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SEMI E5-1104 © SEMI 1982, 2004 61 Stream,Function Name (Mnemonic) Direction S1,F6 Formatted Status Data (FSD) M,H<-E Description The equipment reports the value of s t atus variabl es according to t he SFCD. Structure…

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SEMI E5-1104 © SEMI 1982, 2004 60
Stream,Function Name (Mnemonic) Direction
S1,F3 Selected Equipment Status Request (SSR) S,H->E,reply
Description
A request to the equipment to report selected values of its status.
Structure
The following structure is approved for all item formats and should be used by all new
implementations:
L,n
1. <SVID
1
>
.
.
n. <SVID
n
>
The following structure is included for compatibility with previous implementations
and may only be used for items of format 3() and 5():
<SVID
1
,...,SVID
n
>
Exception
A zero-length list (structure 1) or item (structure 2) means report all SVIDs.
Stream,Function Name (Mnemonic) Direction
S1,F4 Selected Equipment Status Data (SSD) M,H<-E
Description
The equipment reports the value of each SVID requested in the order requested. The host remembers the names of values
requested.
Structure
L,n
1. <SV
1
>
.
.
n. <SV
n
>
Exception
A zero-length list item for SV
i
means that SVID
i
does not exist.
Stream,Function Name (Mnemonic) Direction
S1,F5 Formatted Status Request (FSR) S,H->E,reply
Description
A request for the equipment to report the status according to a pre-defined fixed format.
Structure
<SFCD>
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 61
Stream,Function Name (Mnemonic) Direction
S1,F6 Formatted Status Data (FSD) M,H<-E
Description
The equipment reports the value of status variables according to the SFCD.
Structure
Depends upon the structure specified by the status form.
Exception
A zero-length item means that no report can be made.
Stream,Function Name (Mnemonic) Direction
S1,F7 Fixed Form Request (FFR) S,H->E,reply
Description
A request for the form used in S1,F6.
Structure
<SFCD>
Exception
None
Stream,Function Name (Mnemonic) Direction
S1,F8 Fixed Form Data (FFD) M,H<-E
Description
The form is returned with the name of each value and the data format item having a zero length as a two-element list in the place
of each single item to be returned in S1,F6.
Structure
Depends upon the form being specified.
Exception
A zero-length item means the form is unavailable.
Stream,Function Name (Mnemonic) Direction
S1,F9 Material Transfer Status Request (TSR) S,H->E,reply
Description
A request to report the status of all material ports to the host.
Structure
Header only
Exception
None
SEMI E5-1104 © SEMI 1982, 2004 62
Stream,Function Name (Mnemonic) Direction
S1,F10 Material Transfer Status Data (TSD) M,H<-E
Description
The equipment reports to the host the transfer status of all material ports.
Structure
L,2
1. <TSIP
1
,...,TSIP
n
>
2. <TSOP
1
,...,TSOP
n
>
Exception
A zero-length item means there are no such ports. A zero-length list means there are no ports.
Stream,Function Name (Mnemonic) Direction
S1,F11 Status Variable Namelist Request (SVNR) S,H->E,reply
Description
A request to the equipment to identify certain status variables.
Structure
L,n
1. <SVID
1
>
.
.
n. <SVID
n
>
Exception
A zero length means report all SVIDs.
Stream,Function Name (Mnemonic) Direction
S1,F12 Status Variable Namelist Reply (SVNRR) M,H<-E
Description
The equipment reports to the host the name and units of the requested SVs.
Structure
L,n
1. L,3
1. <SVID
1
>
2. <SVNAME
1
>
3. <UNITS
1
>
2. L,3
.
.
n. L,3
1. <SVID
n
>
2. <SVNAME
n
>
3. <UNITS
n
>
Exception
Zero-length ASCII items for both SVNAME
i
and UNITS
i
indicates that the SVID does not exist.