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SEMI F74-1103 © SEMI 2002, 2003 7 7.11 Corrosion Testing 7.11.1 Due to the lack of prove n, standardized test methods for quantifying the perf ormance of gas systems in corrosive envi r onments, this document can only re…

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SEMI F74-1103 © SEMI 2002, 2003 6
(mm)
Figure 2
Dimension of the Wedge-Shaped Indenter
Figure 3
Wedge and Test Sample (Component or Substrate)
Maximum
rated
working
pressure or
5000 PSI
GAS
SUPPLY
VENT TO
VACUUM
ISOLATION
VALVE
PT
TEST
SAMPLE(S)
ISOLATION
VALVE
Figure 4
Pressure Cycling Test Rig
SEMI F74-1103 © SEMI 2002, 2003 7
7.11 Corrosion Testing
7.11.1 Due to the lack of proven, standardized test
methods for quantifying the performance of gas
systems in corrosive environments, this document can
only reference two applicable test procedures for use to
supply qualitative information relating to the
performance of gas system metal seals under corrosive
serve: SEMI F77 and SEMASPEC 97043272A-TR (see
Related Documents). It will be the responsibility of the
requesting party to define the specific testing and
acceptance criteria for this type of evaluation.
7.12 Pressure Cycling Test
7.12.1 Assemble the test sample(s) into the test rig
shown in Figure 4 per the manufacturer’s instructions.
7.12.2 Cycle the test sample(s) for a total of 250,000
cycles. The following represents one cycle:
7.12.2.1 Apply the manufacturer’s maximum rated
working pressure + /- 2% or 5000 + /- 100 psig,
whichever is less.
7.12.2.2 Maintain pressure for at least 1 second after
the transducer indicates that the pressure requirement
has been achieved.
7.12.2.3 Vent the pressure to 74.5 KPa or less.
7.12.2.4 Maintain the vacuum for at least 1 second
after the transducer indicates that vacuum requirement
has been achieved.
7.12.3 Leak test per Section 7.2.1.
7.12.4 Sample quantity: 5
8 Related Documents
8.1 SEMATECH Documents
5
SEMASPEC 90120390B-STD — Test Method for
Particle Contribution
SEMASPEC 97043272A-TR — Accelerated Life
Testing of Gas System Performance and Reliability
SEMI F77 — Test Method For Electrochemical Critical
Pitting Temperature Testing of Alloy Surfaces used in
Corrosive Gas Systems
5 SEMATECH, 2706 Montopolis Drive, Austin, TX, website:
www.sematech.org
SEMI F74-1103 © SEMI 2002, 2003 8
RELATED INFORMATION 1
SAMPLE PERFORMANCE TESTING FIXTURES
NOTE: This Related Information is not an official part of SEMI F74. The recommendation in this Related
Information are optional and are not required to conform to this standard.
TEST SAMPLE
Figure R1-1
Conventional Performance Testing Sample