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SEMI E19-0697 © SEMI 1991, 2002 5 Figure 2

SEMI E19-0697 © SEMI 1991, 2002 4

Box

asse

Guide

Rail

Latch

Cavity

Registration

Port

Door

Port

Plate

Latch

Box

Latch

Figure 1

Port Terminology

SEMI E19-0697 © SEMI 1991, 2002 5

Figure 2

SEMI E19-0697 © SEMI 1991, 2002 6

Figure 3

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