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SEMI E23-1104 © SEMI 1991, 2004 10 R2-2 R2-2.1 Figure R2-2 shows some a pplication examples for the photo-coupled parallel I/O interface. One conne ctor is provided for the CS’s to or from which the robot veh icle transf…

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SEMI E23-1104 © SEMI 1991, 2004 9
RELATED INFORMATION 2
APPLICATION EXAMPLES OF INTERFACING
NOTICE: This application example of interfacing is not an official part of this document and is not intended to modify or
supercede the official standard. Determination of the suitability of the material is solely the responsibility of the user.
R2-1
R2-1.1 Figure R2-1 shows some application examples for the wire-connected parallel I/O interface. One set of
connectors is provided for the CS’s that commonly input the BUSY and COMPT signals.
Figure R2-1
Application Example of the Wire-Connected Parallel I/O Interface
SEMI E23-1104 © SEMI 1991, 2004 10
R2-2
R2-2.1 Figure R2-2 shows some application examples for the photo-coupled parallel I/O interface. One connector is
provided for the CS’s to or from which the robot vehicle transfers a cassette at the same stopping position.
Figure R2-2
Application Example of the Photo-Coupled I/O Interface
SEMI E23-1104 © SEMI 1991, 2004 11
RELATED INFORMATION 3
INTERFACING CIRCUIT EXAMPLES
NOTICE: These examples of interfacing circuit examples are not an official part of this document and is not intended to modify
or supercede the official standard. Determination of the suitability of the material is solely the responsibility of the user.
R3-1
R3-1.1 Figure R3-1 shows typical examples of the two types of the interface circuits for the wire-connected
interface.
Figure R3-1
Interface Circuit Examples for Wire-Connected Interface
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inventions covered by U.S. patents 4,306,292 and other patents issued or pending, held by Texas Instruments
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