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SEMI S13-0305 © SEMI 1998, 2005 5 NOTE 11: Pictographs or symbols may also be adapted to help comm unicate safety information in installation instructions, operation and maintenance manuals, and o ther similar written co…

SEMI S13-0305 © SEMI 1998, 2005 4

 Decontamination and decommissioning

NOTE 7: Some documentation criteria regarding Safety interlock systems are given in Appendix 1 of this guideline at the time

of publication.

6.5 Where contractually agreed upon, it is recommended that the documents provided to the equipment user should

be provided in the primary languages of the location in which the equipment is to be used.

NOTE 8: Where required by law, the documents provided to the equipment user must be provided in the primary languages of

the location in which the equipment is to be used.

6.6 Each document should identify the language(s) in which it was originally written.

6.7 Procedures needed to maintain the effectiveness of safety design features or devices should be described in the

documents provided to the equipment user.

6.8 The documentation provided to the user may state that the user is responsible for analyzing and controlling the

risks of work not described in the documentation.

6.9 The Equipment supplier should provide information in the documents provided to the equipment user about

how to check if the documents are applicable for the particular model.

6.9.1 Each document provided to the equipment user (e.g., operations, maintenance, installation, drawings, sub-

systems) should include at least a reference to a list of all documents that are necessary to compose a complete set of

documents for the equipment model. Reference may be made to a website containing the list.

7 Hazards Inherent in Equipment

7.1 The hazards inherent in equipment identified as part of the SEMI S2 evaluation should be described in the

documents provided to the equipment user.

7.2 The summary should include the location and the type of each hazard in a safety section of the documents

provided to the equipment user.

7.3 The documents provided to the equipment user should include a list of hazardous materials (e.g., lubricants,

cleaners, and coolants) required for maintenance, ancillary equipment or peripheral operations.

NOTE 9: See §11 for discussion of MSDSs.

7.4 Hazards related to by-products and effluents of supplier-characterized baseline processes should be described in

the documents provided to the equipment user.

7.5 The documents provided to the equipment user should describe the safety measures in the equipment that

mitigate risk in the event of fire, explosion or chemical leakage within the equipment or of earthquake.

8 Hazardous Energy Control Procedures

8.1 Any source of hazardous energy (such as electrical, chemical, thermal, mechanical, radiation, pneumatic or

hydraulic energy) that exists in equipment and which may pose a risk to workers maintaining or servicing the

equipment should be described in the documents provided to the equipment user along with the procedures for

isolation (“lockout/tagout”) and control of each of the hazardous energies.

NOTE 10: The procedures must allow compliance with requirements at the locations of use. In the USA, the procedure must be

consistent with 29 CFR1910.147.

9 Hazard Alerts

9.1 The equipment supplier should explain, in the documents provided to the equipment user, the meaning of

hazard alerts. Examples of hazard alerts include: visual alerts, auditory alarms, safety labels, status indicators; or

hazard alert systems integral with the equipment’s operating system (e.g., displayed through the video display).

9.2 Descriptions of the label locations and, if appropriate, additional safety information relating to the hazards they

describe should also be provided.

9.3 Pictographs or symbols may be used to represent the hazard alerts in the document provided to the equipment

user.

SEMI S13-0305 © SEMI 1998, 2005 5

NOTE 11: Pictographs or symbols may also be adapted to help communicate safety information in installation instructions,

operation and maintenance manuals, and other similar written communication relating to a product.

NOTE 12: If pictographs or symbols are used instead of text, then it is recommended that the documentation include

explanations of the pictographs or symbols. This recommendation does not apply if the pictographs are used with text messages,

as is the common practice in Hazard Alert Labels that conform to SEMI S1.

10 Hazards Inherent in Tasks

10.1 In the documents provided to the equipment user, hazards inherent in each task should be indicated using the

signal words “Danger,” “Warning,” or “Caution”, as described in SEMI S1. The signal word and the explanation of

the hazard should be highlighted in the documentation (e.g., by enlarged lettering or by being enclosed in a box).

The equipment supplier should include the definitions of “Danger,” “Warning,” and “Caution” that are provided in

SEMI S1 in the documents provided to the equipment user if those terms are used.

10.2 Specific instructions should be provided for routine Type 4 energized electrical work tasks (as defined in

SEMI S2), excluding troubleshooting. General procedures for troubleshooting, including Type 4 work, should be

provided.

NOTE 13: SEMI S2 provides guidance that suppliers should design the equipment to minimize the need to calibrate, modify,

repair, test, adjust, or maintain equipment while it is energized, and to minimize work that must be performed on components

near exposed energized circuits. SEMI S2 also states that the supplier should move as many tasks as practical from category

Type 4 to Types 1, 2, or 3.

NOTE 14: NFPA70E describes the identification of the Flash Protection Boundary in the USA.

10.3 Specific instruction may be provided for the unjamming task.

NOTE 15: “Unjamming” (also called “jam clearing”) is considered to be a service task.

10.4 Each maintenance and service task should include a list of the materials required for the task.

11 Material Safety Data Sheet (MSDS)

11.1 The equipment supplier should provide MSDSs covering those chemical substances which are inherent in, or

shipped with, the equipment.

11.2 For those chemical substances which are used for processing, maintenance, or service of equipment, but are

not provided in or with the equipment, the documents provided to the equipment user should state that the user must

obtain the MSDSs from their chemical suppliers, rather than from the equipment supplier. The user is responsible

for obtaining process related MSDSs and should contact their suppliers to obtain them.

NOTE 16: The equipment user may request, from the equipment supplier, the list of chemicals prepared in accordance with the

chemical section in SEMI S2.

NOTE 17: International Labor Convention No. 170 and ANSI Z400.1 call for MSDSs to describe:

 Product and company identification

 Composition

 Hazard identification

 First aid measures

 Fire fighting measures

 Accidental release measure

 Handling and storage

 Exposure controls / Personal protection

 Physical and chemical properties

 Stability and reactivity

 Toxicological information

 Ecological information

 Disposal considerations

 Transport information

 Regulatory information

 Other information

12 Personal Protective Equipment (PPE)

12.1 The documents provided to the equipment user should clarify which tasks require personal protective

equipment and which kind of PPE (e.g., goggles, aprons, gloves, masks, safety shoes, helmets) is needed for each

task.

12.2 The documents should identify the characteristics, such as being shatterproof or acid resistant, of the personal

protective equipment to be used.

12.3 The equipment supplier should state in the documents provided to the equipment user that PPE should be used

in accordance with the instructions provided by the PPE supplier, except where additional instructions by the

equipment supplier are required.

13 Equipment Inspection, Consumables, and Maintenance

13.1 The documents provided to the equipment user should describe the recommended methods of periodic

inspections including the frequency of each inspection.

13.1.1 Periodic inspections include periodic situations that have long intervals between procedures (e.g., changing

memory batteries in computers, replacing UPS batteries, replacing sensor modules for detection systems).

13.2 The equipment supplier should provide a list of consumable parts and materials, with their replacement

intervals, maintenance methods, and part/material number in the documents provided to the equipment user.

13.3 The equipment supplier should provide information on the specific tools necessary for inspections and

maintenance in the documents provided to the equipment user.

14 Training Requirement

14.1 The equipment supplier should describe the training required for safe operations and maintenance in the

documents provided to the equipment user.

14.2 Documents provided to the equipment user should define what level of training is considered, by the supplier,

to be sufficient.

15 Emergency Contact and Response

15.1 The documents provided to the equipment user should include information on how to contact the equipment

supplier in case of EHS issues related to the equipment.

15.2 The documents provided to the equipment user should include an explanation of how the user may keep the

supplier notified of the appropriate user contact information for EHS related issues and notified of what supplier

equipment models are in use at which user locations.

15.3 When supplier contact information changes for EHS issues or the supplier wishes to communicate regarding

EHS issues, the supplier should notify equipment users through their most recently provided EHS contacts. Which

contacts are notified may depend on which equipment models are of concern.