semi合集-English.pdf - 第5641页

SEMI P10-0705 © SEMI 1990, 2005 136 8.1.484 PATTERN_GROUP_INSTANCE — Identifies PATTERN_ GROUP_ID to be place d by the following location information . 8.1.485 PATTERN_NAME — Printable ASCII pattern file name . The file …

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SEMI P10-0705 © SEMI 1990, 2005 135
8.1.465 OPERATOR_NAME — Alphabetic name of the person entering the mask order or entering the mask
results.
8.1.466 OPTICAL_MASK_ID — For optical stepping or contact printing, the “pattern” is to be obtained by using a
reticle or mask built under this MASK_ID from the above-named MASK_SET_ID.
8.1.467 OPTICAL_MASK_SET_ID — For optical stepping or contact printing, the “pattern” is to be obtained by
using a reticle or mask from this MASK_SET_ID.
8.1.468 OPTICAL_MASK_TITLE — For optical stepping or contact printing, identifying title on reticle or mask.
To be used in place of OPTICAL_MASK_SET_ID and OPTICAL_-MASK_ID when the reticle or mask was built
without available <mask_order> data.
8.1.469 ORDER_ACCEPTED — Returns the exact FILE_DATE_TIME as in the file being accepted, thereby
agreeing to process the order as received.
8.1.470 ORDER_ID — Printable text of the customer’s internal order identification to provide correlation with pre-
existing order tracking systems. This is for customer cross-referencing only, but should be recorded by the vendor
and reported back in <mask_results>.
8.1.471 ORDER_RECEIVED — Returns the exact FILE_DATE_TIME as in the file being acknowledged, thereby
confirming receipt of that file. This response is required each time a new transmission is received by the vendor.
8.1.472 PACKAGE — Alphanumeric identification of brand and model of acceptable compact to be used for
delivering masks.
8.1.473 PACKAGE_USED — (text) The compact vendor’s part number of the compact in which the mask was
shipped and any additional compacts supplied.
8.1.474 PARAMETER_FILE_NAME REVISION — (text) Name of parameter file required by RUNSET_NAME.
Note that multiple run_set_name entries under a SOFTWARE_NAME means that multiple runs with the same
software are required.
8.1.475 PARAMETER_FILE_REVISION — (text) Revision identification of PARAMETER_FILE_NAME.
8.1.476 PATTERN_ADDRESS_SIZE — Address unit of the (unscaled) pattern file. If this is incorrect, the mask
will not be written until it is corrected. For data manipulation operations, this is the address to use in final fracturing
to produce a pattern file for exposure.
8.1.477 PATTERN_APPROVAL_REQD — name the pattern to be approved before the mask(s) may be written.
8.1.478 PATTERN_APPROVED — (date, name) Date approval was granted by customer and the name of the
pattern for PATTERN_APPROVAL_REQD.
8.1.479 PATTERN_CHARACTER_SET — (ASCII or EBCDID) ASCII is assumed unless otherwise specified.
8.1.480 PATTERN_FORMAT — (ALF, APPLICON, AUTOCAD, CATS_CFLT, CATS_CREF, CIF, DERIVED,
EEBES, ELECTROMASK, FALCON, GDS-II, HITACHI_700, HITACHI_800, JEOL_51, JEOL_52, KLARIS,
MANN_3000, MANN_3600, MEBES_I, MEBES_II, MEBES_EXTENDED, MEBES_RETICLE, MEBES_MODE
5, OASIS, ORBOT, ULTRABEAM, VSB11, ZBA, and others on request). Format of preceding pattern file. For
<data_manipulation> results, if multiple PATTERN_FORMATS are listed, they are in declining order of
preference. For BOOLEAN operations, DERIVED indicates DATA_SOURCE_FILE was the result of a previous
<data_manipulation> process.
8.1.481 PATTERN_FUNCTION — (FRAME, DEVICE, FIDUCIAL, BARCODE, TEST and others as needed by
the user) This keyword is for reference purposes only, with no action or requirement implied for the mask supplier.
It will serve merely to provide a functional name for customer convenience.
8.1.482 PATTERN_GENERATION_AREA — (x1,y1,x2,y2) Window in which to generate a digitized rectangle
for use in BOOLEAN operations, relative to the coordinate space of DATA_SOURCE_FILE.
8.1.483 PATTERN_GROUP_ID — Name of the pattern group which follows; must be used in all references within
this MASK_SET_ID to this pattern group.
SEMI P10-0705 © SEMI 1990, 2005 136
8.1.484 PATTERN_GROUP_INSTANCE — Identifies PATTERN_GROUP_ID to be placed by the following
location information.
8.1.485 PATTERN_NAME — Printable ASCII pattern file name. The file may be received intact, or may be
derived through data manipulation.
8.1.486 PATTERN_PLOT_APPR_REQD — (T or F) If T, customer approval of the pattern plot is required before
mask making is authorized.
8.1.487 PATTERN_PLOT_NORMAL_TONE — (T or F) If T, digitized data will be dark.
8.1.488 PATTERN_UNITS — (METRIC, ENGLISH) Units of preceding pattern file.
8.1.489 PATTERN_VISUAL_ID — Optional, printable text to specify identification within the pattern file which
must be visually confirmed as present before the mask may be written. If the feature is not present, the mask order
should go on hold.
8.1.490 PERCENT_CLEAR — Percentage of the patterned area which will become transparent after the mask is
processed. As a mask option it includes all the area within the scribe pattern limits. As a pattern option it includes
the area within the individual pattern limits.
8.1.491 PERCENT_CLEAR_REQUESTED — (T or F) If T, the vendor is requested to calculate, using available
CAD tools, the percentage of the patterned area on the mask which will become transparent after the mask is
processed, and transmit this value to the customer.
8.1.492 PERCENT_DEFECTIVE_DIE — Maximum percentage of defective die among those required by the
customer to meet defect criteria.
8.1.493 PERIODIC_UPDATE — notifies the customer that MASK_ID has passed the indicated processing step, or
is on hold.
8.1.494 PERIODIC_UPDATES — (integer) If non-zero, the vendor is requested to use <mask_results> (see §7.5)
to notify the customer on a periodic basis which significant processing step was last completed for MASK_ID. The
value of the data field indicates the number of hours between updates. Within this standard, these significant steps
are limited to those defined under MILESTONE. PERIODIC_UPDATES may not be used in combination with
MILESTONES for the same MASK_ID.
8.1.495 PHASE_ANGLE_EQUIP_REQD — (text) Phase angle measurement equipment required by customer.
8.1.496 PHASE_ANGLE_EQUIP_USED — (text) Phase angle measurement equipment used.
8.1.497 PHASE_ANGLE_ERROR — Maximum acceptable deviation (in degrees) of any phase shift measurement
from the PHASE_ANGLE_TARGET.
8.1.498 PHASE_ANGLE_MARK_DRAWING — The uniquely identified (for each customer) document which
shows the phase angle mark structure itself, and may show the place(s) within the phase angle mark which are to be
measured.
8.1.499 PHASE_ANGLE_MARK_FEATURE — Text describing the feature to be used for phase angle
measurement.
8.1.500 PHASE_ANGLE_MARK_LOCATION — (x,y) Location of phase angle mark relative to the nominal
center of the mask (chrome side up).
8.1.501 PHASE_ANGLE_MARK_LOCATION_DRAWING — The uniquely identified (for each customer)
document which shows the location(s) of the phase angle mark structure.
8.1.502
PHASE_ANGLE_MEASUREMENT_DATE — Phase angle measurement date.
8.1.503 PHASE_ANGLE_MEASUREMENT_FILE_NAME — Name of data file containing results of phase angle
measurement.
8.1.504 PHASE_ANGLE_MODE_REQD — (text) operating mode required by customer for
PHASE_ANGLE_EQUIP_USED.
8.1.505 PHASE_ANGLE_MODE_USED — (text) operating mode used on
PHASE_ANGLE_EQUIP_USED.
SEMI P10-0705 © SEMI 1990, 2005 137
8.1.506 PHASE_ANGLE_RANGE — Maximum acceptable variation (in degrees) of phase shift measurements,
relative to each other.
8.1.507 PHASE_ANGLE_REFERENCE_ONLY — (T or F) If T, indicates that the phase angle feature is to be
measured and the data transmitted to the customer (if requested by SHIP_PHASE_SHIFT_MEASUREMENTS), but
that deviations in its measured value due to mask processing would NOT be cause for mask rejection.
8.1.508 PHASE_ANGLE_SITE_ID — Unique alphanumeric identifier of each phase angle measurement location
within MASK_SET_ID to identify individual locations when using <mask_results>. If the same coordinates apply
to locations on different masks within the mask set, they may have the same PHASE_ANGLE_SITE_ID, but it is
not mandatory.
8.1.509 PHASE_ANGLE_TARGET — The required phase shift in degrees at the specified PSM_WAVELENGTH.
8.1.510 PHASE_ANGLE_TOLERANCE — The maximum acceptable deviation of the mean of all phase shift
measurements (in degrees) to the PHASE_ANGLE_TARGET.
8.1.511 PHASE_SHIFT_QUALITY_ID — (text) Customer’s label for a collection of phase shift quality
specifications, to be used only in addition to explicit quality requirement keywords. This may be used in the data
structure in addition to, but not in place of, explicit quality requirement keywords. This may not be used in
combination with QUALITY_GROUP_ID. Customer and vendor should document the meaning of this quality
grade before using it in SEMI P10.
8.1.512 PLACEMENT_TOP_CELL — Name of CELL_ID which defines all pattern place-ments for this
MASK_GROUP_ID. This referenced cell is centered on the mask.
8.1.513 PLOT_FORMAT — (GIF, JPG, PNG, FAX, PAPER) Medium for delivery of plot.
8.1.514 PLOT_SCALE — Numeric scale of plot or map.
8.1.515 PLOT_TYPE — (JOB_DATA, ARRAY, PATTERN, BARCODE) Requires delivery of the plot to the
customer. JOB_DATA requires delivering a plot of the entire patterned area of the mask, including the image of the
pattern file data. ARRAY requires an array map to be sent showing only an outline of each pattern and not showing
the image content of any pattern. PATTERN requires delivering a plot of the pattern at the scale and tone indicated.
BARCODE requires delivering a plot of the pattern created by <barcode_data>. PATTERN is the only value
permitted under <pattern_options>. The other types are permitted only under <shippable_data>.
8.1.516 PO_NUMBER — Alphanumeric purchase order number.
8.1.517 POST_PELL_INSPECTION_DATE_AND_TIME — Date and time of the final qualifying inspection run
after applying the pellicle.
8.1.518 POST_PELL_INSPECTION_ID — Identification (or serial number) assigned by the inspection tool for the
final qualifying inspection run after applying the pellicle.
8.1.519 PRE_PELL_INSPECTION_DATE_AND_TIME — Date and time of the final qualifying inspection run
prior to applying the pellicle.
8.1.520 PRE_PELL_INSPECTION_ID — Identification (or serial number) assigned by the inspection tool for the
final qualifying inspection run prior to applying the pellicle.
8.1.521 PRICE — Price (excluding freight and taxes) for preceding item (e.g., mask, pellicle, plot, database
inspection).
8.1.522 PRICE_UNITS — (3-character alphabetic currency code as listed in ISO 4217) Monetary unit used in all
references to PRICE with the <mask_set>.
8.1.523 PROCESS — (text) Name of the special process to be used in making the masks.
8.1.524 PROCESS_ETCHING_TYPE — (DRY or WET) Etching process to be used in making the masks.
8.1.525 PRODUCT_AS_CHECKPLATE — (T or F) If T, product mask is to be used for check-plate approval prior
to making other product masks.