semi合集-English.pdf - 第149页
SEMI E19.4-0998 E © SEMI 1992, 2003 5 Figure 2 Port Dimensions
SEMI E19.4-0998
E
© SEMI 1992, 2003 4
Feature Dimension Label Metric English
D5 6.35 mm ± 0.025 mm (0.250 in. diameter ± 0.001 in.)
D6 16.26 mm ± 0.25 mm (0.640 in. ± 0.010 in.)
D7 Full Spherical Radius Full Spherical Radius
Latch Pin F1 0.8 Nm minimum (7 in. lbf. minimum)
Force (Torque) 1.7 Nm maximum (15 in. lbf. maximum)
Position of Cassette G1 20.70 mm ± 0.25 mm (0.815 in. ± 0.010 in.)
G2 H-Bar Centered ± 0.51 mm (H-Bar Centered ± 0.020 in.)
Pod Latch Holes I1 3.4 mm ± 0.1 mm (0.135 in. ± 0.004 in.)
Figure 1
Port Terminology
SEMI E19.4-0998
E
© SEMI 1992, 2003 5
Figure 2
Port Dimensions
SEMI E19.4-0998
E
© SEMI 1992, 2003 6
Figure 3
Dimensions of Pod Hold Down Latches
Figure 4
Dimensions of Pod Latch Hole