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SEMI E109-0305 © SEMI 2001, 2005 14 10.4.3.1.1.1.2 AVAILABLE — This is a substate of NOT ACCESSED and is active wh en the reticle pod has been received by the equipm ent but not opened. 10.4.3.1.1.2 IN ACCESS — This is a…

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SEMI E109-0305 © SEMI 2001, 2005 13
Reticle pod properties that are required shall be actively updated by the equipment.
10.3.6 Reticle Pod Location
10.3.6.1 A reticle pod location, signified by LocationID, is used for tracking. A reticle pod location is any physical
area that is capable of holding a pod. It is not intended to represent entire mechanisms, which may have a variety of
other properties of interest, but only that portion where a reticle pod may rest.
10.3.7 Reticle Pod Location Examples
10.3.7.1 Reticle Pod Locations include reticle pod
load port locations, internal pod buffer locations, as well as
grippers, conveyors, and elevators that are used internally for moving the pod from one fixed location to another.
10.3.8 Slot Map Relation to Content Map The slot map attribute and content map attribute hold similar
information. The purpose of these attributes differs. The slot map is provided so that the equipment or host can
quickly verify that the pod has reticles correctly placed in the correct slot (as provided by the host). This verification
is based on a slot map read. The content map is provided so that the host can communicate the specific ReticleID in
a specific slot as delivered and that the equipment can communicate the specific ReticleID that it places in a specific
slot.
10.3.9 Reticle Pod Location Naming All locations shall be assigned a unique name. Information about the
reticle pod location can be obtained by querying the Pod Object for the ReticlePodLocationID or by asking the
equipment for the PodLocationMatrix. The text form of the ReticlePodLocationID shall be descriptive of the
location.
10.3.10 Capacity
10.3.10.1 The Capacity parameter can be sent to the equipment by the host in the PodNotification, Bind,
ReticleTransferJob, or the ProceedWithPod service. However the equipment shall update this
10.3.10.2 Parameter based on the results of the read slot map operation. Furthermore, the equipment shall update
the parameter based on it’s own actions. If the equipment does not know the value of Capacity prior to instantiation,
the equipment shall instantiate the reticle pod object with the value of one for Capacity.
10.3.11 The ReticlePodAccessing
10.3.11.1 Status is used by the host to know whether or not the reticle pod owned by the equipment can be
transferred from the equipment.
10.3.11.2 Enumerated values of ReticlePodAccessing-Status correspond to the substates of
ReticlePodAccessingStatus (see Figure 2).
10.4 Reticle Pod State Model
10.4.1 The purpose of the Reticle Pod State Model is to define the host’s view of a reticle pod. The equipment shall
maintain a separate and independent state model for each reticle pod in/at the equipment.
10.4.2 Reticle Pod State Model Diagram
10.4.3 Reticle Pod State Definitions
10.4.3.1 RETICLE POD — The RETICLE POD state has four ANDed (orthogonal) substates: RETICLE POD ID
STATUS, RETICLE POD SLOT MAP STATUS, RETICLE POD ACCESSING STATUS, AND RETICLE POD
CLAMPING STATUS.
10.4.3.1.1 RETICLE POD ACCESSING STATUS — This is a substate of RETICLE POD and indicates the current
accessing status of the pod. It has three substates, NOT ACCESSED, IN ACCESS, and COMPLETE. The initial
default entry substate is NOT ACCESSED.
10.4.3.1.1.1 NOT ACCESSED — This is a substate of RETICLE POD ACCESSING STATUS and is active when
the reticle pod has not been opened. It has two substates NOT AVAILABLE and AVAILABLE.
10.4.3.1.1.1.1 NOT AVAILABLE This is a substate of NOT ACCESSED and is active when the reticle pod has been
instantiated via service but has not been received by the equipment.
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10.4.3.1.1.1.2 AVAILABLE — This is a substate of NOT ACCESSED and is active when the reticle pod has been
received by the equipment but not opened.
10.4.3.1.1.2 IN ACCESS — This is a substate of RETICLE POD ACCESSING STATUS and is active when reticle
pod has been opened once, and the reticle pod should not be unloaded from the equipment. In this state the slot map
is read and reticles may be moved in and out of the reticle pod.
10.4.3.1.1.3 COMPLETE — This is a substate of RETICLE POD ACCESSING STATUS and is active when all
known activity, as defined by the ReticleTransferJob service, for the reticle pod has completed, or the PodComplete
service has been received, and the reticle pod has been closed. The reticle pod may be unloaded from the
equipment.
RETICLE POD ID STATUS
ID NOT READ
WAITING FOR
HOST ON ID
STATUS
ID
VERIFICATION
OK
ID VERIFICATION
FAILED
2
7
6
8
9
12
3
RETICLE POD SLOT MAP
STATUS
SLOT MAP NOT
READ
WAITING FOR
HOST ON SLOT
MAP STATUS
SLOT MAP
VERIFICATION
OK
SLOT MAP
VERIFICATI
ON FAILED
13
15
14
16
RETICLE POD
A
CCESSING STATUS
18
IN
A
CCESS
NOT ACCESSED
17
RETICLE POD LOCKING
STATUS
NOT LOCKED
LOCKED
24
POD
1
4
5
29
C
10
11
NOT
A
VAILABLE
AVAILABLE
20
c
19
COMPLETE
21
23
22
RELEASED
A
ND
LOCKED
HOLD
c
26
25
27
28
30
Figure 2
Reticle Pod State Model Diagram
10.4.3.1.2 RETICLE POD LOCKING STATUS — This is a substate of RETICLE POD and indicates the current
status of the pod with respect to removability.
10.4.3.1.2.1 NOT LOCKED — This is a substate of RETICLE POD LOCKING STATUS and is active when there
are no physical or logical mechanisms that prevent removal of the reticle pod by an external entity.
10.4.3.1.2.2 LOCKED — This is a substate of RETICLE POD LOCKING STATUS and is active when there are
physical mechanisms that prevent removal of the reticle pod by an external entity. It has two substates RELEASED
AND LOCKED and HOLD.
10.4.3.1.2.2.1 RELEASED AND LOCKED — This is a substate of LOCKED and is active when the pod may be
released by the equipment.
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10.4.3.1.2.2.2 HOLD — This is a substate of LOCKED and is active when there are physical or logical mechanisms
that prevent removal of the pod engaged and the pod release flag is set to host release and the PodRelease service
has not been received.
10.4.3.1.3 RETICLE POD ID STATUS — This is a substate of RETICLE POD and indicates the current status of
the pod with respect to its identifier. It has four substates, ID NOT READ, WAITING FOR HOST ON ID
STATUS, ID VERIFICATION FAILED, ID VERIFICATION OK. The initial substate is conditional based on
information the equipment has about the reticle pod. When the PodID is provided by the Bind, ReticleTransferJob,
or the PodNotification service, the reticle pod object shall be instantiated in the ID NOT READ substate. When the
PodID is provided by the PodID read, the reticle pod shall be instantiated in the WAITING FOR HOST ON ID
STATUS substate. When the Reticle Pod is instantiated by the ProceedWithPod service, the reticle pod shall be
instantiated in the ID VERIFICATION OK substate. Finally when the reticle pod is instantiated by the CancelPod
service, the pod will be instantiated in the ID VERIFICATION FAILED substate.
10.4.3.1.3.1 ID NOT READ — This is a substate of RETICLE POD ID STATUS. This state is active whenever the
PodID has not been read by the equipment.
10.4.3.1.3.2 ID VERIFICATION FAILED — This is a substate of RETICLE POD ID STATUS and is active when
the PodID has verification by the host with the CancelPod service. This is a final state.
10.4.3.1.3.3 ID VERIFICATION OK — This is a substate of RETICLE POD ID STATUS and is active as soon as
the PodID has been accepted. The ID is determined to be accepted by either successful verification by the
equipment or the host, or by bypassing ID read because a PodID reader is not available and the BypassReadID
variable is set to true. This is a final state.
10.4.3.1.3.4 WAITING FOR HOST ON ID STATUS — This is a substate of RETICLE POD ID STATUS and is
active during the period of time when the PodID has been read by the equipment successfully or unsuccessfully and
has not yet been verified.
10.4.3.1.4 RETICLE POD SLOT MAP STATUS — This is a substate of RETICLE POD and indicates the current
status of the reticle pod with respect to its slot map. It has four substates, SLOT MAP NOT READ, WAITING
FOR HOST ON SLOT MAP STATUS, SLOT MAP VERIFICATION FAILED, SLOT MAP VERIFICATION OK.
The initial default entry sub-state is SLOT MAP NOT READ.
10.4.3.1.4.1 SLOT MAP NOT READ — This is a substate of RETICLE POD SLOT MAP STATUS and is the
default entry state. It is active when the Reticle Pod is first loaded at the equipment until the Slot Map has been read
successfully by the equipment.
10.4.3.1.4.2 SLOT MAP VERIFICATION FAIL — This is a substate of RETICLE POD SLOT MAP STATUS and
is active when the Slot Map has been read by the equipment and has failed verification by the host. This is a final
state.
10.4.3.1.4.3 SLOT MAP VERIFICATION OK — This is a substate of RETICLE POD SLOT MAP STATUS and is
active as soon as the slot map has been verified. This is a final state.
10.4.3.1.4.4 WAITING FOR HOST ON SLOT MAP STATUS — This is a substate of RETICLE POD SLOT MAP
STATUS and is active when the equipment is waiting for input from the host.