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SEMI PR8-0703 © SEMI 2003 20 for Alarm Set. If the E30 ala rm message is triggered by alarm clear then the ExState element shall contain “clear”, for alarm clear. If it is necessary to incl ude the value of ALCD in t he …

SEMI PR8-0703 © SEMI 2003 19

7.7.9 Exception Event

7.7.9.1 Exception event is an event concerned with errors, faults, or other unexpected events detected by the

equipment. Exception data can be provided anywhere within the EdaData message structure following the

EquipmentID element. It can appear zero or more times, and can be interspersed with Event data.

Table 21 Exception Event Format Definition, valid between “Msg” tags

Tag Name Description XML Datatype Behavior

ExEvent Operation Name element Complex Required

ExTime Exception time and date stamp dateTime Required

Locator Unique identifier for the tool entity , or namable, to which the

event applies.

String Required

ErrorCode Unique code indicating the error type. May be the SECSGEM

ALID.

String Required

ExType Name of the event type. “Alarm” is reserved for E30 alarms. String Required

ExState “set” and “clear” are used for exceptionType “Alarm”.

Otherwise, use of this field is supplier-defined. If this field is not

applicable for the exceptionType, the contents shall be “none”.

String Required

ExDesc A text description of the exception. String Required

Severity The supplier-defined severity. String Supplier Optional

Data Complex element that contains all Param elements. Complex Optional

Extension Reserved for supplier extensions. Any Supplier Optional

Example: Exception Event with Attached Parametric Detail

<Supplier>Some Supplier</Supplier>

</EquipmentID>

<Locator>stepper.stage.optics </Locator>

<ExType>Alarm</Extype>

<ExDesc>Failed to see clearly</ExceptionDesc>

<Data>

<Param>

<Name>AlignLandingEnergy</Name>

<Value>

</Value>

</Param>

</Data>

</ExEvent>

</EdaData>

7.7.9.2 Representation of SEMI E30 Alarms — It is expected that the supplier will need to transmit exception event

messages corresponding to SEMI E30 alarms, and possibly other exceptions, through the EDA interface. Whenever

an exception event message corresponding to an E30 alarm is transmitted, the ErrorCode element shall contain the

value of the ALID data item, and the ExDesc element shall contain the value of the ALTX data item. If the E30

alarm message is triggered by the Alarm Detected event then the contents of the ExState element shall contain “set”,

SEMI PR8-0703 © SEMI 2003 20

for Alarm Set. If the E30 alarm message is triggered by alarm clear then the ExState element shall contain “clear”,

for alarm clear. If it is necessary to include the value of ALCD in the exception, this information shall be provided

as a separate parameter within the Data element, the name of the parameter shall be “ALCD”, and its value shall be

of type Base64Binary. The only other required fields for transmission of an E30 alarm are MsgType, EventTime

and Locator.

7.7.10 Notification of Interference with Tool Operations — If the function of the EDA port, or the volume of data,

is interfering with tool operations or the output of the SECS/GEM port then the tool will notify all configured clients

of the condition. The format of this notification is defined in the following section.

7.7.10.1 Tool Interference Message — The following message format will be used to indicate interference with tool

operations. The table below describes the “Operation” element of the message. The message takes the general

form of XML data messages as described in Section 7.7.2. The SOAPAction HTTP header for this message is

“urn:semi-org:ws:eda_ps_v0.0:EdaError”. The ErrorType field for tool interference messages shall have the value

“PerformanceWarning”. Note that this message can be used to communicate other error conditions not defined in

this specification.

Table 22 EdaError XML Defintion

Tag Name Description XML Datatype Behavior

EdaError Operation Name Complex Required

ErrorTime Error time and date stamp dateTime Required

ErrorType The category or type of error String Required

ErrorCode A unique identifier for the error String Required

ErrorDesc A more specific description of the

problem

String Required

7.8 Metadata

7.8.1 Metadata — Metadata must be provided to the

user in the form of XML documents. The structure and

format of metadata is left to the equipment supplier.

The provided metadata must include sufficient

information to describe the following items:

1) Definition of all Param Names and other non-

standard tags that will be communicated. These

definitions will include, where applicable, units,

data types, max sampling frequencies, valid

limits, the tool entity to which each param

applies, and any other aspects necessary to

understand and use the data element,

2) Definition of the equipment structure and

hierarchy,

3) Definition of the available events and the tool

entities to which they apply,

4) Definition of any state models that are supported,

5) Definition of which parameters can be

communicated with each event, and

6) Definition of what exceptions can be

communicated, to what equipment entities they

apply, and what parameters will be included with

each exception.

7.9 Data Collection Plans — Data collection from the

equipment will be enabled through the activation of

specific data collection plans. The definition of

available data collection plans must be provided to the

user in the form of an XML file. The structure and

format of the data collection XML file(s) is left to the

supplier.

7.9.1 Modifying and Adding Data Collection Plans —

The equipment supplier must provide a means for

customers to change the content and number of

available data collection plans.

7.10 Schema and WSDL documents

7.10.1 Three machine-readable files are provided to

help ensure interoperable messaging between factory

applications and supplier implementations of the

specification. This section describes each file and its

usage.

7.10.2 eda.xsd

7.10.2.1 This file is an XML Schema document that

describes the structure of the XML document fragments

specified in Tables 15–22. This file can be used to

validate, or to facilitate the serialization and de-

serialization of, the body element of the SOAP

envelope for each of the messages defined in this

specification. It cannot be used to enforce or specify

the usage of the HTTP and SOAP protocols.

7.10.3 eda_equipment.wsdl

7.10.3.1 This file is an interface description document

that describes the types, messages, and SOAP and

HTTP protocol usage for each of the operations that the

equipment must support (Tables 15 and 16). Note that

it does not include specification of the endpoint address

for these operations, since this is unique for each

equipment installation that provides the service. This

file can be used by SOAP messaging toolkits that

support WSDL to generate interoperable client and

server code stubs. The contents of eda.xsd have been

directly included in the body of this file, so it is not

necessary to use that file separately in order to

implement these messages.

7.10.4 eda_consumer.wsdl

7.10.4.1 This file is an interface description document

that describes the types, messages, and SOAP and

HTTP protocol usage for each of the operations that

any EDA client must support (Tables 17-22). Note that

it does not include specification of the endpoint address

for these operations, since this is unique for each EDA

application. This file can be used by SOAP messaging

toolkits that support WSDL to generate interoperable

client and server code stubs. The contents of eda.xsd

have been directly included in the body of this file, so it

is not necessary to use that file separately in order to

implement these messages.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.