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SEMI E87-0705 © SEMI 1999, 2005 11 Num Previous State Trigger New State Actions Comments 9 TRANSFER BLOCKED Manual: Processing for substrates contained within the carrier has completed, or a CancelCarrier/ CancelCarrierA…

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SEMI E87-0705 © SEMI 1999, 2005 10
Num Previous State Trigger New State Actions Comments
6 READY TO
LOAD
Manual: The equipment recognizes
the logical indication of the start of
a manual load transfer. This trigger
is configurable by the user,
examples are included in Table 8.
Automated: The PIO load transfer
is beginning and the PIO
“READY” signal is activated (see
SEMI E84).
Internal Buffer: A CarrierOut
service has started for this load
port.
TRANSFER
BLOCKED
When a CarrierOut service is queued and
the equipment load port is currently in the
TRANSFER BLOCKED state, the
equipment shall keep the load port in the
TRANSFER BLOCKED state.
Data required to be available for this event
report:
PortID
PortTransferState
7 READY TO
UNLOAD
Manual: The equipment recognizes
the logical indication of the start of
a manual unload transfer. This
trigger is configurable by the user,
examples are included in Table 8.
Automated: The PIO unload
transfer is beginning and the PIO
“READY” signal is activated (see
SEMI E84).
Internal Buffer: A CarrierIn
service has started for this load
port.
By CarrierReCreate Service: A
CarrierReCreate service command
has been issued by host or
operator.
TRANSFER
BLOCKED
When a CarrierOut service is queued and
the equipment load port is currently in the
TRANSFER BLOCKED state, the
equipment shall keep the load port in the
TRANSFER BLOCKED state.
Data required to be available for this event
report:
PortID
PortTransferState
8 TRANSFER
BLOCKED
Manual: The carrier unload
transfer has completed, and the
load port is now empty and ready
for load transfer. This is indicated
when two conditions are met, the
presence signal indicates that no
carrier is present and the operator
has logically indicated that the
transfer is complete.
Automated: The PIO unload
transfer ends with the PIO
“COMPT” signal (see SEMI E84).
Internal Buffer: The carrier has
finished its move from the load
port into the internal buffer, and no
CarrierOut services are queued for
this load port.
READY TO
LOAD
A carrier can now be loaded onto the load
port from either an external entity, or by
the equipment’s internal material handling
resource.
Data required to be available for this event
report:
PortID
PortTransferState
SEMI E87-0705 © SEMI 1999, 2005 11
Num Previous State Trigger New State Actions Comments
9 TRANSFER
BLOCKED
Manual: Processing for substrates
contained within the carrier has
completed, or a CancelCarrier/
CancelCarrierAtPort service has
been issued, and the carrier has
returned to the load/unload
position on the load port.
Automated: Processing for the
substrates belonging to the carrier
has completed, or a
CancelCarrier/CancelCarrier-
AtPort service has been received,
and the carrier has returned to the
load/unload position.
Internal Buffer: A carrier has
completed its move from the
internal buffer to the load port.
READY TO
UNLOAD
The carrier on the load port can now be
unloaded from the load port to an external
entity.
Data required to be available for this event
report:
PortID
CarrierID
PortTransferState
10 TRANSFER
BLOCKED
The transfer was unsuccessful, and
the carrier was not loaded or
unloaded.
TRANSFER
READY
The sub-state of TRANSFER READY
which is decided by transition #5.
Data required to be available for this event
report:
PortID
PortTransferState
10 Carrier Object
10.1 Information about a carrier is encapsulated as an object. This allows the host to exchange information with the
equipment about one or more specific carriers using services defined in SEMI E39, Object Services Standard. A
carrier has properties (attributes) that are defined in Table 6, Carrier Attribute Definition.
10.2 Object Instantiation
10.2.1 The carrier object is a software representation of the carrier in the equipment. Under normal circumstances
this object is instantiated by the equipment when the host uses the Bind or Carrier Notification service or when the
equipment successfully reads the carrierID from the carrier. A carrier object is instantiated by carrierID read only if
there are no currently existing objects with the carrierID just read. A carrier object can also be instantiated by either
the ProceedWithCarrier or CancelCarrier Services on an NOT ASSOCIATED port. (This implies a failed carrierID
read event.) The ContentMap attribute will be an empty list (a list of zero) when the instantiation is done by
CarrierID read. The SlotMap attribute should be a list consisting of all slots enumerated as “UNDEFINED” when
the carrier object is instantiated by CarrierID read.
10.2.2 From the host point of view, an object is instantiated if the host is able to query the equipment about that
object, it's current state, and other attributes. Once instantiated, the object is considered destroyed (no longer
instantiated) if the response to such queries is “unknown object”.
10.2.3 Summary of carrier object instantiation:
1. Bind or Carrier Notification or CarrierReCreate (with PropertiesList) service;
2. CarrierID read with no currently existing carrier objects having the carrierID just read; and
3. ProceedWithCarrier or CancelCarrier Service on an NOT ASSOCIATED port with a carrier.
10.2.4 Carrier Object Identifier (ObjID)
10.2.4.1 The purpose of an Object Identifier is to allow references to an object within the system. The object
identifier is created when an object is instantiated and should be unchanged or persistent until the end of the object
lifecycle. The Object Identifier shall be unique at the equipment during lifecycle of the object. The Carrier ID is the
SEMI E87-0705 © SEMI 1999, 2005 12
Carrier Object Identifier. The equipment is responsible for ensuring uniqueness of the Carrier ID prior to
instantiation by the bind service.
10.2.5 Carrier Object Destruction
10.2.5.1 Normally, the Carrier Object reaches the end of its lifecycle when the carrier is unloaded from the
equipment. Abnormally, the Carrier Object reaches the end of its lifecycle when a CancelBind or
CancelCarrierNotification service is executed prior to the carrier being loaded, or when an equipment based carrier
verification fails following carrier instantiation by the bind service.
10.2.5.2 Summary of carrier object destruction:
1. A carrier is unloaded from the equipment;
2. A CancelBind or CancelCarrierNotification service is received;
3. An equipment based CarrierID verification fails after a carrier object was previously instantiated with a “Bind”
service (Equipment initiated CancelBind); and
4. The host or operator has issued a CarrierReCreate service.
10.3 Carrier Attribute Definitions
10.3.1 The following table contains the attributes that are of importance to the host and/or the equipment in order to
manage the history and the reports about the carrier object.
10.3.2 REQD Column
10.3.2.1 All attributes in the following table are required to be associated with the carrier object and are always
maintained and updated by the equipment (for example, if the equipment has a waferID reader, the equipment can
determine the ContentMap).
10.3.3 ACCESS Column
10.3.3.1 Even though a value may be marked as RO (read only), the initial value for the attribute may be provided
by the host when attached to either the Bind or ProceedWithCarrier services.
10.3.4 Carrier Attribute Definition Table
Table 6 Carrier Attribute Definition
Attribute Name Definition Access Reqd Form
Capacity Maximum number of substrates a
carrier can hold.
RO Y Positive integer.
CarrierIDStatus Current state of the carrier ID
verification.
RO Y Enumerated:
ID NOT READ, [ID] WAITING FOR HOST,
ID VERIFICATION OK, ID VERIFICATION
FAILED.
CarrierAccessingStatus The current accessing state of the
carrier by the equipment. The
current substate of the
CarrierAccessingStatus state model.
RO Y Enumerated:
NOT ACCESSED, IN ACCESS, CARRIER
COMPLETE, CARRIER STOPPED.
ContentMap Ordered list of lot and substrate
identifiers corresponding to slot
1,2,3,…n.
RO Y Ordered list of n structures, where n is equal to
the value of “Capacity” above, and each
structure consists of a LotID and SubstrateID.
List of Structure
LotID
SubstrateID
When no Lot ID is provided by the host, the
LotID value should be null.
When a slot has no substrate or the host does
not know substrate identifier, the LotID and
SubstrateID value should be null.