semi合集-English.pdf - 第1155页

SEMI E5-1104 © SEMI 1982, 2004 97 Stream,Function Name (Mnemonic) Direction S3,F32 Carrier Tag Writ e Data Acknowledge (CTWDA) S,H<-E Description This message acknowledges the success or failure of writing dat a to th…

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SEMI E5-1104 © SEMI 1982, 2004 96
Stream,Function Name (Mnemonic) Direction
S3,F30 Carrier Tag Read Data (CTRD) S,H<-E
Description
This message is used to return requested information from the carrier tag of the carrier indicated in the request and to
acknowledge the results of the request.
Structure
L,2
1. <DATA>
2. <L,2>
1. <CAACK>
2. L,s
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
s. L,2
1. <ERRCODE
s
>
2. <ERRTEXT
s
>
Exception
If the carrier identifier or the carrier location originally specified is unknown, then DATA is zero length. If CAACK is non-zero,
then DATA is zero length.
Stream,Function Name (Mnemonic) Direction
S3,F31 Carrier Tag Write Data Request (CTWDR) S,H->E, reply
Description
The host requests the equipment to write data to a carrier tag. The carrier must be indicated either by its location identifier or its
carrier identifier, or both. DATASEG may be used to indicate a specific section of data to be written or overwritten.
DATALENGTH may be used to indicate the length of the data to be written.
Structure
L,5
1. <LOCID>
2. <CARRIERSPEC>
3. <DATASEG>
4. <DATALENGTH>
5. <DATA>
Exception
Either LOCID and CARRIERSPEC can be omitted (zero length item), but not both. If DATASEG and DATALENGTH are
both omitted (are zero length items) then all data is to be overwritten. If only DATALENGTH is omitted, then all data within
the indicated section is to be written.
SEMI E5-1104 © SEMI 1982, 2004 97
Stream,Function Name (Mnemonic) Direction
S3,F32 Carrier Tag Write Data Acknowledge (CTWDA) S,H<-E
Description
This message acknowledges the success or failure of writing data to the carrier tag requested.
Structure
L,2
1. <CAACK>
2. L,s
1. L,2
1. <ERRORCODE
1
>
2. <ERRORTEXT
1
>
.
.
s. L,2
1. <ERRORCODE
s
>
2. <ERRORTEXT
s
>
Exception
s = 0 if and only if there are no errors.
Stream,Function Name (Mnemonic) Direction
S3, F33 Cancel All Pod Out Request
Description
This message is used to cancel all pending pod out requests.
Structure
Header only
Exception
None
Stream,Function Name (Mnemonic) Direction
S3,F34 Cancel All Pod Out Acknowledge
Description
This message acknowledges the Cancel Pod Out request.
Structure
L,2
1. <CAACK>
2. L,n
1. L,2
1. <ERRORCODE
1
>
2. <ERRORTEXT
1
>
.
.
n. L,2
1. <ERRORCODE
n
>
2. <ERRORTEXT
n
>
Exception
If n = 0, no errors exist.
SEMI E5-1104 © SEMI 1982, 2004 98
Stream,Function Name (Mnemonic) Direction
S3,F35 Reticle Transfer Job Request
Description
This message requests a reticle transfer job be performed (or cancelled) for a particular pod.
Structure
L,6
1. <JOBACTION>
2. <PODID>
3. <INPTN>
4. <OUTPTN>
5. L,n n = number of attributes
1. L,2
1. <ATTRID
1
>
2. <ATTRDATA
1
>
.
.
.
n. L,2
1. <ATRRID
n
>
2. <ATTRDATA
n
>
5. L,m m = capacity
1. L,3
1. <RETICLEID
1
>
2. <RETREMOVEINSTR
1
>
3. L,r r = number of attributes
1. L,2
1. <ATTRID
1.1
>
2. <ATTRDATA
1.1
>
.
.
r. L,2
1. <ATTRID
1.r
>
2. <ATTRDATA
1.r
>
.
.
m. L,3
1. <RETICLEID
m
>
2. <RETREMOVEINSTR
m
>
3. L,r r = number of attributes
1. L,2
1. <ATTRID
m.1
>
2. <ATTRDATA
m.1
>
.
.
r. L,2
1. <ATTRID
m.r
>
2. <ATTRDATA
m.r
>
6. L,m m = capacity
1. L,2
1. <RETICLEID
1
>
2. <RETPLACEINSTR
1
>
.
.
m. L,2
1. <RETICLEID
m
>
2. <RETPLACEINSTR
m
>
Exception
If JOBACTION = CancelReticleTransferJob, m and n may = 0