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SEMI G52-90 © SEMI 1990, 2004 1 SEMI G52-90 (Reapproved 1104) STANDARD TEST METHOD FOR MEASUREMENT OF IONIC CONTAMINATION ON SEMICONDUCT OR LEADFRAMES (PROPOSED) This test method was technicall y approved by the Global A…

SEMI G51-90 © SEMI 1990 6

Detail A

Corner Relief Hole (Optional)

Table 2 Leadframe Standard Dimensions

LEADS PKG. BODY a b c d

44 10 × 10 4.200 3.800 1.170 1.170

52 10 × 10 4.200 3.800 1.170 1.170

52 14 × 14 3.735 3.00 0.995 1.075

64 14 × 14 3.735 3.00 0.995 1.075

80 14 × 14 3.735 3.00 0.995 1.075

64 14 × 40 3.735 3.400 0.995 1.075

80 14 × 20 3.735 3.400 0.995 1.075

100 14 × 20 3.735 3.400 0.995 1.075

120 28 × 28 6.600 8.840 1.610 1.610

128 28 × 28 6.600 8.840 1.610 1.610

144 28 × 28 6.600 8.840 1.610 1.610

160 28 × 28 6.600 8.840 1.610 1.610

184 32 × 32 6.600 8.840 1.610 1.610

196 28 × 40 6.600 8.840 1.610 1.610

232 40 × 40 6.600 8.840 1.610 1.610

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI G52-90 © SEMI 1990, 2004 1

SEMI G52-90 (Reapproved 1104)

STANDARD TEST METHOD FOR MEASUREMENT OF IONIC

CONTAMINATION ON SEMICONDUCTOR LEADFRAMES (PROPOSED)

This test method was technically approved by the Global Assembly & Packaging Committee and is the direct

responsibility of the Japanese Packaging Committee. Current edition approved by the Japanese Regional

Standards Committee on July 23, 2004. Initially available at www.semi.org September 2004; to be published

November 2004. Originally published in 1990.

NOTE 1: Japan, Europe, and US task forces are planning to

develop test methods which will address the different levels

of ionic contamination on leadframes.

1 Scope

1.1 This standard describes the procedure to determine

ionic contamination on leadframes using a water

extraction method. The method is sensitive to Na

, K

, Cl



, NO

, Br



, SO

2

, PO

3

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

2 Referenced Standards

2.1 ASTM Specifications

D 1193 — Specification for Reagent Water

D 4327 — Anions in Water by Ion Chromatography

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

3 Summary of Method

3.1 Ionic contamination is extracted in water at > 95°C

for 30 ± 2 minutes. The contamination is quantitatively

analyzed by ion type using Ion Chromatography and the

result is presented as nanograms/unit area.

4 Significance

4.1 Contamination on leadframes can contribute to

semiconductor device reliability problems. This method

may be used by lead frame manufacturers at outgoing

inspection and by users at incoming inspection.

Correlation of device reliability with contamination

levels may lead to improved leadframe cleaning

processes.

1 American Society for Testing and Materials, 100 Barr Harbor

Drive, West Conshohocken, Pennsylvania 19428-2959, USA.

Telephone: 610.832.9585, Fax: 610.832.9555, Website:

www.astm.org

5 Terminology

5.1 Definitions

5.1.1 eluent — the solvent used to carry the extracted

ions through the ion exchange chromatograph.

5.1.2 regenerant — a chemical solution containing the

ions originally present in the chromatograph column

prior to a test run and used to prepare the column for a

new test.

5.1.3 retention time — the time required for a

particular ion type to pass from the injection port to the

detector. Retention time is characteristically different

for each ion type.

5.1.4 standard solution — a solution containing a

known concentration of the ion to be measured and

used to calibrate the chromatograph.

6 Equipment

6.1 Ion Chromatograph for Anion and Cation Analysis

— This equipment is to consist of a concentration

pump, guard column, separator column, and a detector

module consisting of a suppressor device to reduce the

background eluent conductivity to a low level and a

conductivity cell. The minimum sensitivity of the

chromatograph for each ion type is defined in Table 1.

6.2 Chart Recorder

6.3 Ion Extraction Vessels — Polypropylene or teflon

containers with sealing caps, or polypropylene/

polyethylene double layered bags.

NOTE 2: The contamination level of these vessels must be

less than one-fifth (1/5) of the expected contamination level

on the leadframes when measured in a control test.

6.4 Hot Bar Bag Sealer

6.5 Water Bath — 300 mmL × 300 mmW × 200 mmH,

filled with DI water, and capable of holding 95°C.

6.6 Volumetric Dispenser (e.g., Pipettes) — 10 ml and

100 ml capacity.

6.7 Quartz Flasks and Pipettes for Cation Standard

Solutions — 100, 250, 500, and 1000 ml capacity

(flasks); 1, 10, and 25 ml capacity (pipettes).

SEMI G52-90 © SEMI 1990, 2004 2

6.8 Borosilicate Glass flasks and Pipettes for Anion

Standard Solutions — 100, 250, 500, and 100 ml

capacity (flasks); 1, 10, and 25 ml capacity (pipettes).

6.9 Chemical Balance, Weighing Chemicals

6.10 Scissors, Tweezers, Spatula

7 Reagents and Materials

7.1 Deionized water, resistivity  15 megohm

centimeters at 25°C per ASTM D 1193.

7.2 Eluents and regenerants for specific chromatograph

columns prepared per chromatograph equipment

manufacturer’s recommendations so that the water peak

can be separated from the ionic peaks.

7.3 Compounds for Cation Standard Solutions —

NaCl, NH

Cl, KC1.

7.3.1 Compounds for Anion Standard Solutions —

NaCl, Na

HPO

, 12H

O, NaBr, NaNO

, K

NOTE 3: All compounds are to be reagent grade.

8 Sampling

8.1 The leadframes must not be touched, except with

previously cleaned tweezers or double-layered cotton

gloves with polyethylene outer gloves in order to avoid

additional contamination.

8.2 The sample size (i.e., the number of frames to be

tested in this destructive test) may be determined by

agreement between the customer and the vendor. The

recommended sample sizes are 10–50 cm

for testing

pads and 200–500 cm for the test of overall leadframes.

NOTE 4: The surface area of the frame is calculated from the

leadframe drawing, and includes the top, bottom and side

surfaces. It is important that user and supplier agree on the

surface area calculation for any given leadframe

configuration.

9 Preparation of Standard — Solutions and

Chromatograph Calibration

9.1 Standard Solutions

9.1.1 The single-ingredient standard solutions of each

ion (Na

, NH

, K

; C1



, No

, Br

, SO

2

, PO

3

) are

made by dissolving 1.000 g of each ion into 1.000 liter

of D.I. water, respectively. The stored multi-ingredient

standard solutions shown in Table 2 are then made form

these single-ingredient standard solutions by the

dilution method.

9.1.2 Cation and anion standard solutions for

calibration are made by diluting the stored multi-

ingredient standard solutions as shown in Table 2.

9.1.3 Store the multi-ingredient standard solution and

the calibration solutions in the correct flasks and label

with the ion type and concentration.

NOTE 5: New standard solutions for calibration are required

every 24 hours. Ensure that the flasks are cleaned with water

before refilling with a new solution.

9.2 Calibration

9.2.1 Set up the chromatograph and regenerate the

columns according to the manufacturer’s instructions

(ASTM D 4327 provides further details).

9.2.2 Run the eluent through the chromatograph until a

stable baseline chromatograph is obtained.

9.2.3 Select the infection volume recommended by the

manufacturer for each ion type and inject in to the

chromatograph. Record the chromatograph for each ion

type (see Figure 1), and make the calibration curve for

each ion (ion concentration versus peak height or area).

NOTE 6: Peak height or area under the ion’s characteristic

curve is proportional to the concentration.

10 Procedure — Bag Extraction Method

10.1 Preparation of Extraction Bags

10.1.1 Add 100 ml of DI water to the

polypropylene/polyethylene double layered bag and

seal them with the hot bar bag sealer. The amount of air

in the bags should be reduced as much as possible

before sealing.

NOTE 7: Two bags are required for each test and must come

from the same manufacturing lot.

10.1.2 Place the bags in the water bath at T > 95°C for

2 hours ± 5 minutes.

10.1.3 Allow the bags to reach room temperature but

leave sealed until ready for use at which time open the

bags (use clean scissors for the bags) and rinse out five

(5) times with DI water.

10.2 Extraction Process

10.2.1 Place the samples in the bags. Cover the frames

with a known volume of water (e.g., 100 ml and then

seal the bags). Also, place a similar amount of water in

an empty bag and seal.

NOTE 8: The amount of air in the bags should be reduced as

much as possible before sealing. The bags that only contain

water provide the background contamination of the bag. Do

not select the frames or remove them from their shipping

container until ready to test the surface contamination. The

recommended volume of water is 10–30 ml for the testing die

pads only and 100 ml for testing complete leadframes. Lead

frames should be bent after sealing so that the water is in

contact with all surfaces.