semi合集-English.pdf - 第1650页
SEMI E38-1296 © SEMI 1995 , 1996 39 The cluster controller s elects the “continue” option . CC PM2 >>------------------------------------->> EXRecover.Req(EXID=Error1, EXRecoverySelected= "Continue"…
SEMI E38-1296 © SEMI 1995, 1996 38
The process module then informs the transport module
to proceed with the putting of the wafer.
TM PM2
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="PM2",HODir=P
UT,MID="Wafer1")
12. PM1 TO TM WAFER HANDOFF
The PM1 transfers the wafer to the TM through the
handoff sequence, and the TM will keep the cluster
controller informed of its transfer progress. The
transport module informs the process module that it is
proceeding with the "getting" of the wafer.
PM TM
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="PM1",HODir=G
ET,MID="Wafer1")
The process module informs the transport module to
use the PICK sequence to get the wafer.
PM1 TM
>>------------------------------------->>
HOPick.Req(Port=Port1,AmID="PM1")
PM1 TM
<<-------------------------------------<<
HOPick.Rsp (Port=Port1,AmID="PM1",
Status=OK)
When the getting of the wafer has been successful, the
process module informs the transport module with a
verify sequence.
PM1 TM
>>------------------------------------->>
HOVerify.Req(Port=Port1,AmID="PM1")
PM1 TM
<<-------------------------------------<<
HOVerify.Rsp(Port=Port1,AmID="PM1",
Status=OK)
Process module #1 then informs the cluster controller of
its current status.
CC PM1
<<-------------------------------------<<
TRJobComplete.Req(JobID=IOJob4,TimeStamp,
Status=OK)
The cluster controller is informed that the processing
job performed in PM1 is complete.
CC PM1
<<-------------------------------------<<
PRJobComplete.Req(JobID=PM1Job1,
TimeStamp,Status=OK)
13. TM TO PM2 WAFER HANDOFF
The TM informs the cluster controller that it is
proceeding with the transfer of the wafer. The TM
informs the PM that it is proceeding with the putting of
the wafer.
PM2 TM
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="PM2",HODir=P
UT,MID="Wafer1")
The process module informs the TM to use the
EXTEND scenario as the put operation.
PM2 TM
>>------------------------------------->>
HOExtend.Req(Port=Port1,AmID="PM2")
PM2 TM
<<-------------------------------------<<
HOExtend.Rsp(Port=Port1,AmID="PM2",
Status=OK)
During this particular handoff, an exception is
generated stating that the pins in the process module
failed to come up and receive the wafer from the end
effector. The cluster controller is given three recovery
options to select from in attempting to resume operation
in the presence of this exception.
CC PM2
<<-------------------------------------<<
EXPost.Req(EXID=Error1, EXType=Error,
EXMessage="pins failed to raise",
EXRecoveryList=
{"Abort","Retry","Continue"}, TimeStamp)
SEMI E38-1296 © SEMI 1995, 199639
The cluster controller selects the “continue” option.
CC PM2
>>------------------------------------->>
EXRecover.Req(EXID=Error1,
EXRecoverySelected= "Continue")
CC PM2
<<-------------------------------------<<
EXRecover.Rsp(EXID=Error1, Status=OK)
CC PM2
<<-------------------------------------<<
EXRecoveryComplete.Rsp(EXID=Error1,
Status=OK)
This action is successful, and the alarm (exception type)
clears.
CC PM2
<<-------------------------------------<<
EXCleared.Rsp(EXID=Error1,EXType=Error,
TimeStamp)
When the putting of the wafer is now successful, the
PM commands the transport module to Retract.
PM2 TM
>>------------------------------------->>
HORetract.Req(Port=Port1,AmID="PM2")
PM2 TM
<<-------------------------------------<<
HORetract.Rsp(Port=Port1,AmID="PM2",
Status=OK)
Upon successful completion of the handoff, a verify
sequence is used to complete the transaction.
PM2 TM
>>------------------------------------->>
HOVerify.Req(Port=Port1,AmID="PM2")
PM2 TM
<<-------------------------------------<<
HOVerify.Rsp(Port=Port1,AmID="PM2",
Status=OK)
CC PM2
<<-------------------------------------<<
TRJobComplete.Req(JobID=IOJob5,TimeStamp,
Status=OK)
The TM then informs the cluster controller that the
putting of material is complete and that the requested
transfer job is complete.
CC TM
<<-------------------------------------<<
TRJobComplete.Req(JobID=TMJob2,
TimeStamp,Status=OK)
The process module informs the cluster controller that
now that is has received the material, it is ready to
initiate processing on the wafer upon Start command.
CC PM2
<<-------------------------------------<<
PRJobWaitingStart.Req(JobID=PM2Job1)
14. PM2 JOB PROCESSING
The cluster controller commands the PM to start
processing the wafer.
CC PM1
>>------------------------------------->>
PRJobStart.Req(JobID=PM2Job1)
CC PM1
<<-------------------------------------<<
PRJobStart.Rsp(JobID=PM2Job1,Status=OK)
When actual processing is initiated, the PM informs the
cluster controller of its current status.
CC PM2
<<-------------------------------------<<
PRJobProcessing.Req(JobID=PM2Job1,
TimeStamp)
A data collection is enabled to allow parameters to be
sent from the PM to the cluster controller while the
wafer processing is taking place. A previously defined
event is enabled and the report structure is established.
CC PM2
>>------------------------------------->>
Set.Req(EREvent,EventID=Event1,
Enabled=TRUE)
CC PM2
<<-------------------------------------<<
Set.Rsp(EREvent,EventID=Event1,Status=OK)
Two variables for time and temperature will be reported
based on Event1 occurring.
CC PM2
<<-------------------------------------<<
ERReport.Req(EventID=Event1,ReportID=Rpt1
, ValueList={time,temp})
When wafer processing is complete on the PM, the
cluster controller is informed of the current status.
CC PM2
<<-------------------------------------<<
PRJobProcessingComplete.Req(JobID=PM2Job1
, TimeStamp,Status=OK)
SEMI E38-1296 © SEMI 1995, 1996 40
Data collection is then disabled.
CC PM2
>>------------------------------------->>
Set.Req(EREvent,EventID=Event1,
Enabled=FALSE)
CC PM2
<<-------------------------------------<<
Set.Rsp(EREvent,EventID=Event1,Status=OK)
15. PM2 to CM TRANSFER JOB SETUP
The CC informs the TM that a wafer transfer is required
from the PM2 to CM.
CC TM
>>------------------------------------->>
TRJobCreate.Req(MID="Wafer1",
TRSourceAmID="PM2",
TRDestinationAmID="CM")
The transport module assigns an identifier for this
particular transfer job. The transfer job is then started
by the transport module.
CC TM
<<-------------------------------------<<
TRJobCreate.Rsp(JobID=TMJob3,Status= OK)
CC TM
<<-------------------------------------<<
TRJobStarted.Req(JobID=TMJob3, TimeStamp)
16. CC TO PM2 SEND WAFER
The CC informs the PM2 that a wafer is to be
transferred to the TM.
CC PM2
>>------------------------------------->>
TRJobCreate.Req(MID="Wafer1",Port=
"Port1", Dir=Send))
CC PM2
<<-------------------------------------<<
TRJobCreate.Rsp(JobID=IOJob6,Status=OK)
CC PM2
<<-------------------------------------<<
TRJobStarted.Req(JobID=IOJob6, TimeStamp)
When the process module is ready, it directly
communicates with the transport module to indicate its
readiness for wafer handoff.
TM PM2
<<-------------------------------------<<
HOReady.Req(PortID="Port1",AmID="PM2",
HODir=GET,MID="Wafer1")
17. CC TO CM RECEIVE WAFER
The CC informs the CM that a wafer is to be transfered
from the TM.
CC CM
>>------------------------------------->>
TRJobCreate.Req(MID="Wafer1",Port=
"Port1", Dir=Receive)
CC PM2
<<-------------------------------------<<
TRJobCreate.Rsp(JobID=IOJob7,Status=OK)
CC PM2
<<-------------------------------------<<
TRJobStarted.Req(JobID=IOJob7, TimeStamp)
When the cassette module is ready, it directly
communicates with the transport module to indicate its
readiness for wafer handoff.
TM CM
<<-------------------------------------<<
HOReady.Req(PortID="Port1",AmID="CM",
HODir=PUT,MID="Wafer1")
18. PM2 TO TM WAFER HANDOFF
The PM2 transfers the wafer to the TM through the
handoff sequence, and the TM will keep the cluster
controller informed of its transfer progress. The
transport module informs the process module that it is
proceeding with the “getting” of the wafer.
PM2 TM
<<-------------------------------------<<
HOReady.Req(Port=Port1,AmID="PM2",HODir=G
ET,MID="Wafer1")
The process module informs the TM to use the
EXTEND scenario as the put operation.
PM2 TM
>>------------------------------------->>
HOExtend.Req(Port=Port1,AmID="PM2")
PM2 TM
<<-------------------------------------<<
HOExtend.Rsp(Port=Port1,AmID="PM2",
Status=OK)