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SEMI E130.1-1104 © SEMI 2004 2 Service Name Stream, Function SECS-II Message Name INSPECT-PROBES S2,F49/F50 Enhanced Remote Command Send/Acknowledge INSPECT- PTP-ALIGN S2,F 49/F50 Enhanced Remote Command Send/Acknowledge…

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SEMI E130.1-1104 © SEMI 2004 1
SEMI E130.1-1104
SPECIFICATION FOR SECS-II PROTOCOL FOR PROBER SPECIFIC
EQUIPMENT MODEL FOR 300 mm ENVIRONMENT (PSEM300)
This specification was technically approved by the Global Information & Control Committee and is the direct
responsibility of the North American Information & Control Committee. Current edition approved by the
North American Regional Standards Committee on July 11, 2004. Initially available at www.semi.org
September 2004; to be published November 2004.
1 Purpose
1.1 This document maps the services and data of SEMI
E130 to SECS-II streams and functions, and data
definitions.
2 Scope
2.1 This is a specification covering equipment
supporting automated communication of the prober
equipment.
2.2 This document applies to all implementations of
SEMI E130 that use the SECS-II message protocol
(SEMI E5). Compliance to this standard requires
compliance to both SEMI E130 and SEMI E5.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This specification applies to semiconductor
equipment that also use SEMI E30 GEM standard.
3.2 PSEM300-compliant equipment must support High
Speed Messaging Service (SEMI E37) communication
standard for sending SEMI E5 messages over TCP/IP.
4 Referenced Standards
4.1 SEMI Standards
SEMI E5 SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E30 Generic Model for Communications and
Control of Manufacturing Equipment (GEM)
SEMI E37 High Speed SECS Message Services
(HSMS) Generic Services
SEMI E123 Handler Specific Equipment Model
(HSEM)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Service Message Mapping
5.1 This section shows the specific SECS-II streams
and functions that shall be used for SECS-II
implementation of the services or remote commands
defined in SEMI E130, as well as the parameter
mapping for data attached to services.
5.2 Services Message Mapping
5.2.1 Table 1 defines the relationships between SEMI
E130 services and SECS-II messages. Mapping of
service parameters to the SECS-II data items is
provided in a separate table. Conventions and
definitions of table fields are as described below.
5.2.2 Service Name — Name of the service or remote
command defined in SEMI E130.
5.2.3 Stream, Function — Specifies the SECS-II
stream and function (SxFx) mapped to the service
messages. Following convention of SECS-II, request
and notification messages are mapped to the odd-
numbered functions and response or acknowledgement
messages are mapped to the corresponding even-
numbered functions.
5.2.4 SECS-II Message Name — Name of the SECS-II
message.
Table 1 Services Message Mapping Table
Service Name Stream, Function SECS-II Message Name
CLEAN-PROBES S2,F49/F50 Enhanced Remote Command Send/Acknowledge
INDEX S2,F49/F50 Enhanced Remote Command Send/Acknowledge
INK-DEVICE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
INK-DIE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
INSPECT-INK-MARKS S2,F49/F50 Enhanced Remote Command Send/Acknowledge
SEMI E130.1-1104 © SEMI 2004 2
Service Name Stream, Function SECS-II Message Name
INSPECT-PROBES S2,F49/F50 Enhanced Remote Command Send/Acknowledge
INSPECT- PTP-ALIGN S2,F49/F50 Enhanced Remote Command Send/Acknowledge
LOCKOUT-CONTROL S2,F49/F50 Enhanced Remote Command Send/Acknowledge
LOAD- TEST-SUBST S2,F49/F50 Enhanced Remote Command Send/Acknowledge
LOAD-SUBSTRATE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
MOVE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
MOVE-ABS S2,F49/F50 Enhanced Remote Command Send/Acknowledge
MOVE-SUB-STEPS S2,F49/F50 Enhanced Remote Command Send/Acknowledge
MOVE-TO-REF-DIE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
UNLOAD-TEST-SUBST S2,F49/F50 Enhanced Remote Command Send/Acknowledge
RESET-CONTACT-CNT S2,F49/F50 Enhanced Remote Command Send/Acknowledge
RESET-CONTROL-MAP S2,F49/F50 Enhanced Remote Command Send/Acknowledge
SET-CONTROL S2,F49/F50 Enhanced Remote Command Send/Acknowledge
SET-PROBE-CARD-ID S2,F49/F50 Enhanced Remote Command Send/Acknowledge
SET-CONTROL-MAP S2,F49/F50 Enhanced Remote Command Send/Acknowledge
UNLOAD-SUBSTRATE S2,F49/F50 Enhanced Remote Command Send/Acknowledge
UNLOAD-ALLSUBSTRATES S2,F49/F50 Enhanced Remote Command Send/Acknowledge
ONLINE-LOCAL S2,F49/F50 Enhanced Remote Command Send/Acknowledge
5.3 Event Message Mapping
5.3.1 Table 2 defines the relationships between SEMI E130 collection events and SECS-II messages. Conventions
and table field definitions similar to mapping table for the services, here Event Name specifies the event defined in
SEMI E130. This specification follows SEMI E30 Dynamic Report Configuration to define and attach reports to
collection events.
Table 2 Event Message Mapping Table
Event Name Stream, Function SECS-II Message Name
All events defined in SEMI
E130.
S6F11/12 Event Report Send/Acknowledge
5.4 Service Parameter Mapping
5.4.1 Table 3 defines the relationships between SEMI E130 service parameters and SECS-II data definitions or
parameter fields in the mapped streams and functions. Parameters for acknowledgements or responses will follow
SECS-II specification for that stream and function, no service specific error codes are defined in this specification.
Descriptions of each table column are described below.
5.4.2 Service — Specifies the service whose parameters are described.
5.4.3 SECS-II Field — Specifies the SECS-II data item or message parameter used by the service. In this
specification, the DATAID and OBJSPEC fields are unspecified for services using the S2F49 SECS-II message.
Their values are to be ignored or used for implementation specific purposes.
5.4.4 Values — Value or SECS II format for the specified field. Formats are specified using the SML notation as
defined in appendices of SEMI E30 (GEM).
5.4.5 Req. — Indicates whether the specified field or parameter is required or not. If an optional CPNAME
parameter is used, the corresponding CPVAL must also be given.
5.4.6 Description — Provides a brief description of the SECS-II field in relation to the service parameters defined
in SEMI E130.
SEMI E130.1-1104 © SEMI 2004 3
Table 3 Service Parameter to SECS-II Data Items Mapping
Service SECS-II Field Values Req. Description
RCMD “CLEAN-PROBES” Y
CPNAME “CLEANPROCESS” N Clean Process parameter.
CPVAL A [n] Specifies name of the cleaning process to
be performed.
CPNAME “DIELIST” Y Die List parameter.
CLEAN-PROBES
CPVAL L, n
1. L, 2
1. U4
2. U4
:
n. L, 2
1. U4
2. U4
List of probe sites to be cleaned. Zero-
length list indicates that all sites should be
cleaned.
Each site is represented by a die coordinate
structure specifying the X and Y
coordinate:
L, n (n = number of sites selected)
1. L, 2
1. X Coordinate
2. Y Coordinate
…
n. L, 2
1. X Coordinate
2. Y Coordinate
INDEX RCMD “INDEX” Y
INK-DEVICE RCMD “INK-DEVICE” Y
RCMD “INK-DIE” Y
CPNAME “DIELIST” N Die List parameter.
CPVAL L, n
1. L, 2
1. U4
2. U4
:
n. L, 2
1. U4
2. U4
List of die sites to be inked. “DIELIST”
structure as defined above.
Either Die List or Control Map must be
supplied.
CPNAME “CONTROLMAP” N Control Map parameter.
INK-DIE
CPVAL A [n] Control Map identifier.
RMCD “INSPECT-INK-
MARKS”
Y
CPNAME “DIELIST” N Die List parameter.
INSPECT-INK-MARKS
CPVAL L, n
1. L, 2
1. U4
2. U4
:
n. L, 2
1. U4
2. U4
List of sites to inspect. Current site is
assumed if not provided.
RCMD “INSPECT-PROBES” Y
CPNAME “PROBESITELIST” N Probe Site List parameter.
INSPECT-PROBES
CPVAL Supplier Defined
Format
Supplier defined list of probe sites to
inspect. Zero-length list indicates all sites.
INSPECT- PTP-ALIGN RCMD “INSPECT- PTP-
ALIGN”
Y