semi合集-English.pdf - 第5958页
SEMI P41-0304 E © SEMI 2004 18 </T oolCoordinateInformation> <InspectionMethod>Die to Die</InspectionMethod> <PreparetionOperator>SE MI-J</PreparetionOperator> <ReferenceAreaDB>C:\SETU…
SEMI P41-0304
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RELATED INFORMATION 1
APPLICATION NOTES
NOTICE: This related information is not an official part of SEMI P41 and was derived from the work of the
originating task force. This related information was approved for publication by full letter ballot procedures on
January 9, 2004.
R1-1 EXAMPLE OF AN XML FILE
<?xml version ="1.0"?>
<MDML data_no = "00001" date_stamp = "03-sep-2003">
<BasicInformation>
<MaskMaterialInformation>
<MaskSize unit = "inch" shape = "Square">
<MaskSize_X>6</MaskSize_X>
<MaskSize_Y>6</MaskSize_Y>
<MaskThickness>0.25</MaskThickness>
</MaskSize>
<MaskAbsorber>AR</MaskAbsorber>
</MaskMaterialInformation>
<DefectInspection preparation_date = "03-sep-2003">
<InspectionTool tool_name = "SEMI-J" tool_no = "001">
<ToolCoordinateInformation>
<CoordinateSystem>TopLeft_0</CoordinateSystem>
<ToolOriginPointInformation>
<ToolOriginPoint>stage top left corner</ToolOriginPoint>
<ToolOriginPosition unit = "micron">
<ToolOriginPosition_X>0</ToolOriginPosition_X>
<ToolOriginPosition_Y>0</ToolOriginPosition_Y>
</ToolOriginPosition>
</ToolOriginPointInformation>
<ToolStageCorrectionInformation>
<ToolStageCorrection unit = "ppm">
<ToolStageCorrection_X>-5</ToolStageCorrection_X>
<ToolStageCorrection_Y>10</ToolStageCorrection_Y>
</ToolStageCorrection>
<ToolStageSkew unit = "microm">
<ToolStageSkewCorrection>2</ToolStageSkewCorrection>
</ToolStageSkew>
</ToolStageCorrectionInformation>
<MaskOriginPointInformation>
<MaskOriginPoint>TopLeft</MaskOriginPoint>
<MaskOriginPosition unit = "micron">
<MaskOriginPosition_X>0</MaskOriginPosition_X>
<MaskOriginPosition_Y>0</MaskOriginPosition_Y>
</MaskOriginPosition>
<ToolOffset unit = "micron">
<ToolOffset_X>30000</ToolOffset_X>
<ToolOffset_Y>30000</ToolOffset_Y>
</ToolOffset>
</MaskOriginPointInformation>
<ToolStageAccuracy unit = "micron">1</ToolStageAccuracy>
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</ToolCoordinateInformation>
<InspectionMethod>Die to Die</InspectionMethod>
<PreparetionOperator>SEMI-J</PreparetionOperator>
<ReferenceAreaDB>C:\SETUP\DIE_TO_DIE</ReferenceAreaDB>
<DirectionInformation>
<ReferenceMark>BottomCenterID</ReferenceMark>
<MaskRotation>0</MaskRotation>
<MaskMirror>none</MaskMirror>
<MaskFlip>Film Side Up</MaskFlip>
</DirectionInformation>
<AreaInformation>
<LensDistance unit = "millimeter">33</LensDistance>
<InspectionArea unit = "millimeter">
<InspectionArea_X>99</InspectionArea_X>
<InspectionArea_Y>99</InspectionArea_Y>
<InspectionAreaChip_X>32.5</InspectionAreaChip_X>
<InspectionAreaChip_Y>32.5</InspectionAreaChip_Y>
<ChipSize_X>33</ChipSize_X>
<ChipSize_Y>33</ChipSize_Y>
</InspectionArea>
<InspectionChipNumber>
<InspectionChipNumber_X>3</InspectionChipNumber_X>
<InspectionChipNumber_Y>3</InspectionChipNumber_Y>
</InspectionChipNumber>
</AreaInformation>
<Reference origin = "Mask Origin Point">
<ReferencePointName>reference1</ReferencePointName>
<ReferencePosition unit = "micron">
<ReferencePosition_X>21700</ReferencePosition_X>
<ReferencePosition_Y>130700</ReferencePosition_Y>
</ReferencePosition>
<ImageData>
<ImageReferenceAdress>C:\image\reference1.bmp</ImageReferenceAdress>
<ImageInformation>
<ImageFormat>bitmap</ImageFormat>
<ImageMagnification>500</ImageMagnification>
<ImagePixelNumber_X>512</ImagePixelNumber_X>
<ImagePixelNumber_Y>512</ImagePixelNumber_Y>
<ImagePixelSize unit = "micron">
<ImagePixelSize_X>1</ImagePixelSize_X>
<ImagePixelSize_Y>1</ImagePixelSize_Y>
</ImagePixelSize>
<ImageGrayLevel>256</ImageGrayLevel>
</ImageInformation>
<ImageIllumination> transmission</ImageIllumination>
<ImageRotation>none</ImageRotation>
<ImageMirror>none</ImageMirror>
<ImageFlip>none</ImageFlip>
<ImageConvertInformation>
<ImageContrast>130/256</ImageContrast>
<ImageBrightness>130/256</ImageBrightness>
<ImageConversionParameter>raw data</ImageConversionParameter>
</ImageConvertInformation>
<ImageReference origin = "MaskOrigin">
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<ImageReferencePoint>TopLeft</ImageReferencePoint>
<ImageReferencePosition unit = "micron">
<ImageReferencePosition_X>21444</ImageReferencePosition_X>
<ImageReferencePosition_Y>130444</ImageReferencePosition_Y>
</ImageReferencePosition>
</ImageReference>
<ImageTarget origin = "TopLeft">
<ImageTargetPosition unit = "micron">
<ImageTargetPosition_X>256</ImageTargetPosition_X>
<ImageTargetPosition_Y>256</ImageTargetPosition_Y>
</ImageTargetPosition>
<ExpressionMark>square box</ExpressionMark>
</ImageTarget>
</ImageData>
</Reference>
<Reference origin = "Mask Origin Point">
<ReferencePointName>reference2</ReferencePointName>
<ReferencePosition unit = "micron">
<ReferencePosition_X>130700</ReferencePosition_X>
<ReferencePosition_Y>130700</ReferencePosition_Y>
</ReferencePosition>
<ImageData>
<ImageReferenceAdress>C:\image\reference2.bmp</ImageReferenceAdress>
<ImageInformation>
<ImageFormat>bitmap</ImageFormat>
<ImageMagnification>500</ImageMagnification>
<ImagePixelNumber_X>512</ImagePixelNumber_X>
<ImagePixelNumber_Y>512</ImagePixelNumber_Y>
<ImagePixelSize unit = "micron">
<ImagePixelSize_X>1</ImagePixelSize_X>
<ImagePixelSize_Y>1</ImagePixelSize_Y>
</ImagePixelSize>
<ImageGrayLevel>256</ImageGrayLevel>
</ImageInformation>
<ImageIllumination> transmission</ImageIllumination>
<ImageRotation>none</ImageRotation>
<ImageMirror>none</ImageMirror>
<ImageFlip>none</ImageFlip>
<ImageConvertInformation>
<ImageContrast>130/256</ImageContrast>
<ImageBrightness>130/256</ImageBrightness>
<ImageConversionParameter>raw data</ImageConversionParameter>
</ImageConvertInformation>
<ImageReference origin = "MaskOrigin">
<ImageReferencePoint>TopLeft</ImageReferencePoint>
<ImageReferencePosition unit = "micron">
<ImageReferencePosition_X>130444</ImageReferencePosition_X>
<ImageReferencePosition_Y>130444</ImageReferencePosition_Y>
</ImageReferencePosition>
</ImageReference>
<ImageTarget origin = "TopLeft">
<ImageTargetPosition unit = "micron">
<ImageTargetPosition_X>256</ImageTargetPosition_X>
<ImageTargetPosition_Y>256</ImageTargetPosition_Y>