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SEMI E109-0305 © SEMI 2001, 2005 44 Parameter Name Form Description ArrivingReticleList Orde red list of ReticleID, ReticlePropertiesList, and removal instructions corresponding to the slot number. Ordered List of n stru…

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SEMI E109-0305 © SEMI 2001, 2005 43
Service Name Type Requirement
level
Description
PodIn R A This service shall cause a pod to be moved from a load port to an internal buffer
location. Used in anomaly situations.
PodNotification R F This service shall cause the equipment to instantiate a pod object.
PodOut R A This service shall cause a pod to be moved from the internal buffer to a load
port. This service can be queued by the production equipment.
PodRelease R A Release the pod from Pod Hold.
PodTagReadData R A Read data from PodID tag.
PodTagWriteData R A Write data to the PodID tag.
ProceedWithPod R F This service shall instruct the production equipment to proceed with using the
specified pod.
ProceedWithReticle R F This service is used to change the state of the reticle from RETICLE ID
VERIFICATION to PARTICLE INSPECTION when particle inspection is
required and from RETICLE ID VERIFICATION to QUALIFIED when particle
inspection is not required
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.
RejectReticle R F This service shall cause the equipment to change the RETICLE AT
EQUIPMENT state to REJECTED.
Re-qualifyReticle R A This service shall cause the equipment to reinspect the reticle.
ReserveAtPort R F This service shall cause the equipment to reserve the specified Port and activate
a visible signal. This service is a possible transfer boundary.
ReticleTransferJob R A This service shall associate a PodID to a load port and shall cause the load port
to transition to the RESERVED state. It will also cause the equipment to begin
removal, identification, and qualification of specific reticles in the pod as well as
placement of specific reticles into the pod upon pod arrival and verification.
SetQualification-
IntervalTime
R A This service shall set the maximum interval time between reticle inspections.
Unclamp R A This service This service shall cause the equipment to release any clamping
mechanisms that prevent removal of the pod. The pod must be closed prior to
execution of this service.
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Normally this transition would be from the substate of RETICLE ID VERIFICATION, RETICLE WAITING FOR HOST.
18.3 Service Message Parameter Definition
18.3.1 The following is a list of required parameters used in conjunction with service messages.
Table 22 Service Message Parameter Definition
Parameter Name Form Description
AccessMode Enumerated
AUTO,
MANUAL.
The desired access mode of the ports specified.
SEMI E109-0305 © SEMI 2001, 2005 44
Parameter Name Form Description
ArrivingReticleList Ordered list of ReticleID,
ReticlePropertiesList, and removal
instructions corresponding to the slot
number.
Ordered List of n structures where n is equal to the value of the
pod attribute “Capacity,” and each structure consists of a
ReticleID, a ReticlePropertiesList, and an enumerated removal
instruction.
List of structure
ReticleID
ReticlePropertiesList
Enumerated
Enumerated:
REMOVE
PASS BY
AttributeData Could be several different data types. The data value associated with AttributeID.
AttributeID Text
1–40 characters.
The ID of the object attribute in a PropertiesList.
PodID Text
1–64 characters.
ID number of a pod.
Qualification-
IntervalTime
U2. The time in minutes allowed between equipment inspections of a
reticle.
RPMAcknowledge Enumerated:
Acknowledge, service has been
performed
Service does not exist
Cannot perform now
At least parameter is invalid
Acknowledge, service will be
performed with completion
notified later with parameters
for response
No such object exists
Acknowledgement of request.
RPMStatus A structure consisting of
RPMAcknowledge and Status.
Return information for a service.
Data Text. User data.
DataSeg Protocol-specific. Indicates specific section of data to read or write.
DataSize Unsigned integer. Indicates the number of bytes of data to read or write.
DepartingReticleList Ordered list of ReticleID and
instructions to remove from the
equipment and place in the reticle
cassette corresponding to the slot
number of the cassette to which the
reticle will be placed.
Ordered List of n structures where n is equal to the value of the
pod attribute “Capacity,” and each structure consists of a
ReticleID and an enumerated instruction.
List of structure
ReticleID
Enumerated
Enumerated:
CURRENTLY OCCUPIED
PLACE
PASS BY
When no reticle is targeted to be placed in a slot, the ReticleID
should be null. When the enumeration is equal to CURRENTLY
OCCUPIED or PASS BY the ReticleID should be null.
DestinationLocation LocationID. The location for which a reticle is to be moved.
SEMI E109-0305 © SEMI 2001, 2005 45
Parameter Name Form Description
ErrorCode Enumerated:
Valid for all services listed below
Unsupported option [service]
requested
Command not valid for current state
Insufficient parameters specified
Parameters improperly specified
Bind
Load port does not exist
Object identifier already in use
Invalid attribute value
Unknown attribute name
CancelAllPodOut
(none)
CancelBind
Load port does not exist
Unknown object instance
CancelPod
Load port does not exist
Unknown object instance
CancelPodAtPort
Load port does not exist
CancelPodNotification
Unknown object instance
CancelPodOut
Unknown object instance
CancelReservationAtPort
Load port does not exist
PodIn
Unknown object instance
PodNotification
Object identifier already in use
Invalid attribute value
Unknown attribute name
PodOut
Load port does not exist
Unknown object instance
ChangeAccess
Load port does not exist
ChangeServiceStatus
Load port does not exist
ProceedWithPod
Load port does not exist
Unknown object instance
Invalid attribute value
Unknown attribute name
ReserveAtPort
Load port does not exist
Contains the code for the specific error found.
ErrorText Text. Text in support of the error code.
InputPortID Integer
0, 101–255.
ID number of the load port where the Pod will be delivered. The
InputPortID number should be the same as the load port number.
When the value of the InputPortID = zero, the Pod will be picked
up from the internal buffer.