semi合集-English.pdf - 第7746页
SEMI T12-0305 © SEMI 2004, 2005 25 10.2.3.12 Parameter L ist — Above services use following pa rameters. Table 37 Parameter Definition Form Action Expected action on expiration. Text. AttachmentId Identification of Attac…

SEMI T12-0305 © SEMI 2004, 2005 24
10.2.3.6 changeAction — This service is used to substitute an action when expiration condition meets. Following
table defines its parameters.
Table 31
Parameter Req/Ind Rsp/Conf Description
Action M - Action on expiration.
ServiceStatus - M Result of service request.
10.2.3.7 showDescription — This service is used to inquire detail purport of Expiry and related action. Following
table defines its parameters.
Table 32
Parameter Req/Ind Rsp/Conf Description
Description - M Description about purport of Expiry.
ServiceStatus - M Result of service request.
10.2.3.8 changeDescription — This service is used to substitute detail purport of Expiry and related action.
Following table defines its parameters.
Table 33
Parameter Req/Ind Rsp/Conf Description
Description M - Description about purport of Expiry.
ServiceStatus - M Result of service request.
10.2.3.9 showSubject — This service is used to inquire subject Attachment of Expiry. Following table defines its
parameters.
Table 34
Parameter Req/Ind Rsp/Conf Description
AttachmentId - M Identification of Attachment.
ServiceStatus - M Result of service request.
10.2.3.10 showState — This service is used to inquire Expiry’s state. Following table defines its parameters.
Table 35
Parameter Req/Ind Rsp/Conf Description
State - M State of Expiry.
ServiceStatus - M Result of service request.
10.2.3.11 destruct — This service is used to remove Expiry object. Following table defines its parameters.
Table 36
Parameter Req/Ind Rsp/Conf Description
State - M Immediate state just before removed.
ServiceStatus - M Result of service request.

SEMI T12-0305 © SEMI 2004, 2005 25
10.2.3.12 Parameter List — Above services use following parameters.
Table 37
Parameter Definition Form
Action Expected action on expiration. Text.
AttachmentId Identification of Attachment: usually equivalent to physical ID
maybe tagged on physical attachment.
Text.
Description Detail description about purport of Expiry and its action. Text.
Expiration Expiration condition: maybe target value or equation. Text.
ExpiryId Identification of Expiry. Text.
ServiceStatus Result of service to show successful or reason of failure. Text.
State State of Expiry object. Text.
10.2.4 HistoryBuffer — Following tables define services of HistoryBuffer class.
10.2.4.1 Service List — HistoryBuffer class has following services.
Table 38
Operation Description Type Reqd
showAttachment Inquires Attachment ID for this buffer. R Y
showHistory Inquires buffered history. R Y
updateHistory Appends history information to buffer. R Y
showReleaseCondition Inquires condition when HistoryBuffer release buffered information. R Y
setReleaseCondition Sets condition when HistoryBuffer release buffered information. R Y
showState Inquires state of HistoryBuffer. R Y
destruct Destruct this HistoryBuffer object. R N
10.2.4.2 ShowAttachment — This service is used to inquire HistoryBuffer’s ID. Following table defines its
parameters.
Table 39
Parameter Req/Ind Rsp/Conf Description
AttachmentId - M Identification of Attachment to buffer history.
ServiceStatus - M Result of service request.
10.2.4.3 showHistory — This service is used to inquire contents of history buffer. Following table defines its
parameters.
Table 40
Parameter Req/Ind Rsp/Conf Description
History - M Historic information of an Attachment stored in buffer.
ServiceStatus - M Result of service request.
10.2.4.4 updateHistory — This service is used to append historic information. Following table defines its
parameters.

SEMI T12-0305 © SEMI 2004, 2005 26
Table 41
Parameter Req/Ind Rsp/Conf Description
History M - Historic information of an Attachment added on buffer.
ServiceStatus - M Result of service request.
10.2.4.5 showReleaseCondition — This service is used to inquire condition when HistoryBuffer release buffered
historic information. The buffer is cleared after releasing contents. Following table defines its parameters.
Table 42
Parameter Req/Ind Rsp/Conf Description
Condition - M Present release conditions.
ServiceStatus - M Result of service request.
10.2.4.6 setReleaseCondition — This service is used to set up condition when HistoryBuffer release buffered
historic information. The buffer is cleared after releasing contents. Following table defines its parameters.
Table 43
Parameter Req/Ind Rsp/Conf Description
Condition M - Requested release conditions.
ServiceStatus - M Result of service request.
10.2.4.7 showState — This service is used to inquire buffering state. Following table defines its parameters.
Table 44
Parameter Req/Ind Rsp/Conf Description
State - M State of HistoryBuffer.
ServiceStatus - M Result of service request.
10.2.4.8 destruct — This service is used to remove HistoryBuffer object. Following table defines its parameters.
Table 45
Parameter Req/Ind Rsp/Conf Description
State - M Immediate state just before removed.
ServiceStatus - M Result of service request.
10.2.4.9 Parameter List — Above services use following parameters.
Table 46
Parameter Definition Form
AttachmentId Identification of Attachment: usually equivalent to physical ID
maybe tagged on physical attachment.
Text.
Condition Such release conditions as the end of lot / cassette or 100 cycles.
Or-ed or and-ed condition may be okay if this pursing capability is
designed.
Text.