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SEMI E54.13-0303 © SEMI 2003 2 structure and behavior onto the network for each SEMI specified SDM (refer red to as the “SDM m apping”). 2.4 Adding SDM Ma ppings  SDM mapping s added to part two of t his docum ent are c…

SEMI E54.13-0303 © SEMI 2003 1

SEMI E54.13-0303

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK

COMMUNICATIONS FOR ETHERNET/IP™

This specification was technically approved by the Global Information and Control Committee and is the

direct responsibility of the North American Information and Control Committee. Current edition approved

by the North American Regional Standards Committee on November 22, 2002. Initially available at

www.semi.org January 2003; to be published March 2003.

1 Purpose

1.1 Introduction

1.1.1 This standard defines a communication

specification based on the EtherNet/IP

(Ethernet/Industrial Protocol) network to enable

communications between intelligent devices on a

sensor/actuator network (SAN) that operate according

to SEMI specified device models (common and device

specific) in a semiconductor manufacturing tool.

1.2 Motivation

1.2.1 EtherNet/IP is a communication system suitable

for use in industrial environments. EtherNet/IP allows

intelligent devices to exchange time-critical application

information. These devices include simple I/O devices

such as sensors/actuators, as well as complex control

devices such as robots, programmable logic controllers,

and process controllers.

1.2.2 EtherNet/IP uses CIP (Control and Information

Protocol), the common network, transport and

application layers also shared by DeviceNet (SEMI

E54.4). EtherNet/IP provides:

• A cost effective solution to bridge factory Ethernet

(IEEE 802.3) networks to SEMI E54.4 DeviceNet

low-level device networks,

• Access to intelligence present in low-level devices,

and

• Producer/Consumer model for Master/Slave and

Peer-to-Peer application relationships.

1.3 Background

1.3.1 EtherNet/IP makes use of standard Ethernet and

TCP/IP technology to transport CIP communications

packets. The result is a common, open application

layer on top of open and highly popular Ethernet and

TCP/IP protocols.

1.3.2 EtherNet/IP provides a producer/consumer model

for the exchange of time-critical control data. The

producer/consumer model allows the exchange of

1 EtherNet/IP is a trademark of Open DeviceNet Vendor Association

(ODVA)

application information between a sending device (e.g.,

the producer) and many receiving devices (e.g., the

consumers) without the need to send the data multiple

times to multiple destinations. For EtherNet/IP, this is

accomplished by making use of the CIP network and

transport layers along with IP Multicast technology.

Many EtherNet/IP devices can receive the same

produced piece of application information from a single

producing device.

1.3.3 EtherNet/IP makes use of standard IEEE 802.3

technology; there are no non-standard additions that

attempt to improve determinism. Rather, EtherNet/IP

recommends the use of commercial switch technology,

with 100 Mbps bandwidth and full-duplex operation, to

provide for more deterministic performance.

2 Scope

2.1 Specification  This document specifies a

Sensor/Actuator Network Communications Standard

(NCS) based on the EtherNet/IP specification that

enables communication with SAN devices configured

according to SEMI SAN Common Device Model

(CDM) and appropriate Specific Device Model (SDM)

specifications.

2.2 Use  This document is used in conjunction with a

SEMI standard SAN CDM specification and one or

more SEMI standard SDM specifications (e.g. for a

mass flow controller). Together, they describe the

externally visible data structure and behavior of devices

utilizing the EtherNet/IP networking capability in a

SEMI compliant SAN system. The general

sensor/actuator network document architecture is

described in the SEMI E54.0 Sensor/Actuator Network

Standard (the root SAN document).

2.3 Document Structure



The EtherNet/IP network

communication standard complies with the SEMI SAN

NCS template document structure, as described in

SEMI E54.0. The standard document is composed of

two main parts. The first part (Sections 1 through 8)

specifies the SAN enabling protocol as well as the

presentation (i.e., mapping) of CDM object structure

and behavior onto the network (referred to as the

“CDM mapping”). The second part (Section 9)

specifies the presentation (i.e., mapping) of SDM object

SEMI E54.13-0303 © SEMI 2003 2

structure and behavior onto the network for each SEMI

specified SDM (referred to as the “SDM mapping”).

2.4 Adding SDM Mappings  SDM mappings added

to part two of this document are considered document

additions and are balloted as such. An SDM mapping

may only be balloted for addition to this document if

the corresponding SEMI SDM has been standardized.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This document specifies a semiconductor

equipment SAN based solely on EtherNet/IP and is a

companion document to the EtherNet/IP specification;

thus a complete specification of this standard

necessarily includes the EtherNet/IP specifications.

There are other semiconductor equipment SAN

communications options. The specifications for these

options are not included here.

3.2 This standard specifies enhancements that provide

additional capabilities over and above those currently

required by EtherNet/IP. In order to avoid document

consistency problems, information in the EtherNet/IP

specification that relates to this standard is not repeated

in this document. This document is limited to

describing enhancements or limitations to the

EtherNet/IP specification that are imposed by this

standard.

3.3 A complete specification of the conformance

testing procedure shall include the EtherNet/IP

conformance testing specification. Conformance

testing shall also include enhancements and limitations

to the EtherNet/IP specification required by this

standard.

4 Referenced Standards

4.1 SEMI Standards

SEMI E30 — Generic Model for Communications and

Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts,

Behavior, and Services (OSS)

SEMI E54 — Sensor/Actuator Network Standard

SEMI E54.1 — Standard for Sensor/Actuator Network

Common Device Model

SEMI E54.2 — Guide for Writing Sensor/Actuator

Network (SAN) Standard Ballots

4.2 ISO Standards

ISO 7498  Basic Reference Model for Open Systems

Interconnection.

ISO/IEC 8802-3  Carrier Sense Multiple Access with

Collision Detection (CSMA/CD) Access Method and

Physical Layer Specifications (Ethernet IEEE 802.3).

4.3 Other Documents

ODVA

EtherNet/IP Specification  Volume I and

Volume II, Release 1.0.

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Terminology that is common to all of the

documents in this SAN standard may also be defined in

SEMI E54. Terminology may be reproduced here

which is defined in other SEMI documents.

5.2 Abbreviations and Acronyms

5.2.1 CDM — Common Device Model

5.2.2 CIP — Control and Information Protocol

5.2.3 CM — Connection Manager object

5.2.4 DM — Device Management object

5.2.5 EIP — EtherNet/IP

5.2.6 EL — Ethernet Link object

5.2.7 IP — Internet Protocol

5.2.8 MR — Message Router object

5.2.9 NCS — Network Communication Standard

5.2.10 OSI — Open Systems Interconnect

5.2.11 OSS — Object Services Standard

5.2.12 PDU — Protocol Data Unit

5.2.13 SAC — Sensor, Actuator, Controller object

5.2.14 SAN — Sensor/Actuator Network

5.2.15 SDM — Specific Device Model

5.2.16 S-DS — S-Device Supervisor object

5.2.17 TCP — Transport Control Protocol

5.3 Device Component Definitions

2 International Organization for Standardization. ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30.

Website: /www.iso.ch

3 Open DeviceNet Vendor Association, 20423 State Road 7 #F6,

Boca Raton, FL 33498-6797; Phone: (1) 561-477-7966; Website:

www.odva.org.

SEMI E54.13-0303 © SEMI 2003 3

5.3.1 As this standard defines the presentation or

mapping of CDM data structure and behavior over a

network, it makes use of many of the terms in the CDM

document. Table 1 provides a mapping of fundamental

terminology of the CDM document into this document

and the EtherNet/IP specification. Note that Column 2

contains an equal sign “=” if the definition is used

exactly as specified in the CDM specification.

Table 1 Mapping of CDM to NCS Terminology

CDM Term NCS Equivalent EtherNet/IP

Equivalent

Device = =

Device Model = Device Profile

Object =, Class =, Class

Instance = =

Attribute = =

Behavior = =

Service = =

Behavior State

Diagram

= State Transition

Diagram

State Transition

Matrix

= State Event Matrix

5.4 EtherNet/IP Specific Definitions

5.4.1 class  A set of objects that all represent the

same kind of system component. A class is a

generalization of an object. All objects in a class are

identical in form and behavior, but may contain

different attribute values.

5.4.2 Control and Information Protocol (CIP)  The

common network, transport and application layers

shared by EtherNet/IP and DeviceNet.

5.4.3 device profile  An EtherNet/IP specification for

a device that contains an object model for the device

type, the I/O data format for the device type, and the

configuration data and the public interface(s) to that

data.

5.4.4 encapsulation  The technique used by layered

protocols in which a layer adds header information to

the protocol data unit (PDU) from the layer above. As

an example, in Internet terminology, a packet would

contain a header from the data link layer, followed by a

header from the network layer (IP), followed by a

header from the transport layer (TCP), followed by the

application protocol data.

5.4.5 Ethernet  A 10/100-Mb/s standard for LANs,

initially developed by Xerox, and later refined by

Digital, Intel and Xerox (DIX). All hosts are connected

to the network media where they contend for network

access using a Carrier Sense Multiple Access with

Collision Detection (CSMA/CD).

5.4.6 EtherNet/IP  EtherNet/IP (Ethernet/Industrial

Protocol) is a networked communications protocol that

specifies the encapsulation of CIP over TCP/IP.

5.4.7 Explicit Message Connections  Connections

over an EtherNet/IP network that provide generic,

multi-purpose communication paths between two

devices. These connections often are referred to as just

Messaging Connections. Explicit Messages provide the

typical request/response–oriented network communica-

tions.

5.4.8 Input/Output Connections  Connections over

an EtherNet/IP network that provide dedicated, special-

purpose communication paths between a producing

application and one or more consuming applications.

Application-specific I/O data moves though these ports.

6 Communication Protocol High Level

Structure

6.1 Though the protocol specification is called

“EtherNet/IP”, Ethernet is technically not required.

EtherNet/IP may be used on any media that supports

transmission of the Internet Protocol (IP). When

Ethernet is used, it shall comply with the IEEE 802.3

specification.

NOTE 1: Conformance testing of EtherNet/IP products is

limited to those products implemented on Ethernet.

6.2 The following sections give a brief description of

the EtherNet/IP specification in terms of the seven layer

architecture described by the ISO Basic Reference

Model for Open Systems Interconnection (the OSI

model).

6.3 Physical Layer  The physical layer requirements

include specifications for topology, media, connectors,

shielding and grounding. Where copper media is used,

the EtherNet/IP specification is based on the

ANSI/TIA/EIA-568-B Category 5/5E cable/connector

specifications. A Commercial grade and Industrial

grade level of conformance are specified. The

signaling and coupling are as specified in the IEEE

802.3 / TP-PMD standard.

6.4 Data Link Layer  For compatibility with

EtherNet/IP conformance testing capabilities, the

device must comply with the Ethernet Data Link Layer

Specifications as specified by IEEE 802.3. Otherwise,

any data link layer that supports the IP is acceptable.

6.5 Network Layer  The network layer for the

EtherNet/IP protocol is defined by the Internet Protocol

(IP version 4) (RFC 791).