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DUT Flow Standard Flexible Gas Line V1 V2 R1 F1 P P1 P DUT Flow Standard Regulator Filter Isolation Valve Pressure Transducer Device Under Test Flow Standard Figure 2 Test Setup SEMI E80-0299 © SEMI 1999, 2004 7
16 Illustrations
Flow
Flow
Flow
Flow
12
3
45
HBD VIU
VFD
HED VID
VFU
HUD
HBD = Horizontal Base Down
VIU = Vertical Inlet Up
VFD = Veritical Flow Down
HED = Horizontal Either side Down
VID = Vertical Inlet Down
VFU = Vertical Flow Up
HUD = Horizontal Upside Down
*
For this test method the DUT
must be mounted ±1
O
in all
axes
*****
Figure 1
MFC Mounting Attitudes
SEMI E80-0299 © SEMI 1999, 2004 6
DUT
Flow
Standard
Flexible Gas Line
V1 V2R1 F1
P
P1
P
DUT
Flow
Standard
Regulator
Filter
Isolation Valve
Pressure Transducer
Device Under Test
Flow Standard
Figure 2
Test Setup
SEMI E80-0299 © SEMI 1999, 2004 7
17 Related Documents
17.1 ANSI Standards
1
ANSI C39.5 Safety Requirements for Electrical and
Electronic Measuring and Controlling Instrumentation
ANSI C42.100 Dictionary of Electrical and
Electronics Terms
17.2 ISA Standard
2
ISA S51.1 Process Instrumentation Terminology
17.3 ISO Standard
3
ISO 10012-1 Quality Assurance Requirements for
Measuring Equipment
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1
American National Standards Institute, Headquarters: 1819 L
Street, NW, Washington, DC 20036, USA. Telephone: 202.293.8020;
Fax: 202.293.9287, New York Office: 11 West 42nd Street, New
York, NY 10036, USA. Telephone: 212.642.4900; Fax:
212.398.0023, Website: www.ansi.org
2 The Instrumentation, Systems, and Automation Society, 67
Alexander Drive, PO Box 12277, Research Triangle Park, NC 27709,
Telephone: 919-549-8411, Fax: 919-549-8288, http://www.isa.org
3 International Organization for Standardization (ISO), 1, rue de
Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland,
Telephone +41 22 749 01 11; Fax +41 22 733 34 30,
http://www.iso.org/
SEMI E80-0299 © SEMI 1999, 2004 8
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