semi合集-English.pdf - 第2495页

SEMI E87-0705 © SEMI 1999, 2005 64 R1-3.6 CREATED Procee dW ithC arrier? NO Cancel C arrier Carr i er ID Ver ification Fail Ready to Unload CREATED YES POR T ASSO CIAT ION Associa te created objec t with the port on whi …

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SEMI E87-0705 © SEMI 1999, 2005 63
R1-3.5 Carrier Object Verification
Has the object already
been registered?
Create the carrier object
Carrier ID Waiting Host
Slot Map Not Read
Not Processed
YES
NO
Has the port associated
with another object?
Delete Associated Object
Delete the object which has
been associated with the
loadport.
VERIFICATION
STORED
NO
YES
CREATED
R1-3.5.1 If the object having the ID read from the carrier has been registered, then STORED object logic shall be
executed.
R1-3.5.2 If no object having the ID read from the carrier has been registered;
R1-3.5.2.1 Create the object.
R1-3.5.2.2 If an object has been associated with the loadport on which the carrier is delivered, the event means the
carrier delivered is not expected by the associated object. That is Carrier ID verification fail. Then, delete the
asoociated object.
R1-3.5.2.3 CREATED logic shall be executed.
SEMI E87-0705 © SEMI 1999, 2005 64
R1-3.6 CREATED
ProceedWithCarrier?
NO
Cancel Carrier
Carrier ID Verification Fail
Ready to Unload
CREATED
YES
PORT ASSOCIATION
Associate created object
with the port on which
the carrier is delivered
Carrier ID Verified
Carrier ID Verification OK
WAIT FOR HOST
Report the carrier ID
and wait for host instruction
R1-3.6.1 Associate the object just created with the loadport on which the carrier is delivered.
R1-3.6.2 Report the carrier ID and wait for host instruction.
R1-3.6.3 If the host requests ProceedWithCarrier service, change the Carrier ID Status to Carrier ID Verification
OK.
R1-3.6.4 If the host requests CancelCarrier service, change the Carrier ID Status to Carrier ID Verification Fail. The
carrier shall be taken to Ready to Unload.
R1-3.7 STORED
Carrier ID Verified
Carrier ID Verification OK
Cancel Carrier
Carrier ID Verification Fail
NO
STORED
YES
YES
YES
NO
NO
ProceedWithCarrier?
Has the loadport
been associated with
another object?
Has the object
been associated with
current port ?
PORT ASSOCIATION
Associate the object
with the port
Cancel the association
Has the object
been associated with
another loadport?
NO
YES
Delete Associated Object
Cancel the association and
delete the associated object
then WAIT FOR HOST
SEMI E87-0705 © SEMI 1999, 2005 65
R1-3.7.1 If the object has been already associated with the loadport other than the carrier is delivered;
R1-3.7.1.1 This is the case for misloading to a wrong loadport.
R1-3.7.1.2 Cancel the association.
R1-3.7.2 And If the loadport on which the carrier has been delivered is associated to another object, then delete the
object associated with the port on which the carrier is delivered.
R1-3.7.2.1 This is the case for equipment base ID VERIFICATION FAIL.
R1-3.7.2.2 Associate the object with the loadport on which the carrier has been delivered.
R1-3.7.2.3 Then enter WAITING FOR HOST.
R1-3.7.2.4 If ProceedWithCarrier is given, then the carrier is verified.
R1-3.7.2.5 If CancelCarrier is given, then the carrier verification is failed.
R1-3.7.3 If the object has been associated with the loadport on which the carrier is delivered, the carrier is verified.
Change the Carrier ID status to Carrier ID Verified.
R1-3.7.4 If no object has been associated with the loadport on which the carrier is delivered, associate the object
with the loadport. This is the case for associating object created by Notify.
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