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SEMI E137-1104 © SEMI 2004 3 7.3.5 Following final assembly and test, all exposed surfaces should be thoroughly cleaned with a solution of 10 to 70% IPA diluted in UPW using wip es and swabs. 7.3.6 The SME should be insp…

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SEMI E137-1104 © SEMI 2004 2
4.5 Western Wood Products Association (WWPA)
4
Western Lumber Grading Rules (WLGR)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 DOD — Department of Defense
5.1.2 EPS — Expanded Polystyrene
5.1.3 IPA — Isopropyl Alcohol (2-propanol)
5.1.4 ISO — International Organization for
Standardization
5.1.5 PO — Purchase Order
5.1.6 PWP — Particles Per Wafer Pass
5.1.7 SEMI — Semiconductor Equipment and
Materials International
5.1.8 SME — Semiconductor Manufacturing
Equipment
5.1.9 UPW — Ultrapure Water
5.1.10 USA — United States of America
5.1.11 WLGR — Western Lumber Grading Rules
5.1.12 WWPA — Western Wood Products Association
6 Cleaning and Wrapping Materials
6.1 For cleaning and triple wrap packaging, the
following materials are recommended:
6.1.1 UPW (reference SEMI F63)
6.1.2 IPA (reference SEMI C41)
6.1.3 Ultralow particle generation, ultralow extractable
ion level, polyester, ISO ST 14644-1 (subsequently
called ISO) Class 5 cleanroom-compatible swabs and
wipes with sealed edges
6.1.4 Ultralow particle generation, hydrocarbon-free,
ultralow extractable ion level, ~150 µm (0.006 in.)
thick, natural polyethylene film
6.1.5 Ultralow particle generation adhesive tape
4 Western Wood Products Association (WWPA), 522 SW Fifth Ave.
Suite 500, Portland, Oregon 97204-2122, Tel: 503-224-3930, Fax:
503-224-3934, Website: http://www.wwpa.org
7 Assembly and Pre-Packaging Procedures
7.1 Pre-Assembly
7.1.1 Machining, sawing, welding, brazing, grinding,
sanding, and other manufacturing operations
incompatible with cleanrooms should be completed
before components are brought into the clean assembly
area.
7.1.2 All SME components should be vacuumed,
blown off with filtered air, and cleaned with a solution
of 10 to 70% IPA diluted in UPW using wipes and
swabs immediately prior to being brought into the clean
assembly area.
7.1.3 Cutting oils, lubricants, and solder flux should be
removed before components are brought into the clean
assembly area.
7.2 Clean Assembly Area
7.2.1 All components of the SME should be assembled
in at least an ISO Class 6 or better (ISO Class 5
preferred) cleanroom.
7.2.2 A set of clean assembly tools should be
maintained in the clean assembly area.
7.2.2.1 If this is not possible, tools should be
vacuumed, blown off with filtered air, and cleaned with
a solution of 10 to 70% IPA diluted in UPW using
wipes and swabs immediately prior to each time they
reenter the clean assembly area.
7.2.2.2 The assembly tools in the clean assembly area
should be cleaned periodically and as needed if they
become contaminated during usage.
7.3 Pre-Packaging
7.3.1 All SME with water (including UPW) or other
liquids should be fully emptied and completely dried
using dry, hydrocarbon-free air or nitrogen.
7.3.1.1 All SME with UPW that comes in direct
contact with the production units (e.g., wafers) should
have lines, baths, tanks, etc. flushed with a bacteria
retardant (e.g., H
2
O
2
solution, iodine/UPW solution)
before emptying them fully.
7.3.2 All utility lines should be capped before and
during shipment.
7.3.3 The SME with vacuum chambers should have
these chambers and vacuum lines sealed and shipped
under vacuum.
7.3.4 The SME should be clearly marked showing
correct lifting points for removal from shipping
container.
SEMI E137-1104 © SEMI 2004 3
7.3.5 Following final assembly and test, all exposed
surfaces should be thoroughly cleaned with a solution
of 10 to 70% IPA diluted in UPW using wipes and
swabs.
7.3.6 The SME should be inspected thoroughly for
cleanliness.
7.3.6.1 The supplier should provide a copy of their
inspection results (e.g., marked checklist) with the
SME.
8 Triple Wrap Strategy
8.1 The following procedures support the strategy of
totally enclosing and sealing the SME, separate
subassemblies, or support components in three layers of
protective wrapping (see Section 9) so that each layer
forms a protective seal against moisture and particles.
8.2 Each individual wrap layer is intended to be
removed at a specific stage of delivery and relocation
(see Section 16) adhering to the following guidelines.
8.2.1 Inner Wrap — This inner wrap should stay with
the SME, separate subassemblies, and components all
the way into the final cleanroom or a staging area of the
same cleanliness level for wipe down. The wrap should
be cleaned prior to movement into the cleanroom.
8.2.2 Middle Wrap — This middle wrap should stay
with the SME, separate subassemblies, and components
until they reach at least an ISO Class 7 intermediate
staging area. The wrap should be cleaned before
leaving the customer’s loading dock/receiving area and
again before it is removed in the staging area.
8.2.3 Outer Wrap — This wrap is used to protect the
SME, separate subassemblies, and components while in
transit to the loading dock. While the SME, separate
subassemblies, and components are on the customer’s
loading dock/receiving area, the outer shipping
materials should be removed. The wrap should also be
cleaned and removed.
9 Packaging Procedures
9.1 Packaging in Clean Assembly Area — The SME,
separate subassemblies, and components should then be
totally enclosed in a clean polyethylene inner wrap
using tape as required.
9.1.1 A humidity indicator should be included inside of
the initial wrapping layer.
9.1.2 If two sets of pallets are used, the inner pallet
should also meet the requirements of Section 10.2 and
should be enclosed with the SME, separate
subassemblies, and components.
9.1.2.1 The inner pallet should be clearly marked
showing correct lifting points for removal from
shipping container.
9.2 Packaging in Dedicated Clean Packaging Area —
After the inner (i.e., first) wrap is applied, the SME,
separate subassemblies, and components should be
relocated to a dedicated clean (ISO Class 7 or better)
packaging area.
9.2.1 SME, separate subassemblies, and components
should then be totally enclosed in two more
independent layers (i.e., middle and outer wraps) of
clean polyethylene film using tape as required.
9.2.2 After the SME, separate subassemblies, and
components are triple wrapped, they should be placed
on a pallet (see Sections 10 and 11) so that the triple
wrapping is not damaged or violated.
9.2.2.1 The pallet should be movable (with SME,
separate subassemblies, and components attached to it)
with a conventional pallet jack or forklift.
9.2.2.2 The SME, separate subassemblies, and
components should be capable of placement on and
removal from the pallet with a conventional pallet jack
or fork lift without compromising or tearing any of the
triple wrapping.
9.3 After placement on the pallet, the SME, separate
subassemblies, and components should be relocated to a
separate crating area.
10 Crating Procedures
10.1 Design
10.1.1 The maximum outside crating dimensions
should be sized not to exceed the maximum size
requirements for method(s) of shipment (e.g., airfreight,
air-ride trailers).
10.1.1.1 Crating shape and dimensions should be
optimized to obtain transportation cost savings, when
possible.
10.1.2 To ensure crate stability in transit, any crate
over 1.2 m (48 in.) tall should be constructed so that the
narrowest other dimension is no less than half the
crate’s height.
10.2 Crating/Packaging Materials
10.2.1 All wood products used should meet the
regulatory requirements (e.g., heat treated wood
regulations) of the country of delivery and any interim
countries that the SME may be transported through.
SEMI E137-1104 © SEMI 2004 4
10.2.2 Spruce, fir, or pine, Standard grade or better
based on WWPA WLGR, or equivalent-strength
softwoods available to the crating location should be
used.
10.2.3 Plywood should be 3 ply for 1.0 to <1.3 cm
(0.375 to <0.5 in.) in thickness and 5 ply for 1.3 cm
(0.5 in.) in thickness.
10.2.4 Plywood grades should be C-D Exterior, C-D
Plugged, or Sanded Shop-Cutting Panel (“Sanded
Shop”) with exterior glue based on APA The
Engineered Wood Association PS 1.
10.2.4.1 Floating decks may be “Underlayment”
quality, when appropriate.
10.2.5 For SME, separate subassemblies, and
components weighing 2500 kg (5,500 lb), the
following materials should be used:
1 cm (0.375 in.) nominal thickness plywood for
sides and covers,
2.5 × 10 cm (1 × 4 in.) nominal thickness wood for
cleats,
1.3 cm (0.5 in.) nominal thickness plywood for
decking, and
5 cm (2 in.) nominal thickness wood slabs for crate
base.
10.2.6 For SME, separate subassemblies, and
components weighing >2500 kg (5,500 lb), the
following materials should be used:
1.3 cm (0.5 in.) nominal thickness plywood for
sides and covers,
5 × 10 cm (2 × 4 in.) nominal thickness wood for
cleats,
2.5 cm (1 in.) nominal thickness plywood for
decking, and
5 cm (2 in.) nominal thickness wood slabs for crate
base.
10.2.7 The following types and densities of cushion
foam should be used, as required:
Polyurethane foam 19 to 35 kg/m
3
(1.2 to 2.2 lb/ft
3
)
Polyethylene foam 16 to 32 kg/m
3
(1.0 to 2.0 lb/ft
3
)
Polyethylene foam 32 to 64 kg/m
3
(2.0 to 4.0 lb/ft
3
)
Polyethylene foam 64 to 96 kg/m
3
(4.0 to 6.0 lb/ft
3
)
10.2.7.1 Faying (i.e., joining) surfaces of polyethylene
cushion foam used for floating decks should be skived
(i.e., skin removed) to ensure proper bonding.
10.2.8 Barrier bag material should comply with U.S.
MIL-PRF-131 Class 2.
10.2.9 Desiccant (i.e., drying agent) should be
nondusting type, clay or silica gel (e.g., U.S. MIL-D-
3464, Type II, or commercial equivalent).
10.2.10 The following types of cushion wrapping
materials should be used, as required:
Polyethylene foam sheeting, 3 to 6 mm (0.125 to
0.25 in.) nominal thickness
Polyethylene bubble pack cushioning
10.2.10.1 Loose-fill expanded polystyrene (EPS) or
paper products should not be used.
10.2.11 When required due to shipment method (e.g.,
ocean), case line paper should be waterproof paper
laminate (e.g., asphalt or blond laminate) with a
4.9/8.1/4.9 kg/100 m
2
(30/50/30 lb/3000 ft
2
) minimum
basis weight or equivalent.
10.2.12 Strapping material used should be commercial
grade and type determined by SME weight and type.
10.2.13 Tilt indicators used should be low profile,
disposable, and nonresettable.
10.2.14 Shock indicators used should be low profile,
disposable, and nonresettable.
10.2.14.1 The specific shock indicators used should
have an appropriate sensitivity based on the
calculations and recommended ratings of the shock
indicator supplier for the type of crating and SME
sensitivity.
10.2.14.2 Nondisposable (i.e., reusable), battery-
operated, shock-measurement recording equipment may
be used for SME more sensitive to handling, as
required.
10.3 High-temperature and/or low-temperature
indicators used should be disposable and nonresettable.
10.3.1.1 The specific temperature indicator(s) used
should have an appropriate activation point based on
the sensitivity of the SME to temperatures potentially
encountered during shipment or storage.
10.3.1.2 Nondisposable (i.e., reusable), battery-
operated, temperature-measurement recording
equipment may be used for SME more sensitive to
temperature, as required.
10.4 Workmanship
10.4.1 Crates should be free of cracked, damaged, or
broken fasteners.
10.4.2 Nails should not be bent or driven to cause the
wood to split.