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Dot Central Area of Cell 45 20 25 Rdot (min) = 45 Rcentral area (min) = 25 Rdot misalign (max) = 20 100 100 Figure 4 Minimum Size Dot with Maximum Dot Mi salignments (all Dimensions in µm) 6.3 Cont ent of t he Matrix Co …

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Cell
Cell Center
Row
Column
C
L
C
L
S
S
S = 125 or 150 um, center to center
Figure 2
Data Matrix Cell Spacing
Figure 3
Border Rows and Columns: ECC200
SEMI T2-0298 © SEMI 1993, 2004 4
Dot
Central Area of Cell
45
20
25
Rdot (min) = 45
Rcentral area (min) = 25
Rdot misalign (max) = 20
100
100
Figure 4
Minimum Size Dot with Maximum Dot Misalignments (all Dimensions in µm)
6.3 Content of the Matrix Code Symbol
6.3.1 Each square matrix code symbol shall contain between 10 and 23 message characters encoded in accordance
with AIM ISS Data Matrix, including the characters associated with error checking and correcting (ECC200), as
also defined in AIM ISS Data Matrix.
6.3.2 The message characters may include any of those designated as “mostly uppercase” in Table 5 and Annex J of
AIM ISS - Data Matrix. The first 10 message characters shall contain two elements:
a vendor-assigned 8-character wafer identification code, followed by
a 2-character vendor identification code as defined in SEMI AUX001.
6.3.2.1 The remaining message characters, if any, shall contain information as agreed between the vendor and user.
6.3.3 The total number of message characters available depends on the row/column count and on the encoded
character set (see Table 2).
6.4 Location of the Matrix Code Symbol
6.4.1 With the wafer positioned front surface up and with the primary fiducial toward the operator, the reference
point of the matrix code symbol shall be located as specified in Table 3.
6.4.2 The square matrix code symbol used on 125 to 200 mm diameter wafers shall be oriented with the border
columns parallel with the primary fiducial bisector and the border rows perpendicular to the primary fiducial
bisector. The secondary border column shall be toward the primary fiducial bisector, and the primary border row
shall be toward the edge of the wafer.
6.4.3 The nominal position of the reference point of the matrix code symbol is 1 mm to the right of the closest
alphanumeric code field. A 3º skew toward the alphanumeric field, which is the maximum skew allowed by SEMI
M12 and SEMI M13, does not cause the matrix code symbol to impinge on the alphanumeric code fields, even if the
symbol is placed only 15.5 mm from the primary fiducial bi-sector. Consequently, this matrix code symbol position
permits the simultaneous use of front surface alphanumeric marking as specified in SEMI M12 or M13, on 125 to
200 mm wafers with either flatted or notched primary fiducials.
6.4.4 Because the matrix code symbol is located in the same place with respect to the primary fiducial bisector on
all wafer diameters from 125 to 200 mm, the use of both marking and reading equipment is simplified.
SEMI T2-0298 © SEMI 1993, 2004 5
6.4.5 The distance from the edge of the data matrix code symbol to the diameter perpendicular to the primary
fiducial bisector varies according to the actual size of the wafer and the placement of the symbol within its tolerance
range. Minimum distances from the edge of the code symbol to the wafer center-line are given in Table 4 for both
16 × 16, 125 µm and 20 × 20, 150 µm matrix code symbols.
Table 3 Location of Matrix Code Symbol — Wafer Polished Side Up, Primary Fiducial toward the Operator
Type of Array Wafer Fiducial Reference Point Cell Location of Symbol Reference Point
Square (used on 125, 150,
and 200 mm wafers)
Flat Common cell of primary
border row and secondary
border column
16.0 ± 0.5 mm to the right of the fiducial bisection,
and 2.5 ± 0.5 mm above the edge of the flat
Notch 160 ± 0.5 mm to the right of the fiducial bisector, and
5.3 ± 0.5 mm above the notch pin center
Table 4 Minimum Distances from Edge of Matrix Code Symbol to the Wafer Centerline
SEMI Standard M1.7 M1.8 M1.12 M1.13 M1.10 M1.9
Nominal Wafer Diameter, mm 125 150 125 150 200 125 150 200
Flat or Notch Flat Flat Flat Flat Flat Notch Notch Notch
Distance from 20 × 20 Matrix with 150
µm Cell Spacing, mm
52.17 62.76 52.33 64.73 89.28 53.98 66.48 91.48
Distance from 16 × 16 Matrix with 125
µm Cell Spacing, mm
53.14 63.73 53.30 65.74 90.25 54.95 67.45 92.45
SEMI T2-0298 © SEMI 1993, 2004 6