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SEMI C59-1104 © SEMI 2002, 2004 8 14.5.3 Calibration Standa rds — Construct a calibration curve in the range of interest. Verify the standards employed independently by established traceability to recognized nation al or…

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SEMI C59-1104 © SEMI 2002, 2004 7
tested. Calculate the concentrations of carbon
monoxide and hydrogen using the formula:
Sample Peak Area
Concentration of Standard
Standard Peak Area
Concentration of Sample
14.1.4.5 The result may not exceed the specification in
Table 1.
14.2 Carbon Dioxide — This procedure is for the
determination of carbon dioxide in nitrogen using a gas
chromatograph with a flame ionization detector, fitted
with a methanizer.
14.2.1 Detection Limit — 2 ppb
14.2.2 Instrument Parameters
14.2.2.1 Column — 1/8” OD 77” Length Hayesep D
100-120 mesh.
14.2.2.2 Flow Rates:
Carrier Flow: 30 mL/min nitrogen
Air Flow: 250 mL/min
Hydrogen Flow: 30 mL/min
14.2.2.3 Sample Volume — 5 mL
14.2.2.4 Temperatures:
Methanizer 315°C
Column Temperature 40°C
14.2.3 Calibration Standard — 0.1 ppm carbon dioxide
in nitrogen.
14.2.3.1 Construct a calibration curve in the range of
interest. Verify the standards employed independently
by established traceability to recognized national or
international standards.
14.2.4 Operating Procedure
14.2.4.1 Inject the calibration standard into the column
using a gas sampling valve. Record the retention time
and peak area.
14.2.4.2 Inject the sample to be tested in same manner
as the calibration standard. Record the retention time
and peak area.
14.2.4.3 Repeat Section 14.2.4.1.
14.2.4.4 Compare the average peak area of the
calibration standard to that of the nitrogen sample being
tested. Calculate the concentration of carbon dioxide,
using the formula:
Sample Peak Area
Concentration of Standard
Standard Peak Area
Concentration of Sample
14.2.4.5 The result may not exceed the specification in
Table 1.
14.3 Oxygen — This procedure is for the determination
of oxygen in nitrogen using a continuous flow analyzer
using an electrochemical method.
14.3.1 Detection Limit — 2 ppb
14.3.2 Flow Rate — Set sample flow rates in
accordance with the instrument manufacturer's
instructions.
14.3.3 Calibration Standards — 50 ppb oxygen in
nitrogen or in accordance with the instrument
manufacturer’s instructions.
14.3.4 Operating Procedure
14.3.4.1 Introduce nitrogen sample and record oxygen
reading. The result may not exceed the specification in
Table 1.
14.4 Total Hydrocarbons — This procedure is for the
determination of total hydrocarbons in nitrogen using a
gas chromatograph fitted with a flame ionization
detector and a back flush valve.
14.4.1 Detection Limit — 2 ppb
14.4.2 Instrument Parameters
14.4.2.1 Column — 1/8” OD 77” Length Hayesep D
100-120 mesh.
14.4.2.2 Flow Rates:
Carrier Flow: 30 mL/min nitrogen
Air Flow: 250 mL/min
Hydrogen Flow: 30 mL/min
14.4.2.3 Sample Volume — 5 mL
14.4.2.4 Temperatures — Column Temperature 40°C
14.4.3 Calibration Standard — 0.1 ppm methane in
nitrogen.
14.4.3.1 Calibration Standards — Construct a
calibration curve in the range of interest. Verify the
standards employed independently by established
traceability to recognized national or international
standards.
14.5 Water — This procedure is for the determination
of trace moisture (water) in nitrogen using a continuous
flowing phosphorous pentoxide hygrometer. (See Note
7 in Section 9.5.)
14.5.1 Detection Limit — 10 ppbv
14.5.2 Flow Requirements — Set the sample pressure
and flow rate in accordance with the instrument
manufacturer’s instructions.
SEMI C59-1104 © SEMI 2002, 2004 8
14.5.3 Calibration Standards — Construct a calibration
curve in the range of interest. Verify the standards
employed independently by established traceability to
recognized national or international standards.
14.5.4 Operating Procedure
14.5.4.1 Obtain a continuous flow sample of gas from
the source using a clean and passivated stainless steel
line which has been purged dry after exposure to
ambient moisture.
14.5.4.2 After prepurging with a dry gas, allow the
sample gas to flow through the sampling system and the
P
2
O
5
moisture hygrometer until a stable reading is
obtained.
14.5.4.3 Determine the moisture content of the
nitrogen sample by comparing the reading to calibration
curve. The result may not exceed the specification in
Table 1.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C60-0305 © SEMI 2005 1
SEMI C60-0305
SPECIFICATIONS AND GUIDELINES FOR NITROUS OXIDE (N
2
O)
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 10, 2004. Initially available at www.semi.org January 2005; to be published
March 2005.
1 Purpose
1.1 The purpose of this document is to provide a series of specifications for different grades of Nitrous Oxide (N
2
O)
that are used in the semiconductor industry.
2 Scope
2.1 This document covers requirements for all grades of nitrous oxide used in the semiconductor industry.
2.2 If analytical methods are not complete, the requirements are presented as a guideline.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Description
3.1 Nitrous oxide is an oxidizing, colorless, liquefied gas with a sweetish odor. It is a simple asphyxiant. Vapor
pressure is about 745 psig at 70°F.
4 Limitations
4.1 None.
5 Referenced Standards
5.1 SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
6 Terminology
6.1 Terminology appropriate to this standard is defined in SEMI C3.
7 Requirements
7.1 Purity and other requirements for the various grades of nitrous oxide are given in Table 1.