semi合集-English.pdf - 第2893页

SEMI E109-0305 © SEMI 2001, 2005 3 5.2.13 Multi-Reticle Pod — TBD 5.2.14 object instantiatio n — the act of storing of in formation related to a physical or lo gical entity so that it can be recalled on de mand based on …

SEMI E109-0305 © SEMI 2001, 2005 2

SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O interface

SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specifcation of Concepts, Behavior, and Services

SEMI E100 — Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 inch or 230 mm Reticles

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AGT — Automated Guided Transport

5.1.2 AGV— Automated Guided Vehicle

5.1.3 AMHS — Automated Material Handling System

5.1.4 ARHS — Automated Reticle Handling System

5.1.5 GEM — Generic Equipment Model

5.1.6 IRL — Internal Reticle Library

5.1.7 OHT — Overhead Hoist Transport

5.1.8 PGV — Person Guided Vehicle

5.1.9 PIO — Parallel Input/Output Interface

5.1.10 RGT — Rail Guided Transport

5.1.11 RGV — Rail Guided Vehicle

5.1.12 RSP – Reticle SMIF Pod

5.2 Definitions

5.2.1 Automated Material Handling System — an automated system to store and transport materials within the

factory.

5.2.2 Automated Reticle Handling System — a specific type of Automated Material Handling System to store and

transport reticles and reticle pods within the factory.

5.2.3 automation — the degree to which activities of machines or production systems are self-acting. In this

standard automation provides methods that will reduce the amount of operator intervention required.

5.2.4 buffer — a set of one or more locations for holding reticles at/inside the production equipment.

5.2.5 collection event — a collection event is an event (or grouping of related events) on the equipment that is

considered to be significant to the host.

5.2.6 content map — ordered list of reticle identifiers corresponding to slot 1,2,3…n. (Note that this is redundant

with the definition in Table 6).

5.2.7

host — the factory computer system or an intermediate system that represents the factory and the user to the

equipment.

5.2.8 Internal Pod Buffer — storage area for reticle pod that is internal to the equipment.

5.2.9 internal reticle library — a set of locations within the equipment to store reticles. These locations exclude

load ports.

5.2.10 kitting — the act of placing a group of 1 or more reticles in a reticle pod for removal from a bare reticle

stocker. This is accomplished via a ReticleTransferJob that specifies one or more reticles for removal from the

stocker, or by one or more MoveReticle services that specify a destination that is a Pod Location.

5.2.11 load — the operation of placing a pod on a load port.

5.2.12 load port — the interface location on the equipment where pods are loaded and unloaded.

SEMI E109-0305 © SEMI 2001, 2005 3

5.2.13 Multi-Reticle Pod — TBD

5.2.14 object instantiation — the act of storing of information related to a physical or logical entity so that it can be

recalled on demand based on its public identifier.

5.2.15 on-line equipment — equipment that is connected to, and able to communicate fully with, the host.

5.2.16 pod — in this document pod refers to an RSP or a Multi Reticle SMIF Pod.

5.2.17 PodID — a readable and unique identifier for the pod.

5.2.18 PodID read — the process of the equipment reading the PodID from the carrier.

5.2.19 PodID tag (tag, ID tag) — a physical device for storing PodID and other information. There are two basic

types of tags, read-only tags and read/write tags. [SEMI E99]

5.2.20 process equipment — equipment used to produce product, such as semiconductor devices. This excludes

metrology and material handling equipment.

5.2.21 production equipment — equipment used to produce product, such as semiconductor devices, including

substrate sorting, process, and metrology equipment and excluding material handling equipment.

5.2.22 properties — a set of name value pairs assigned to an object or used in a service message to include

additional information about the object (i.e., pod, port, etc.).

5.2.23 re-initialization — a process where production equipment is either powered off then on or when some kind

of hardware or software reset is initiated to cause the equipment to reset and possibly reload its software. On

production equipment that contains some kind of mass storage device this can also be called a “reboot”.

5.2.24 read position — any position where the tag on a pod can be read.

5.2.25 reticle — a mask that contains the patterns to be reproduced on a substrate; the image may be equal to or

larger than the final projected image.

5.2.26 Reticle SMIF Pod (RSP) — minienvironment compatible carrier capable of holding one 6 inch or one 230

mm reticle in a horizontal orientation during transport and storage and is compatible with a Standard Mechanical

Interface (SMIF) per SEMI E19.4.

5.2.27 single communication connection — exactly one physical connection using exactly one logical session and a

standard set of messages.

5.2.28 slot map –– the information that relates which slots in a reticle pod hold reticles, both correctly and

incorrectly.

5.2.29 slot map read –– the process of the equipment reading the slot map for substrate position and placement

within the pod.

5.2.30 standard message set — messages conforming to standard message specifications.

5.2.31 transfer unit

— maximum number of pods allowed in a specific transfer service:

 AA is the maximum number of pods allowed for acquisition at the transfer source.

 BB is the maximum number of pods allowed for deposit at the transfer destination.

 CC is the maximum number of carrier pods allowed for transfer in one transport vehicle.

The transfer unit is the minimum of AA, BB, and CC.

NOTE 1: At the time this document was originally written, December 2000, transfer unit for reticle transfer to process

equipment is expected to be equal to one. Transfer unit to other equipment may be greater than one.

5.2.32 unload — the operation of removing a pod from a load port.

5.2.33 write position — any position on a load port or in an internal buffer from which the tag on a pod can be

written to. This position may vary on any particular equipment depending on the write technology selected by the

end user. The read position and the write position may or may not be the same position.

SEMI E109-0305 © SEMI 2001, 2005 4

6 Requirements

6.1 Reticle and Pod Management compliant equipment is required to provide certain capabilities defined by other

standards: accessibility to status information, event reporting, alarm management, and equipment control. These

requirements shall be satisfied through compliance to the following sets of standards:

6.2 Generic Equipment Model Standard (GEM) SEMI E30

 Event Notification

 Status Data Collection

 Equipment Constants

 Alarm Management

 Equipment Control

 Remote Control

 Error Messages

 Dynamic Event Report Configuration

6.3 Object-Based Standards

 Object Services Standard (SEMI E39)

 Event Reporting (SEMI E53)

 Exception Management (SEMI E41)

7 Conventions

7.1 Objects

7.1.1 Whenever the equipment is required to know about specific kinds of entities, and required to manage

information concerning these entities, it is useful to treat these entities as objects that comply with the basic

requirements of SEMI E39 (OSS). This is especially true whenever there are a large number of objects of a given

type or when the entities are transient rather than permanent. In both cases, it is difficult to describe a general way

for the host and equipment to specify which particular entity is referenced and to get information related only to a

specific one out of many.

7.1.2 By defining these entities as objects that comply with SEMI E39, it is only necessary for the host to specify

the type of object and its specific identifier in order to inquire about one or more properties of the specific entity of

interest.

7.1.3 Object Properties

7.1.3.1 A property (attribute) is information about an individual object that is presented as a name/value pair. The

name is a formally reserved text string that represents the property, and the value is the current setting for that

property.

7.1.3.2 Properties shall be accessible to the host via the service GetAttr and SetAttr for the Reticle Pod object,

Reticle object, and Reticle location object:

 get the list of IDs for the current reticle pods at the equipment, and

 get the specified properties for one or more individual reticle pods.

7.1.4

Rules for Object Properties

 Attributes with RO access can not be changed using SetAttr service as defined in OSS.

 Attributes with RW access can be changed using SetAttr service as defined in OSS.