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SEMI F18-95 © SE MI 1995 2 NOTICE: These st andards do not purport to addres s safety issues, if any, ass o ciated with their use. It is the responsibility of t he user of these standards to establish appropriate safety …

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SEMI F18-95 © SEMI 19951
SEMI F18-95
GUIDE FOR DETERMINING THE HYDROSTATIC STRENGTH OF, AND
DESIGN BASIS FOR, THERMOPLASTIC PIPE AND TUBING
1 Purpose
To identify a test method for measuring the hydrostatic
strength of thermoplastic pipe and tubing, a method for
estimating long-term hydrostatic strength, and
recommendations for developing design bases.
2 Scope
2.1 This guide references the industry-recognized
Standard Test Method for determining the time-to-
failure of plastic pipe under constant internal pressure.
2.2 This guide references the industry-recognized
Standard Test Method for determining the long-term
hydrostatic strength of plastic pipe in order to obtain the
hydrostatic design basis of the pipe material.
2.3 This guide references the Technical Report of
policies and procedures for developing recommended
hydrostatic design stresses for thermoplastic pipe
materials from 23°C to 93.3°C (73°F to 200°F).
3 Referenced Documents
3.1 ASTM Standards
1
D 1598 — Standard Test Method for Time-to-Failure of
Plastic Pipe under Constant Internal Pressure
D 2837 — Standard Test Method for Obtaining
Hydrostatic Design Basis for Thermoplastic Pipe
Materials
3.2 PPI Technical Report
2
TR-3/92 — Policies and Procedures for Developing
Recommended Hydrostatic Design Stresses for
Thermoplastic Pipe Materials
4 Terminology
Currently this document contains no terminology.
5 Summary of Referenced D ocuments
5.1 ASTM Standards
5.1.1 D 1598 — This test method consists of exposing
specimens of pipe/tube to a constant internal pressure
while in a controlled environment. Such a controlled
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959
2 Plastic Pipe Institute, 355 Lexington Avenue, New York, NY
10017
environment may be accomplished by immersing the
specimens in a controlled-temperature water or air bath.
The time-to-failure is measured.
5.1.2 D 2837 — The procedure for estimating long-
term hydrostatic strength is essentially an extrapolation,
with respect to time, of a stress-time regression line
based on data obtained in accordance with ASTM D
1598. Stress-failure time plots are obtained for the
selected temperature and environment: the
extrapolation is made in such a manner that the long-
term hydrostatic strength is estimated for these
conditions.
5.2 PPI Technical Report
5.2.1 TR-3/92 — These policies and procedures are for
development of recommendations for thermoplastic
pipe compounds based on test data from good quality
pipes made by specific processing techniques. These
recommendations may or may not be valid for pipes
made by differing processing techniques.
6 Comments
6.1 The Hydrostatic Stress Committee of the Plastic
Pipe Institute (PPI) has recommended a minimum
safety factor of 200% based on the hydrostatic design
basis. The safety factor is intended to make allowance
for manufacturing and testing variables such as normal
variations in the material, manufacturing process,
dimensions, and in the evaluation procedures (ASTM D
2837 and D 1598).
6.2 Application conditions also need to be taken into
consideration and may require an increased safety
factor. For example, with liquid hydrocarbons and other
chemicals, temperature can have a disproportional
effect on the long-term performance of the tubing or
pipe. No general safety factor has been established for
these types of services, so each case should be designed
on its own merit.
NOTE: It is strongly recommended that the user of pipe/tube
confirm that the product has been tested per ASTM D 1598, D
2837, and TR-3/92 to ensure a proper pressure rating.
SEMI F18-95 © SEMI 1995 2
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F19-0304 © SEMI 1995, 2004 1
SEMI F19-0304
SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED
SURFACES OF STAINLESS STEEL COMPONENTS
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 4, 2003. Initially available at www.semi.org February 2004; to be published March
2004. Originally published in 1995.
NOTICE: This document was completely rewritten in
2004.
1 Purpose
1.1 The purpose of this specification is to provide a
standard for the quality of the wetted surfaces of
stainless steel components used in the chemical (gas
and liquid) distribution systems of semiconductor
manufacturing facilities.
2 Scope
2.1 This specification defines the wetted surface
characterization requirements and the finish acceptance
criteria for tubing and components fabricated in
stainless steel per SEMI F20 and intended to control
and/or contain gases and liquids used in semiconductor
manufacturing.
2.2 The surface characterization tests to be performed
are specified herein, and the existing standards for
performing these tests are referenced.
2.3 Terms specific to this technology are either listed
herein as they relate to the acceptance criteria of this
specification or are defined in the referenced documents
as they relate to a specific test method.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI F20 — Specification for 316L Stainless Steel
Bar, Extruded Shapes, Plate, and Investment Castings
for Components Used in High Purity Semiconductor
Manufacturing Applications
SEMI F37 — Method for Determination of Surface
Roughness Parameters for Gas Distribution System
Components
SEMI F60 — Test Method for ESCA Evaluation of
Surface Composition of Wetted Surfaces of Passivated
316L Stainless Steel Components
SEMI F70 — Test Method for Determination of
Particle Contribution of Gas Delivery System
SEMI F72 — Test Method for Auger Electron
Spectroscopy (AES) Evaluation of Oxide Layer of
Wetted Surfaces of Passivated 316L Stainless Steel
Components
SEMI F73 — Test Method For Scanning Electron
Microscopy (SEM) Evaluation of Wetted Surface
Condition of Stainless Steel Components
SEMI F77 — Test Method for Electrochemical Critical
Pitting Temperature Testing of Alloy Surfaces Used in
Corrosive Gas Systems
3.2 ASTM
1
Standard
ASTM A 967 — Standard Specification for Chemical
Passivation Treatments for Stainless Steel Parts
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 Abbreviations and Acronyms
4.1.1 Å — Angstrom (= 0.1 nm)
4.1.2 AES — Auger Electron Spectroscopy
4.1.3 Avg — Average
4.1.4 CPT — Critical Pitting Temperature
4.1.5 Cr — Chemical symbol for Chromium
4.1.6 Cr/Fe — Ratio of total Chromium to total Iron in
the passive oxide layer, as defined in SEMI F60
4.1.7 CrOX — Chromium Oxide
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555 Website:
http://www.astm.org