semi合集-English.pdf - 第1085页
SEMI E5-1104 © SEMI 1982, 2004 27 Name Format Description Values Where Used OUTPTN 10, 51 A specialized version of PTN indicating the OutPutPort S3F35 PARAMNAME 20 The name of a parameter in a request S3F21, F23 PARAMVAL…
SEMI E5-1104 © SEMI 1982, 2004 26
Name Format Description Values Where Used
OBJSPEC 20 A text string that has an
internal format and that is
used to point to a specific
object instance. The string is
formed out of a sequence of
formatted substrings, each
specifying an object’s type
and identifier. The substring
format has the following four
fields:
object type,
colon character “:”,
object identifier,
greater-than symbol “>“
where the colon character “:”
is used to terminate an object
type and the “greater than”
symbol “>“ is used to
terminate an identifier field.
The object type field may be
omitted where it may be
otherwise determined. The
final “>“ is optional.
S2F49;
S13F11, F13,
F15;
S14F1, F3, F5,
F7, F9, F10,
F11, F13, F15,
F16, F17, F19,
F25, F27;
S15F43, F47
OBJTOKEN 54 Token used for authorization
S14F14, F15;
S15F37, F39,
F41, F43
OBJTYPE 20, 5() Identifier for a group or class
of objects. All objects of the
same type must have the
same set of attributes
available.
S1F19;
S14F1, F3, F6,
F7, F8, F25,
F26, F27
OFLACK 10 Acknowledge code for OFF-
LINE request
0 = OFF-LINE Acknowledge
1-63 Reserved
S1F16
ONLACK 10 Acknowledge code for ON-
LINE request
0 = ON-LINE Accepted
1 = ON-LINE Not Allowed
2 = Equipment Already ON-LINE
3-63 Reserved
S1F18
OPID 5() Operation ID. A unique
integer generated by the
requestor of an operation,
used where multiple
completion confirmations
may occur.
S6F25;
S14F19, F21;
S15F21, F29,
F30, F37, F41,
F44, F46
ORLOC 10 Origin Location
implicit value of (0,0)
0 = Center die of wafer
(Determined by:
row or column count +1
2
truncated)
1 = Upper right
2 = Upper left
3 = Lower left
4 = Lower right
>4 = Error
5-63 Reserved
Zero length indicates not
available
S12F1, F3, F4
SEMI E5-1104 © SEMI 1982, 2004 27
Name Format Description Values Where Used
OUTPTN 10, 51 A specialized version of PTN
indicating the OutPutPort
S3F35
PARAMNAME 20 The name of a parameter in a
request
S3F21, F23
PARAMVAL 1, 10,
11, 20,
3(), 4(),
5()
The value of the parameter
named in PARAMNAME.
Values that are lists are
restricted to lists of single
items of the same format
type.
S3F21, F23
PDFLT 11, 20,
3(), 4(),
5()
Parameter Default Value
Specifies default value and data
type of parameter. If no
defaults are provided, item data
length will be zero. For
numeric or Boolean data, the
default item may be a multi-
varied vector if the parameter
itself can be a vector.
If RQPAR is false:
Position of data in a default
item is significant. When
obtaining a default value to be
used in the Nth position of a
vector parameter, the
value is obtained from the Nth
position of the default item.
If the default item has L
entries, no default value will
be provided for the L+1,...,PMAX
parameter entries.
If RQPAR is true:
The length of the default vector
(L) specifies the minimum number
of
entries which must be entered
for the parameter. If > PMAX,
only PMAX
entries are required.
S7F22
PFCD 10 Predefined form code, 1 byte
S6F9
PGRPACTION 20 The action to be performed
on a port group
S3F23
SEMI E5-1104 © SEMI 1982, 2004 28
Name Format Description Values Where Used
PMAX 3(), 5() Parameter Count Maximum
Maximum amount of data to be
accepted by the host for this
parameter. When a conflict
arises between value of PMAX and
length of PDFLT, PMAX takes
precedence.
For numeric and Boolean
parameters:
PMAX < 0 invalid
PMAX = 0 specifies there is no
upper bound
PMAX = 1 specified a single
value is expected
PMAX > 1 specifies a vector of
values is expected with a
maximum of PMAX entries
For string parameters:
PMAX < 0 invalid
PMAX = 0 specifies there is no
upper bound
PMAX > 0 maximum length of
parameter string
S7F22
PNAME 20
Parameter Name 16
characters
Text string identifying the
parameter value expected by its
parent process command.
S7F22
PORTACTION 20 The action to be performed
on a port
S3F25
PORTGRPNAME 20 The identifier of a group of
ports
S3F21,F23
PPARM 11, 20,
3(), 4(),
5()
Process Parameter
Numeric or Boolean SECS data
item, single or multiple value,
or text string which provides
information required to complete
the process command to which the
parameter refers.
S7F23, F26,
F31, F39, F43
PPBODY 10, 20,
3(), 5()
Process program body
The process program describes to
the equipment, in its own
language, the actions to be
taken in processing the material
it receives.
S7F3, F6, F36,
F37, F41
PPGNT 10 Process program grant status,
1 byte
0 = OK
1 = Already have
2 = No space
3 = Invalid PPID
4 = Busy, try later
5 = Will not accept
>5 = Other error
6-63 Reserved
S7F2, F30
PPID 10, 20 Process program ID
Limited to a maximum of 80
bytes.
The format used in the PPID will
be host-dependent. For internal
use of the equipment, the PPID
can be treated as a unique
binary pattern. If the local
equipment is not prepared to
display the transmitted code,
the display should be in
hexadecimal form.
S2F27;
S7F1, F3, F5,
F6, F8, F10,
F11, F13, F17,
F20, F23, F25,
F26, F27, F31,
F33, F34, F36,
F53;
S9F13