semi合集-English.pdf - 第2348页

SEMI E82-0705 © SEMI 1999, 2005 44 STEP COMMENTS HOST TSC COMMENTS 9. <-S1,F4 Selected Equipment Status Data (SSD) . CarrierInfo - L,3 . . (one CarrierInfo for each carrier) . . VehicleInfo - L,2 . . (one VehicleInfo …

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SEMI E82-0705 © SEMI 1999, 2005 43
STEP COMMENTS HOST TSC COMMENTS
14. The host may now initiate
another TRANSFER command
for the carrier(s) from
the TRANSFER command that
was completed
unsuccessfully.
If there were multiple
carriers in the
unsuccessful TRANSFER then
the Host may elect to
issue one TRANSFER command
for all carriers or
individual TRANSFER
commands for each carrier.
The SOURCEPORT in the
resulting TRANSFER
command(s) may be an
internal vehicle location
or any other location
along the path of the
TRANSFER command.
12.3.4 Connection or Reconnection between TSC and Host
12.3.4.1 The Factory Host System crashes (or loses communication with the TSC for a time exceeding all time-outs
and retries) and must re-synchronize with the TSC in lieu of several events completing while the communication
link between the two was down.
STEP COMMENTS HOST TSC COMMENTS
1. Communication session between
host and TSC (re)established.
Host establishes
communication with the TSC
p
er the GEM standard scenario
(e.g., S1F13, etc).
2. Host Command Send (HCS)
PAUSE
S2,F41->
3. <-S2,F42 Host Command Acknowled
g
e
(HCA)
4. <-S6,F11 Event Report Send (ERS)
TSCPauseInitiated
5. Event Report Acknowledge
(ERA)
S6,F12->
6. <-S6,F11 Event Report Send (ERS)
TSCPauseCompleted
. CommandName = “PAUSE”
. ResultCode = 0
7. S6,F12->
8. Selected Equipment Status
Request (SSR)
. ActiveCarriers
. ActiveVehicles
. ActiveTransfers
S1,F3-> HOST asks for carrier
and vehicle information
SEMI E82-0705 © SEMI 1999, 2005 44
STEP COMMENTS HOST TSC COMMENTS
9. <-S1,F4 Selected Equipment
Status Data (SSD)
. CarrierInfo - L,3
.
. (one CarrierInfo
for each carrier)
.
. VehicleInfo - L,2
.
. (one VehicleInfo
for each vehicle)
.
. TransferCommand - L,n
.
. (one
TransferCommand for each
. Active TRANSFER
command)
10. The HOST updates its model of
the system with the
information from the vehicle
and carrier status data.
11. Host Command Send (HCS)
RESUME
S2,F41-> HOST enables the system
to continue operations.
12. <-S2,F42 Host Command Acknowled
g
e
(HCA)
13. <-S6,F11 Event Report Send (ERS)
TSCAutoCompleted
14. Event Report Acknowledge
(ERA)
S6,F12->
15. System continues
processing all commands
that were in process or
q
ueued before/durin
g
the
Host crash or
communication
loss/initialization.
System will also now
process new commands.
12.4 Database Operation
STEP COMMENTS HOST TSC COMMENTS
1. The host desires to u
p
ate the
TSC database with information
associated with carrier 123
2. Host Command Send (HCS)
INFOUPDATE
. CARRIERID = “123”
. LOTID = “LOT456”
. OPERATION = “OP480”
S2,F41-> The Lot and Operation
information associated
with the carrier are
sent to the TSC.
3. <-S2,F42 Host Command Acknowled
g
e
(HCA)
STEP COMMENTS HOST TSC COMMENTS
1. The host desires to remove
the LotID associated with
carrier 123 from the TSC
database
SEMI E82-0705 © SEMI 1999, 2005 45
STEP COMMENTS HOST TSC COMMENTS
2. Host Command Send (HCS)
INFOUPDATE
. CARRIERID = “123”
. LOTID = “”
S2,F41->
3. <-S2,F42 Host Command Acknowled
g
e
(HCA)
12.5 Stage Delete Command
STEP COMMENTS HOST TSC COMMENTS
1. The host desires to delete
ALL Stage commands.
2.
Host Command Send (HCS)
STAGEDELETE
S2,F41-> All stage commands are
deleted. No parameters
are included in the
message.
3. <-S2,F42 Host Command Acknowled
g
e
(HCA)
13 GEM Capabilities
13.1 The purpose of this section is to specify any SEMI E30 additional capabilities that are required to be supported
by this class of equipment.
13.2 Requirement
13.2.1 This standard requires that the SEMI E30 fundamental requirements and additional capabilities have been
implemented on the IBSEM equipment with the exception of Trace Data Collection, Remote Control, Process
Program Management, and Limits Monitoring and Spooling. The TRANSFER Command State Model will serve as
the Equipment Processing State Model specified in SEMI E30. If these capabilities are implemented, they will be
implemented as required by SEMI E30. The SEMI E30 additional capabilities required by IBSEM are:
Establish Communications,
Dynamic Event Report Configuration,
Variable Data Collection,
Status Data Collection,
Alarm Management,
Equipment Constants,
Equipment Terminal Services,
Clock, and
Control (host-initiated).