semi合集-English.pdf - 第4560页

SEMI D28-1101 © SEMI 2001 4 Table 1 Substrate Edge Length, Interface Dime nsions, and Toleranc es Interfac e Dim ensio ns and Tolerances[ mm] Substr ate Edge Length [ mm] X1 max. X2 max. X3 max. Y1 max. Y2 max. Y3 max. Z…

SEMI D28-1101 © SEMI 20013

Exclusion

Zone

Vertical

Datum Plane

Figure 1B

Front View of Tool port

SEMI D28-1101 © SEMI 2001 4

Table 1 Substrate Edge Length, Interface Dimensions, and Tolerances

Interface Dimensions and Tolerances[mm]

Substrate Edge

Length [mm]

max.

± 2 mm

max.

550 × 650

925 450 600 500 440 130 900, 950 1000 150 250

600 × 720

980 500 600 535 475 130 900, 1000 1000 150 250

680 × 880

1100 560 600 615 565 130

1000,

1100

1000 150 300

730 × 920

1150 600 600 630 590 130

1000,

1100

1000 150 300

800 × 950

1200 660 600 650 605 130

1000,

1100

1000 150 300

NOTE 1: Two values are specified for Z1, either value can be chosen.

8 Related Documents

8.1 SEMI Standards

SEMI D5 — Standard Size for Flat Panel Display

Substrates

SEMI D11 — Specification for Flat Panel Display

Glass Substrate Cassettes

SEMI D16 — Specification for Mechanical Interface

Between Flat Panel Display Material Handling System

and Tool Port

8.2 Semiconductor Equipment Association of Japan

(SEAJ)

Semiconductor Equipment Association of Japan (SEAJ)

Liquid Crystal Display Manufacturing Equipment

Standardization Guideline – for Glass Substrate Size

800 × 950 (SEAJ/P-S3005-98, SEAJ/P-S3006-98), June

1998

8.3 SEMI PCS-FPD

SEMI PCS-FPD — Production Cost Saving (PCS)

Forum – FPD Phase III Report, June 1999

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

1 Semiconductor Equipment Association of Japan, 7-10, Shinjuku 1-

chome, Shunjuku-ku, Tokyo, 160-0022 Japan, tel:+81-3-3353-7589,

fax:+81-3-3353-7970, http://www.seaj.or.jp

2 SEMI PCS-FPD  Production Cost Saving (PCS) Forum – FPD

Phase III Report, June 1999, Semiconductor Equipment and

Materials International, 3081 Zanker Road , San Jose, CA 95134-

2127 U.S.A.tel.+1-408-943-6900 fax:+1-408-428-9600

http://www.semi.org

product data sheets, and other relevant literature with

respect to any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

rights. With publication of this standard, SEMI takes no

position in respect to the validity of any patent rights or

copyrights asserted in connection with any item

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk or infringement of

such rights, are entirely their own responsibility.

SEMI D28-1101 © SEMI 20015

RELATED INFORMATION 1

ASSUMED DIMENSIONS FOR SUBSTRATE EDGE AND CASSETTE

SIZE

NOTE: This related information is not an official part of SEMI D28 and was derived from work of the originating

committee. This related information was approved for publication by full letter ballot procedures on August 3,

2001.

Table R1-1 Cassette Size

Substrate Edge

length [mm]

Cassette size [mm]

Width×Length×Height

550 × 650

600 × 720

680 × 880

730 × 920

800 × 950

591 × 682 × 524

642 × 755 × 695

736 × 923 × 706

792 × 978 × 770

870 × 1010 × 810

NOTE 1: 550 × 650, 600 × 720, 680 × 880, and 730 × 920 are the

sizes which are actually adopted at the manufacturing sites. As for

800 × 950, please refer to SEMI PCS-FPD-Phase III Report.

NOTE 2: Cassette sizes in Table R1-1 were used only hypothetically

as assumption to prescribe dimensions in Table 1.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer's instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.