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SEMI F43-0699 © SEMI 1999 7 X 1 X 2 X 3 45º C L Suitable Delivery Ramp S.S. Sphere Mass = 5 4.8 ± 1g X 1 = 30.5 cm ± 0.5 cm X 2 = 0 cm or very close t o it (due to angle and b all size) X 3 = 2.4 cm ± 0.1 cm ( dia . of t…

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SEMI F43-0699 © SEMI 1999 6
C
N
C
Gas
Inlet
F1
R1
P1
V1
FM1
FM2
F2
PV1
F3
Test
Purifier
Exhaust
P2
F1 = 10" PTFE Membrane Filter
R1 = @ 0-100 psig Outlet Regulator
P1, P2 = Electronics Grade Pressure Gauge (30"-0-60)
V1 = Three-Way Valve
FM1 = Low Flow (0-2 scfm) Flowmeter
FM2 = High Flow (0-20 scfm) Flowmeter
F2, F3 = Electronics Grade Filter
PV1 = Electronics Grade Pneumatic Valve
Figure 1
Schematic of Particle Test Loop
SEMI F43-0699 © SEMI 19997
X
1
X
2
X
3
45º
C
L
Suitable
Delivery
Ramp
S.S.
Sphere
Mass = 54.8 ± 1g
X
1
=
30.5 cm ± 0.5
cm
X
2
= 0 cm or very close to it (due to angle and ball size)
X
3
=
2.4 cm ± 0.1 cm
(
dia . of the SS sphere)
TEST
COMPONENT
Figure 2
Mechanical Shock Device
NOTE 1: X3 will change with a change on sphere size.
NOTE 2: Position the delivery ramp so that the position of impact is at the midpoint of the axial centerline of the device under
test.
SEMI F43-0699 © SEMI 1999 8
Table 1 Parts List for the Recommended Particle Test Apparatus
Item
number Description
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
1/4 in. diameter electropolished (EP) SS tube
1/4 in. to 1/2 in. tube reducing union
1/2 in. diameter EP SS tube
PTFE membrane filter with 3/8 in. face seal
Pressure regulator, 0-300 inlet pressure, 0-100 outlet pressure
1/2 in. butt weld tee
1/2 in. tube to 3/8 in. NPT female connector
0-60 psig electronics grade pressure gauge
1/2 in. to 1/2 in. union
1/2 in. 3-way SS ball valve
1/4 in. tube to 1/2 in. port reducer
0.2-2 std ft
3
flowmeter
1-15 std ft
3
flowmeter
1/2 in. SS union
1/2 in. dia, 3-ft flexible SS tube
1/2 in. union elbow
1/2 in. pneumatic valve
1/2 in. to 1/4 in. SS reducer gland
Test component
3-way normally closed solenoid air valve
Solenoid valve cycle controller
1/2 in. welded tee
1 1/2 in. dia., 4-ft long exhaust tube
1/2 in. tube to 1/4 in. NPT adapter
1/8 in. dia., 17 in. long SS sample tube
1/4 in. to 1/8 in. reducer union
1/4 in. dia., 30 in. long SS sample loop
1/4 in. to 3/8 in. reducer union
Condensation Nucleus Counter