the output power.
5.2.5 RF set point signal — the signal that a generator
receives that corresponds to a desired output power.
SEMI E135-0704 © SEMI 2004 2
6 Test Apparatus
6.1 Digital Oscilloscope — The Digital Oscilloscope is
used to measure the RF enable signal, the RF set point
signal, and the RF power output signal. It shall have a
digitization rate of at least 500 mega-samples per
second per channel. The Digital Oscilloscope shall
have an up-to-date calibration per the manufacturer.
6.2 RF Rectifier/Diode Detector — A device that
converts an RF signal into a DC signal is used to
measure a signal related to the output power of the RF
generator. The input RF signal is produced by the RF
Signal Sampler. The output DC signal goes to the
Digital Oscilloscope.
6.3 RF Signal Sampler — A device that will detect RF
voltage and/or current and produce a reduced-level RF
signal is used for detection purposes. The sampler can
be a non-directional coupler or a directional coupler
that detects forward power. The reduced-level signal
produced by the sampler is typically −40 to −50 dB
(decibels) below the RF signal being detected.
6.4 RF Set Point Signal Generator — A device that
will produce a DC signal that is used to set the desired
RF generator output. The device is connected to the
controller input of the RF Generator and is measured
with the Digital Oscilloscope.
6.5 RF Enable Signal Generator — A device that will
produce a DC signal that is used to turn-on and turn-off
the RF generator output power. The device is
connected to the controller input of the RF Generator
and is measured with the Digital Oscilloscope.
6.6 RF Power Meter — A device that will measure the
output power of the RF generator that is used. It shall
have an absolute power accuracy of ± 3 percent and a
measurement repeatability of ± 1 percent.
6.7 RF Adapters and Terminations — Various adapters
may be necessary to convert between different types of
coaxial connectors (e.g., type N to type HN adapters).
All adapters used shall have the same nominal
characteristic impedance as the system, which is
typically 50 ohms. For some measurements, additional
coaxial cable assemblies are used. These cable
assemblies shall also be of the same nominal
characteristic impedance as the system.
6.8 High-Power RF Dummy Load — A high power RF
load is used to absorb the power produced by the
generator. It shall have the same nominal characteristic
impedance as the RF generator, which is typically 50
ohms. The RF dummy load shall have a power
handling capability that is compatible with the RF
generator being tested.
7 Safety Precautions
7.1 Work should be conducted in accordance with local
safety requirements and test device manufacturer
recommended safety procedures.
7.2 The area immediately surrounding the Test Setup
shall be keep free and clear of unnecessary equipment
and materials.
8 Test Setup for Measuring the Transient
Response of the RF Generator as a Function of
the Change in Set Point
8.1 The test setup for measuring the transient response
of the RF generator consists of an RF Enable Signal
Generator, an RF Set Point Signal Generator, a Digital
Oscilloscope, the RF Generator (DUT), an RF Signal
Sampler, an RF Rectifier/Diode Detector, an RF Power
Meter, and a High-Power Dummy Load. A schematic
of the test setup is shown in Figure 1. All signal cables
that are used to connect to the Digital Oscilloscope
should be of comparable length so that there is no
significant time delay between the signals measured by
the Digital Oscilloscope.
8.2 Prior to making any measurements, the Digital
Oscilloscope and other electronic test equipment shall
be turned on and allowed to warm up per the
manufacturer’s guidelines before the testing is to take
place. This time will allow for electronics to come to a
stable operating condition for the measurements.
9 Test Procedure for Measuring the Transient
Response of the RF Generator as a Function of
the Change in Set Point
9.1 The test procedure described below compares the
change in the set point signal (produced by the RF Set
Point Signal Generator) to the signal produced by the
DUT. The Set Point signal is an input to the DUT and
is used by the DUT to produce the desired output power
level, per the DUT manufacturer’s instructions. The
DUT output power level is measured with the RF
Signal Sampler. The signal from the RF Signal
Sampler is used by the RF Rectifier/Diode Detector to
produce a DC signal that corresponds to the RF output
power from the DUT. The Digital Oscilloscope
measures both the Set Point signal and the RF Detector
signal.
9.2 Test Method for Measuring the Transient Response
of the RF Generator as a Function of the Change in Set
Point
9.2.1 Connect the outputs of the RF Enable Signal
Generator and the RF Set Point Signal Generator to the
controller input of the DUT. Connect the RF power
output of the DUT to the input of the RF Signal
SEMI E135-0704 © SEMI 2004 3
Sampler, and connect the output of the RF Signal
Sampler to the High-Power RF Dummy Load. If any
coaxial cable assemblies or adapters are used to make
any of the connections between the output of the DUT
and the High-Power RF Dummy Load, they shall have
power handling capability that is consistent with the
maximum output power of the DUT. Connect the
reduced-level signal output of the RF Signal Sampler to
the input of the RF Rectifier/Diode detector. Connect
the output of the RF Set Point Signal Generator and the
output of the RF Rectifier/Diode Detector to the input
channels of the Digital Oscilloscope. Inspect all
connections of the Test Setup to ensure proper contact.
9.2.2 Set up the Digital Oscilloscope to trigger off of
the signal level change of the RF Set Point Signal
Generator.
9.2.3 Turn on the RF Enable Signal Generator to a
level that will allow the DUT to produce output power.
9.2.4 Change the RF Set Point Signal Generator output
level to produce the desired change in RF output power.
Measure and record the RF Set Point Signal Generator
signal and the RF Rectifier/Diode Detector signal with
the Digital Oscilloscope. Also record the indicated RF
power levels from before and after the Set Point change
as measured by the RF Power Meter. The measurement
by the Digital Oscilloscope shall continue until the RF
output power has stabilized, which typically takes a few
milli-seconds.
9.2.5 The data shall be recorded and then presented in
both graphical and tabular forms. An example of data
collected from a Digital Oscilloscope for an RF
generator test is shown in Figure 2, where the Set Point
was changed from 3% to 33% of full power, and in
Figure 3, where the Set Point was changed from 33% to
3% of full power.
10 Test Setup for Measuring the Transient
Response of the RF Generator as a Function of
the Change in RF Enable Signal
10.1 The Test Setup for the measuring the transient
response of the RF generator as a function of the RF
Enable signal consists of a RF Enable Signal Generator,
a RF Set Point Signal Generator, a Digital Oscilloscope,
the RF Generator (DUT), a RF Signal Sampler, a RF
Rectifier/Diode Detector, a RF Power Meter, and a
High-Power Dummy Load. A schematic of the Test
Setup is shown in Figure 4. All signal cables that are
used to connect to the Digital Oscilloscope should be of
comparable length so that there is no significant time
delay between the signals measured by the
Oscilloscope.
10.2 Prior to making any measurements, the Digital
Oscilloscope and other electronic test equipment shall
be turned on and allowed to warm up per the
manufacturer’s guidelines before the testing is to take
place. This time will allow for electronics to come to a
stable operating condition for the measurements.
11 Test Procedure for Measuring the Transient
Response of the RF Generator as a Function of
the Change in RF Enable Signal
11.1 The test procedure described below compares the
change in the RF Enable signal (produced by the RF
Enable Signal Generator) to the signal produced by the
DUT. The Enable signal is an input to the DUT and is
used by the DUT to turn on and turn off the output
power. The DUT output power level is measured with
the RF Signal Sampler. The signal from the RF Signal
Sampler is used by the RF Rectifier/Diode Detector to
produce a DC signal that corresponds to the RF output
power from the DUT. The Digital Oscilloscope
measures both the RF Enable signal and the RF
Detector signal.
11.2 Test Method for Measuring the Transient
Response of the RF Generator as a Function of the
Change in RF Enable Signal
11.2.1 Connect the outputs of the RF Enable Signal
Generator and the RF Set Point Signal Generator to the
controller input of the DUT. Connect the RF power
output of the DUT to the input of the RF Signal
Sampler, and connect the output of the RF Signal
Sampler to the High-Power RF Dummy Load. If any
coaxial cable assemblies or adapters are used to make
any of the connections between the output of the DUT
and the High-Power RF Dummy Load, they shall have
power handling capability that is consistent with the
maximum output power of the DUT. Connect the
reduced-level signal output of the RF Signal Sampler to
the input of the RF Rectifier/Diode detector. Connect
the output of the RF Enable Signal Generator and the
output of the RF Rectifier/Diode Detector to the input
channels of the Digital Oscilloscope. Inspect all
connections of the Test Setup to ensure proper contact.
11.2.2 Set up the Digital Oscilloscope to trigger off of
the signal level change of the RF Enable Signal
Generator.
11.2.3 Turn on the RF Set Point Signal Generator to a
level that will produce the desired output power.
11.2.4 Change the RF Enable Signal Generator output
to a level that will turn on the DUT (per the DUT
manufacturer’s specification). Measure and record the
time delay between the RF Enable Signal Generator
signal and the RF Rectifier/Diode Detector signal with
the Digital Oscilloscope. Also record the indicated RF
output power level as measured by the RF Power
Meter. The measurement by the Digital Oscilloscope