semi合集-English.pdf - 第5543页

SEMI P10-0705 © SEMI 1990, 2005 38 <xs:sequence minOccurs="0"> <xs:element name="Quantity" type="xs:integer"/> </xs:sequence> <xs:sequence minOccurs="0"> &l…

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SEMI P10-0705 © SEMI 1990, 2005 37
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingAddress" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingPhone" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingFax" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShippingEmail" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingMethod" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RepairsAuthorized"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShippableData"
type="ShippableDataType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="MfgSiteReqd" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:sequence minOccurs="0">
<xs:element name="LithoEquipReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EquipSiteReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:sequence minOccurs="0">
<xs:element name="LithoModelReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0"
maxOccurs="unbounded">
<xs:element name="LithoModeReqd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
</xs:sequence>
<xs:element name="ProductType" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="ProductMagnification"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ProductImagingType"
type="xs:string"/>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 38
<xs:sequence minOccurs="0">
<xs:element name="Quantity" type="xs:integer"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ProductAsCheckplate"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Multiwrite" type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="WaferExposureTool"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="WaferExposureData"
type="WaferExposureDataType"/>
<xs:element name="AerialImageData"
type="AerialImageDataType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FabTechnology" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="WaferFab" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="JobName" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="JobLevel" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RetrofitJobName" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RetrofitJobLevel"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RetrofitMaskSetId"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RetrofitMaskId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RetrofitMaskSetName"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="RetrofitMaskSetVersion"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RetrofitMaskName"
type="xs:string"/>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 39
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="TitleData" type="TitleDataType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BarcodeData"
type="BarcodeDataType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="JobOnlyApprovalReqd"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="JobWithPatternsApprovalReqd"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="PatternApprovalReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="AllPatternsApprovalReqd"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ApprovalReqd" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ReviewReqd" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SerialNumber" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MirrorMask" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MaskRotation" type="xs:string"/>
</xs:sequence>
<xs:element name="Substrate" type="SubstrateType"/>
<xs:sequence minOccurs="0">
<xs:element name="PhaseShift" type="PhaseShiftType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Ut1xUncut" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Process" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ProcessEtchingType"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CustomerSpec" type="xs:string"/>
<xs:element name="CustomerSpecRevision"
type="xs:string"/>