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SEMI S23-0705 © SEMI 2005 2  Conversion Factors for Equivalent Energy 1  Targ et Setting and Improvement  Monitoring and R eporting  Related Documents NOTICE: This standard does not purport to address sa fety issu es…

SEMI S23-0705 © SEMI 2005 1

SEMI S23-0705

GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND

MATERIALS USED BY SEMICONDUCTOR MANUFACTURING

EQUIPMENT

This guide was technically approved by the global Environmental Health and Safety Committee. This edition

was approved for publication by the global Audits and Reviews Subcommittee on May 20, 2005. It was

available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published March 2005.

1 Purpose

1.1 This guide addresses concepts related to energy, utilities and materials conservation on semiconductor

manufacturing equipment.

1.2 This guide addresses measurements related to energy, utilities and materials usage on semiconductor

manufacturing equipment.

1.3 This guide also addresses continuous improvement planning for energy, utilities and materials usage on

semiconductor manufacturing equipment in order to promote energy, utilities and materials conservation.

1.4 This guide is a series of options and instructions intended to increase awareness of the reader to available

techniques in the area of energy, utilities and materials conservation. A particular course of action is suggested for

utilities and materials use measurement and conversion of use measurements into equivalent energy.

NOTE 1: Because this SEMI standard is a Guide, all criteria using “should” may be considered optional.

2 Scope

2.1 This guide is intended to be a tool that can be used to analyze energy, utilities and materials conservation on

semiconductor manufacturing equipment.

2.2 This guide describes methods for reporting energy, utilities and material use rate, and the consumption

reduction in semiconductor manufacturing equipment.

2.3 This guide also suggests use of energy equivalent values in order to facilitate quantification of overall energy

consumption and conservation related to SME as well as easy planning of energy conservation.

2.4 This guide focuses only on the use stage of equipment life cycle and addresses a limited set of utilities and

materials to be considered.

2.5 Additionally, this guide describes setting targets for, verifying and improving utilities and materials use rate and

energy conservation.

2.6 This guide contains the following sections:

 Purpose

 Scope

 Limitations

 Referenced Standards

 Terminology

 General Concepts

 Life Cycle Assessment (LCA) of Energy Usage

 Baseline Process(es)

 Utilities and Materials Use rate Measurement

SEMI S23-0705 © SEMI 2005 2

 Conversion Factors for Equivalent Energy

 Target Setting and Improvement

 Monitoring and Reporting

 Related Documents

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 This guide is not intended to supersede the applicable codes and regulations of the region where the equipment

is used.

3.2 This guide is not intended to provide definite targets for utilities and materials usage or energy conservation.

3.3 The information suggested in this guide may be provided by the equipment supplier to the user if that is the

agreement between those parties.

4 Referenced Standards and Documents

4.1 SEMI Standards

SEMI S2  Environment, Health and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI E6  Guide for Semiconductor Equipment Installation Documentation

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations & Acronyms

5.1.1 DIW  De-ionized Water

5.1.2 ISMT  International SEMATECH

5.1.3 LCA  Life Cycle Assessment

5.1.4 UPW  Ultra Pure Water

5.2 Definitions

5.2.1 Definitions defined in SEMI S2 and SEMI E6 is incorporated herein by reference unless a term is otherwise

specified below.

5.2.2 baseline  for the purposes of this document, “baseline” refers to operating conditions, including process

chemistry, for which the equipment was designed and manufactured, (refer to SEMI S2).

5.2.3 energy impact  positive and negative effects on the amount of energy required to produce or provide an

item or material, or to execute a process or step.

5.2.4

environmental impact  positive and negative effects to the earth environment from a variety of sources

including people and their activities, and the operation of semiconductor manufacturing equipment and facilities

5.2.5 exhaust  airflow moving from semiconductor manufacturing equipment to a location outside of a fab or

laboratory area.

1 Conversion Factors for Equivalent Energy shown in Table-2 except N2 are quoted from the SEAJ document “SEAJ-E-002E  Guideline for Energy Quantification on

Semiconductor Manufacturing Equipment and Utilities”

SEMI S23-0705 © SEMI 2005 3

5.2.6 heat load  the sum of all heat energy transferred by conduction, convection, and radiation outside the

envelop of the equipment.

5.2.7 idle  the condition where the equipment is energized and readied for processing (all systems ready and

temperatures controlled) but is not actually performing any active function such as materials movement or

processing, (refer to SEMI E6).

5.2.8 Life Cycle Assessment  a methodology used to evaluate the environmental impact of semiconductor

manufacturing equipment throughout its life cycle, including raw material procurement, manufacturing,

transportation, use and disposal.

5.2.9 process mode  The condition where the equipment is energized and performing its intended function on

target materials (such as implanting wafers, pumping gas, or inspecting photo-masks).

5.2.10 roadmap  a sequence for the incremental introduction or improvement of technology over time with

month or year milestones and supporting information.

6 General Concepts

6.1 Energy is used to produce the various utilities and materials that go into the manufacturing, packaging,

shipping, installing, use, decommissioning and disposing of a piece of semiconductor manufacturing equipment.

Reducing the energy used in any of these life cycles will improve the environmental impact of the semiconductor

manufacturing equipment.

NOTE 2: This guide focuses on only the use of the equipment life cycle stage.

6.2 Given the state of the industry with regard to energy conservation information and measurements, the use stage

of the equipment life cycle appears to be the most effective stage to analyze for energy conservation opportunities.

The energy used in the use stage is the best derived from the use rate of utilities and materials provided for the stage.

6.3 Various methods have been proposed for converting the use rate of specific utilities and materials into

equivalent energy values. The energy used to produce any particular utility or material varies from location to

location and from time to time. While any single set of energy conversion factors cannot be valid world wide, some

parties find value in the conversion exercise, particularly in identifying a utility or material that has a greater energy

impact than others.

6.4 The equipment suppliers should investigate the utilities and materials use rate of the equipment and identify and

implement design or process changes that lessen the energy impact of the equipment. The expense of implementing

these changes can be balanced against the potential energy impact improvement when developing an energy

conservation plan.

NOTE 3: Changes in use rate can also affect the users cost of ownership for the equipment. This can also be considered in the

cost-benefit analysis.

6.5 An equipment user can consider supplier-reported utilities and materials use rates, energy equivalent values, and

planned improvements when making the purchasing decisions.

6.6 The use rate of utilities and materials for a piece of equipment depends on the particular control parameters used

to achieve the desired effect on a wafer (i.e. it depends on the process recipe) as well as the particular hardware used

in the equipment and the conditions under which the measurements are taken. It is important to record this and other

particular information when use rate measurements are conducted.

6.7 Based on the above considerations, the equipment supplier should set targets for energy, utilities and materials

conservation, and consider continuous improvement plans for energy, utilities and materials usage on semiconductor

manufacturing equipment.

NOTE 4: The supplier may apply the concepts of this guide to the equipment model or models of their choice.

6.8 The characterization and quantification of energy, utilities and materials consumption should be based on a

supplier baseline process.