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SEMI E109-0305 © SEMI 2001, 2005 36 15.3 Slot M ap Verification 15.3.1 Table 16 defin es the methods for verificat ion of the Ret icle Pod Slot Map. Som e user’s factory operati ons may not req u ire strict manageme nt o…

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SEMI E109-0305 © SEMI 2001, 2005 35
Verification
Method Desired
Host Actions before
Load
Equipment Action When Reticle Pod Is
Loaded
Host Actions after Load
Verification Failed: The equipment initiates
Transition 12 of the reticle pod state model
then Transition 29 and the reticle pod object
created via the bind or ReticleTransferJob
service is destroyed. The equipment also
initiates Transition 3 of the reticle pod state
model and a reticle pod object with the PodID
equal to the one determined by the PodID
read is instantiated. The reticle pod shall not
be opened by the equipment until and unless
the ProceedWithPod service is received from
the host.
Verification Failed: The host uses
either the CancelPod service to force
the reticle pod to be readied for
unload, or indicates to the production
equipment that it may proceed with
the unexpected reticle pod, by
sending the ProceedWithPod service.
In both cases the PodID specified in
the service is equal to the one
determined by the PodID read.
PodNotification
Service: The host
executes the
PodNotification
service to inform the
equipment of the
future arrival of a pod
to an unspecified
reticle pod load port.
PodNotification Service: The production
equipment reads the PodID from the reticle
pod, compares it to the PodID supplied with a
PodNotification service.
Verification Passed: Transition 6 of the
Reticle Pod State Model occurs. The
production equipment proceeds with
processing.
Verification Passed: None.
Verification Failed: Not Applicable; because
there is no association between a reticle pod
load port and a reticle pod, equipment based
verification failure is not possible. If a reticle
pod that has not been instantiated arrives at a
load port, the equipment shall consider this as
host based verification.
Verification Failed: Not Applicable,
because there is no association
between a reticle pod load port and a
reticle pod, equipment based
verification failed is not possible. If
a reticle pod that has not been
instantiated arrives at a reticle pod
load port, the equipment shall
consider this as host based
verification.” The host will respond
with either a ProceedWithPod or a
CancelPod Service. (See Host Based
verification method).
Host Based None required, the
host may issue a
ReserveAtPort service.
The production equipment reads the PodID
and reports it to the host in an event report.
Following PodID read the equipment initiates
Transition 3 of the Reticle Pod State Model
and a reticle pod object with the PodID equal
to the one determined by the PodID read is
instantiated. The reticle pod shall not be
opened the equipment until and unless the
ProceedWithPod service is received from the
host.
Verification Passed: The host sends
a ProceedWithPod service indicating
the verification passed.
Verification Failed: The host uses
the CancelPod or CancelPodAtPort
service to force the equipment to
prepare the pod for unload
.
SEMI E109-0305 © SEMI 2001, 2005 36
15.3 Slot Map Verification
15.3.1 Table 16 defines the methods for verification of the Reticle Pod Slot Map. Some user’s factory operations
may not require strict management of the slot map. In this case the user may use the host based verification method.
Table 16 Slot Map Verification Methods
Verification
Method Desired
Host Actions Before
Verification
Equipment Action When Pod
is Loaded
Host Actions After Load
Production
Equipment
Based
The host provides a
Slot Map with the
Bind,
PodNotification,
ReticleTransferJob,
or the
ProceedWithPod
service.
The production equipment
checks the
reticle pod slot
map and compares it to the
slot map supplied by the
host. Either Transition 14, or
15 of the Pod State Model
occurs.
Verification Passed: None, the production equipment
proceeds with the pod.
Verification Failed: If the host decides to cancel
processing, the host issues the CancelPod service. If the
host decides to continue processing, the host issues the
ProceedWithPod service.
Host Based None. The production equipment
checks the reticle
pod slot
map and reports it to the host
in an event report. The host
has the responsibility for
verifying the slot map.
Verification Passed: The host sends a ProceedWithPod
indicating the verification passed.
Verification Failed: If the host decides to cancel
processing, the host issues the CancelPod service. If the
host decides to continue processing, the host issues the
ProceedWithPod service.
15.4 ReticleID Verification
15.4.1 Table 17 below defines the Optional methods for ReticleID verification.
Table 17 ReticleID Verification Methods
Verification
Method
Desired
Host Actions before
Load
Equipment Action When
Reticle Pod Is Loaded
Equipment Action when Reticle is
removed from cassette
Host Actions after Load
Production
Equipment
Based
Bind,
PodNotification,
ReticleTransferJob,
or MoveReticle
Service prior to Pod
Arrival: The host
executes a Bind,
PodNotification or
ReticleTransferJob
service that includes
the ContentMap and
the ReticleIDs.
Bind, PodNotification,
ReticleTransferJob
Service, or MoveReticle
Service prior to Pod
Arrival: Transition 8 of
the Reticle State Model
Occurs (from RETICLE
NOT PRESENT to
WAITING FOR
QUALIFICATION)
(E.Ch). The equipment
must verify the ReticleID
successfully.
Transition 9 of the Reticle State
Model occurs. The ReticleID is
read.
Verification Passed: The
equipment may proceed with
reticle qualification.
Verification Passed: None.
SEMI E109-0305 © SEMI 2001, 2005 37
Verification
Method
Desired
Host Actions before
Load
Equipment Action When
Reticle Pod Is Loaded
Equipment Action when Reticle is
removed from cassette
Host Actions after Load
Verification Failed: The
equipment initiates Transition
12, then Transition 22 of the
reticle state model the reticle
object created via the service is
destroyed. For the reticle object
created via the reticle ID read
(the “unexpected reticle”) the
reticle is instantiated via
transition 7 into the RETICLE
WAITING FOR HOST state.
Verification Failed: The
host uses either the
RejectReticle service to
indicate that the equipment
should not use the reticle for
processing, or indicates to
the production equipment
that it may proceed with the
unexpected reticle, by
sending the
ProceedWithReticle service.
In both cases the ReticleID
specified in the service is
equal to the one determined
by the ReticleID read.
MoveReticle Service
after Pod Arrival
prior to reticle
instantiation: The
host executes a
MoveReticle
service.
Transition 4 of the
Reticle State Model
Occurs (from no state to
WAITING
QUALIFICATION).
Transition 9 of the Reticle State
Model occurs. The ReticleID is
read.
Verification Passed: The
equipment may proceed with
reticle qualification.
Verification Passed: None.
Verification Failed: The
equipment initiates Transition
12, then Transition 22 of the
reticle state model the reticle
object created via the service is
destroyed. For the reticle object
created via the reticle ID read
(the “unexpected reticle”) the
reticle is instantiated via
Transition 7 into the RETICLE
WAITING FOR HOST state.
Verification Failed: The
host uses either the
RejectReticle service to
indicate that the equipment
should not use the reticle for
processing, or indicates to
the production equipment
that it may proceed with the
unexpected reticle, by
sending the
ProceedWithReticle service.
In both cases the ReticleID
specified in the service is
equal to the one determined
by the ReticleID read.
MoveReticle after
pod arrival and
reticle instantiation
via pod tag read:
None
Equipment reads the pod
tag and instantiates the
reticle object via
Transition 4.
Transition 9 of the Reticle State
Model occurs. The ReticleID is
read.
Verification Passed: The
equipment may proceed with
reticle qualification.
Verification Passed: None.