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SEMI E109.1-0704 © SEMI 2002, 2004 2 Table 1 Service Message Mappi ng Service Name Stream/Functi on SECS-II Message Name Bind S3F17/F18 Carrier Action Request/Acknowledge CancelAllPodOut S3F33/F34 Cancel All Pod Out Requ…

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SEMI E109.1-0704 © SEMI 2002, 2004 1
SEMI E109.1-0704
PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL FOR
RETICLE AND POD MANAGEMENT (RPMS)
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the North American Information and Control Committee. Current edition approved
by the North American Facilities Committee on March 14, 2004. Initially available at www.semi.org May
2004; to be published July 2004. Originally published March 2002; previously published November 2002.
1 Purpose
1.1 This document maps the services of SEMI E109 to
SECS-II streams and functions. This document also
maps the data of SEMI E109 to E5 data definitions.
2 Scope
2.1 This is a provisional standard that covers host and
equipment communication for equipment that handle
reticles. This includes equipment that handle reticles
both inside and outside of a reticle pod. The provisional
status is required because of the immaturity of
implementations of integrated equipment with
Automated Material Handling Systems (AMHS) or
Automated Reticle Handling Systems (ARHS).
Additional specifications may be defined to add further
functionality. Also, further exception handling and error
recovery scenarios need to be defined.
2.2 This document applies to all implementations of
SEMI E109 that use SECS-II message protocol (SEMI
E5). Compliance to this standard requires compliance
to both SEMI E109 and SEMI E5.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This standard applies to semiconductor equipment
that handles reticles and reticle carriers. This standard is
intended to be used for lithography production, bare
reticle storage, and reticle inspection equipment. It may
or may not be applied to other types of equipment.
4 Referenced Standards
4.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E39.1 — SECS-II Protocol for Object Services
Standard (OSS)
SEMI E109 — Provisional Specification for Reticle
and Pod Management (RPMS)
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Services Mapping
5.1 This sections shows the specific SECS-II streams
and functions that shall be used for SECS-II
implementations of the services defined in SEMI E109,
as well as the parameter mapping for data attached to
services.
5.2 Services Message Mapping
5.2.1 Table 1 defines the relationships between SEMI
E109 services and SECS-II messages.
SEMI E109.1-0704 © SEMI 2002, 2004 2
Table 1 Service Message Mapping
Service Name Stream/Function SECS-II Message Name
Bind S3F17/F18 Carrier Action Request/Acknowledge
CancelAllPodOut S3F33/F34 Cancel All Pod Out Request/Acknowledge
CancelBind S3F17/F18 Carrier Action Request/Acknowledge
CancelMoveReticle S14F19/20 Generic Service Request/Acknowledge
CancelPod S3F17/F18 Carrier Action Request/Acknowledge
CancelPodAtPort S3F17/F18 Carrier Action Request/Acknowledge
CancelPodNotification S3F17/F18 Carrier Action Request/Acknowledge
CancelPodOut S3F17/F18 Carrier Action Request/Acknowledge
CancelReservationAtPort S3F25/F26 Port Action Request/Acknowledge
CancelReticleTransferJob S3F35/F36 Carrier Action Request/Acknowledge
ChangeAccess S3F27/F28 Change Access/Acknowledge
ChangeServiceStatus S3F25/F26 Port Action Request/Acknowledge
Clamp S3F17/F18 Carrier Action Request/Acknowledge
ClosePod S3F17/F18 Carrier Action Request/Acknowledge
IndexDown S3F17/F18 Carrier Action Request/Acknowledge
IndexUp S3F17/F18 Carrier Action Request/Acknowledge
MoveReticle S14F19/F20 Generic Service Request/Acknowledge
OktoUseReticle S14F19/F20 Generic Service Request/Acknowledge
PodComplete S3F17/F18 Carrier Action Request/Acknowledge
PodIn S3F17/F18 Carrier Action Request/Acknowledge
PodNotification S3F17/F18 Carrier Action Request/Acknowledge
PodOut S3F17/F18 Carrier Action Request/Acknowledge
PodRelease S3F17/F18 Carrier Action Request/Acknowledge
PodTagReadData S3F29/F30 Carrier Tag Read Data Request/Acknowledge
PodTagWriteData S3F31/F32 Carrier Tag Write Data Request/Acknowledge
ProceedWithPod S3F17/F18 Carrier Action Request/Acknowledge
ProceedWithReticle S14F19/20 Generic Service Request/Acknowledge
RejectReticle S14F19/F20 Generic Service Request/Acknowledge
Re-qualifyReticle S14F19/F20 Generic Service Request/Acknowledge
ReserveAtPort S3F25/F26 Port Action Request/Acknowledge
ReticleTransferJob S3F35/F36 Reticle Transfer Job Request/Acknowledge
SetQualificationIntervalTime S14F3/4 SetAttr Request
Unclamp S3F17/F18 Carrier Action Request/Acknowledge
5.3 Services Parameter Mapping
5.3.1 Table 2 maps the SEMI E109 service parameters to SECS-II Data Items.
NOTE 1: Use of parameters not specified for a given message in SEMI E109 is prohibited. SECS-II data items not used for a
given message shall be sent as zero length items.
Table 2 Service Parameters to SECS-II Data Item Mapping
Parameter Name Parameter Range SECS-II Data Item
AccessMode Enumerated:
0 = MANUAL
1 = AUTO
ACCESSMODE
SEMI E109.1-0704 © SEMI 2002, 2004 3
Parameter Name Parameter Range SECS-II Data Item
ArrivingReticleList List of n structures, where
n = capacity
Reticle ID
ReticleRemovalinstruction
ReticlePropertiesList
When a slot in a pod contains no reticle, the value for Reticle ID
should be null, the ReticleRemovalInstruction
n
should be PASS
BY, and the ReticlePropertiesList
,
should be a zero length list.
L,n
1. L,3
1.<RETICLEID
1
>
2.< RETREMOVEINSTR
1
>
3. L,m
1. L,2
1. <ATTRID
1,1
>
2. <ATTRDATA
1,1
>
:
m. L,2
1.<ATTRID
1,m
>
2.<ATTRDATA
1,m
>
:
n. L,3
1.<RETICLEID
n
>
2. <RETREMOVEINSTR
n
>
3. L,m
1. L,2
1. <ATTRID
n,1
>
2. <ATTRDATA
n,1
>
:
m. L,2
1. <ATTRID
n,m
>
2. <ATTRDATA
n,m
>
CMAcknowledge Enumerated CAACK
CMStatus Structure L,2
1.<CAACK>
2.Status
Data 1–80 characters DATA
DataSeg 1–80 characters DATASEG
DataSize 0–65,535 (integer) DATALENGTH
DepartingReticleList List of n structures, where
n = capacity
Reticle ID
ReticlePlacementInstruction
When a slot in a pod contains no reticle and will not have a reticle
placed, the value for Reticle ID
should be null and the
ReticlePlacmentInstruction
n
should be PASS BY.
L,n
1. L,2
1.<RETICLEID
1
>
2.<RETPLACEINSTR
1
>
:
n. L,2
1.<RETICLEID
n
>
2.<RETPLACEINSTR
n
>
DestinationLocation 1–80 characters RPMDESTLOC
ErrorCode Enumerated ERRCODE
ErrorText 1–80 characters ERRTEXT
InputPortID U1(0, 101–255) INPTN
OutputPortID U1(0, 101–255) OUTPTN
PodAttributeData Any ATTRDATA
PodAttributeID 1–40 characters ATTRID
PodID 1–64 characters PODID