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SEMI M23-0703 © SEMI 1993, 2003 7 Figures 2A and 2B Both Diagr ams show a n InP Wafer w ith Surface Ori entation A and Fl at Option V -Groove

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SEMI M23-0703 © SEMI 1993, 2003 6
Figures 1A and 1B
Both Diagrams show an InP Wafer with Surface Orientation A and Flat Option Dove-Tail
SEMI M23-0703 © SEMI 1993, 2003 7
Figures 2A and 2B
Both Diagrams show an InP Wafer with Surface Orientation A and Flat Option V-Groove
SEMI M23-0703 © SEMI 1993, 2003 8
Figures 3A and 3B
Both Diagrams Show an InP Wafer with Surface Orientation B and Flat Option Dove-Tail