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SEMI E123-0703 © SEMI 2003 5 6.4.20 STOPP ING (PROCESSING ACTIVE Sub-State) — The handler has c ompleted a Process Program or has been instructed to stop processing and shall do so at th e next opportunity. All necessary…

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6.4 Description of Handler Processing States
6.4.1 ABORTED — All activity is suspended as a
result of an ABORT command. Any alarm and abort
conditions must be cleared and verified by an operator
before exit from this state.
6.4.2 ABORTING (PROCESSING ACTIVE Sub-State)
— The handler has received an ABORT command. All
activity is suspended. The handler is taking appropriate
action to bring itself and material to a “safe” state
where possible. Unit or Lot data may be invalid or not
available.
6.4.3 ALARM PAUSED (PAUSE Sub-State) — An
alarm has occurred in the PROCESS or PROCESS
PAUSE states, and the handler is waiting for the alarm
to be cleared.
6.4.4 CHECKING (PROCESS PAUSED Sub-State) —
The handler verifies that updates made to the process
program are valid (i.e., possible errors induced via an
operator during the pause).
6.4.5 EXECUTING (PROCESS Sub-State) — The
handler is processing material automatically and can
continue to do so without external intervention. This
state may include interaction with the host or operator.
6.4.6 IDLE — Awaiting a command. IDLE is free of
ALARMS and error conditions.
6.4.7 IDLE with ALARMS — An alarm has occurred in
the IDLE state, and the handler is waiting for all alarms
to be cleared.
6.4.8 INIT — Handler initialization is occurring.
6.4.9 LOADING (EXECUTING Sub-State) — This is
the state the next unit or units are transferred from the
input media or input buffers to the process site(s) and/or
removed from the process site(s) to sort categories.
6.4.10 PAUSE (PROCESSING ACTIVE Sub-State) —
The PROCESS state will be suspended at the
completion of the current unit or next opportunity.
Actions to put the handler in a safe state are performed.
The handler is awaiting a command (RESUME, STOP,
or ABORT) or for alarm(s) to be cleared.
6.4.11 PAUSED (PROCESS PAUSE Sub-State) — The
PROCESS state has been suspended, and the handler is
waiting for a command (RESUME, STOP, or ABORT).
In this state, the operator may correct error conditions
that do not affect the current Process Program selection.
One of the possible corrective actions is for the operator
to manually align the units being processed.
6.4.12 PAUSING (PROCESS PAUSE Sub-State) —
The PROCESS state will be suspended at the
completion of the current unit or next opportunity. The
handler cannot transition to PAUSED state until the
current unit is completed and the handler is in a “safe
state”.
6.4.13 AWAITING COMMAND (WORKING Sub-
State) — Unit is moved to process-site (e.g., for
electrical test, to insert into contactor). Actuator
piston(s) is extended to the alignment test site(s) if
applicable. If contactors must be “closed” before
processing can occur, then contactors are in the closed
condition. In this state, handler has completed all
loading and is awaiting the next command from Host to
signal process complete.
6.4.14 CONTACTOR OPEN (WORKING Sub-State) —
Unit process is complete and host issued a BREAK-
CONTACT or RECONTACT command. (e.g. Actuator
piston(s) is retracted from the alignment test site(s),
contactors are open.) If RECONTACT command was
issued, unit will return to alignment for a step and
repeat. Otherwise Handler will remain in this state until
a MAKE-CONTACT is received to resume processing.
Commands such as STOP, ABORT and PAUSE are
still valid and follow the respective required transitions.
6.4.15 PRELOADING (PROCESS Sub-State) —
Handler has received a PRELOAD-UNITS command to
begin preloading units to soak chambers or some
equivalent process buffers. Units should not be
transferred to process sites in this state. During this
time, test equipment may also go through its internal
setup process in parallel, such as testhead calibrations.
If handler does not implement any process buffers, the
remote command from Host must still be accepted and
state transition followed, in which case handler will
transition back to READY state immediately with
PreloadComplete event sent to Host.
6.4.16 PROCESS (PROCESS Sub-State) — This state
is the parent of those sub-states that refer to the
preparation and execution of a process program.
6.4.17 PROCESS PAUSE (PAUSE Sub-State) — The
handler is free of alarm conditions in the PAUSE state.
6.4.18 READY (PROCESS Sub-State) — The handler
is ready to begin processing and is awaiting a START
or PRELOAD-UNITS command from the operator or
host.
6.4.19 SETTING UP (PROCESS Sub-State) — The
handler is satisfying conditions so that processing can
begin. This includes the receipt of any process
programs, the material to be processed, and machine-
specific calibration. While in this state, the handler can
be single-stepped through each process in order for the
operator to ensure that the handler is moving the unit
correctly.
SEMI E123-0703 © SEMI 2003 5
6.4.20 STOPPING (PROCESSING ACTIVE Sub-State) — The handler has completed a Process Program or has
been instructed to stop processing and shall do so at the next opportunity. All necessary cleanup is completed within
this state with regard to material, data, control system, etc. Data is preserved. Any error condition is cleared before
exiting from this state.
6.4.21 WORKING (EXECUTING Sub-State) — The handler is processing a specific unit.
6.5 HSEM Processing State Transitions Table
6.5.1 Unless specified, if a command is stated as a possible trigger for a state transition, it is implied that the
command or its equivalent can come from the host or operator or any other command interface provided by the
equipment, for example a GPIB command interface.
Table 1 Processing State Transitions Table
# Current State Trigger New State Actions Comments
1 INIT All handler initialization is
complete with no alarms
or error conditions.
IDLE None None
2 IDLE A Process Program is
selected.
SETTING UP Handler-dependent Commit has been made to
setup.
3 SETTING UP All setup activity has
completed, and the
handler is ready to receive
a START command.
READY The handler is waiting for a
START command.
The selected Process
Program is available for
execution, and material is
present at the input port.
4 READY Handler receives a
PRELOAD-UNITS
command.
PRELOADING Handler starts preloading units to
temperature soak chambers or
some process buffers, where some
type of pre-work can be applied
to units before processing. No
units should be transferred to
process sites at this point.
For handlers that do not
support process buffers of
any type, this will just be a
pass-thru state. Transition
#5 is taken immediately.
5 PRELOADING Handler completes
preloading of units to its
process buffers, e.g.
unit(s) is ready to be
transferred to process
site(s) from buffers.
READY PreloadComplete collection event
reported to Host.
6 READY The handler receives a
START command.
LOADING Transfers the next unit to the
process-site.
LOAD is an
EXECUTING sub-state.
7 LOADING A unit(s) is loading to the
process –site(s) or been
removed from process
site(s).
AWAITING
COMMAND
The actuator(s) is extended to the
alignment process site(s) if
applicable. If unit(s) is loaded to
process site(s), UnitsReady event
is sent to Host with loaded status
of each process site.
None
8 WORKING The processing of the
current unit(s) completes
normally and handler
received a BIN-UNITS
command.
LOADING This unit(s) is transferred from
the process sites specified in the
remote command and next unit(s)
is loaded to the now empty
process site(s).
None
9 AWAITING
COMMAND
The processing of the
current unit(s) completed.
The handler has received a
RECONTACT or
BREAK-CONTACT
command.
CONTACTOR
OPEN
The actuator(s) is retracted from
the alignment test site(s). If
RECONTACT command is
received, handler will attempt to
contact unit(s) again.
None
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# Current State Trigger New State Actions Comments
10 CONTACTOR
OPEN
The handler has received a
MAKE-CONTACT
command or continuation
of RECONTACT and
handler has completed
contacting of the unit(s).
AWAITING
COMMAND
The actuator(s) is extended to the
alignment process site(s).
UnitsReady event is sent to Host
with loaded status of each site.
None
11 LOADING The handler completes
unload of last unit and
there are no more unit(s)
available for loading.
READY The handler completes sorting the
last unit(s). LastUnitCompleted
collection event reported to Host.
None
12 PROCESS The handler has received a
STOP command.
STOPPING The handler completes the current
unit in the WORKING state and
unloads it.
The handler begins its
cleanup procedure.
13 STOPPING The handler cleanup is
complete, and the handler
is free of alarms.
IDLE None None
14 PROCESS An alarm occurs. ALARM
PAUSED
PROCESS activity is suspended,
and the handler is waiting for all
alarms to be cleared.
ALARM PAUSED is a
PAUSE sub-state.
15 PROCESS The handler has received a
PAUSE command.
PAUSING The PROCESS state shall be
suspended at the completion of
the current unit. Any necessary
actions to put the handler in a safe
state are performed.
PAUSING is a PAUSE
sub-state.
16 PAUSING The handler has
completed Processing the
Current unit in the
WORKING state and
achieved a safe condition.
PAUSED The handler is waiting for a
command (RESUME, STOP, or
ABORT).
None
17 PROCESS
PAUSE
The handler has received a
RESUME command.
STATE based on
conditional table.
Return to previous state or state
per process resume conditions.
None
18 PAUSED A RESUME command
was received.
CHECKING Validation of the Process
Program Parameters.
None
19 CHECKING Error was detected in new
parameter setting being
validated in the
CHECKING state.
PAUSED None None
20 CHECKING Parameter checking
completes successfully.
STATE based on
conditional table.
Return to previous state or state
per process resume conditions.
None
21 PROCESS
PAUSE
An alarm is set by the
handler.
ALARM
PAUSED
The handler waits for all alarms
to be cleared or for a STOP or
ABORT command.
None
22 ALARM
PAUSED
All alarms are cleared. PAUSED The handler is waiting for a
command (RESUME, STOP, or
ABORT).
None
23 PAUSE The handler has received a
STOP command.
STOPPING The handler proceeds with
cleanup.
Data is preserved and is
valid.
24 STOPPING The handler has received
an ABORT command.
ABORTING Any unsafe condition is resolved,
if possible.
Data may be invalid or
unavailable.
25 PAUSE The handler has received
an ABORT command.
ABORTING Any unsafe condition is resolved,
if possible.
Data may be invalid or
unavailable.
26 PROCESS The handler has received
an ABORT command
from operator, host, or
self-generated.
ABORTING The handler is put in a “safe”
state.
Unit or lot data may be
invalid or not available.