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SEMI G75.8-069 8 © SEMI 1998 1 SEMI G75.8-0698 TEST METHOD FOR MEA SUREM ENT OF THE COEFFICIENT OF THERM A L EXP A NSION AND GLA SS TR AN SITION TEMPERA TURE OF LEADFRAME TAPE 1 Summary of Method 1.1 A ther mal mechanica…

SEMI G75.7-0698 © SEMI 1998 2

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SEMI G75.8-0698 © SEMI 19981

SEMI G75.8-0698

TEST METHOD FOR MEASUREMENT OF THE COEFFICIENT OF

THERMAL EXPANSION AND GLASS TRANSITION TEMPERATURE OF

LEADFRAME TAPE

1 Summary of Method

1.1 A thermal mechanical analyzer is used to monitor

the dimension of a tape sample with temperature

increases to 400°C. It can be made to measure the base

film, adhesive, and the leadframe tape. The results are

obtained as a plot of expansion versus temperature,

from which Coefficient of Thermal Expansion (CTE)

and Glass Transition Temperature (Tg) may be

obtained. CTE above the Tg cannot be measured

because of softening and elongation of the sample.

2 Equipment

2.1 Thermal mechanical analyzer (TMA) with chart

recorder.

2.2 Thermohygrostat

2.3 Cutting die for sample preparation

2.4 Calipers — 0.1 mm accuracy

3 Sampling

3.1 The sampling is one sample per one lot. The

vendor must report the definition of lot, if customer

requires it.

4 Preparation of Specimens

4.1 Cut specimens out of the samples using the cutting

die. The specimens shall be 20 ± 0.1 mm long and 5.0 ±

0.1 mm wide.

4.2 Allow the samples to be stabilized at 23 ± 5°C and

50 ± 5% RH for 16 hours minimum. This may be

carried out in a climate controlled room or in a

thermohygrostat.

5 Equipment Setup and Cal ibration

5.1 Refer to the thermal mechanical analyzer

manufacturer’s manual for setup and calibration

procedures.

Procedure

6.1 Set the specimen to the chuck so that the length of

the specimen under test is 10 ± 0.1 mm. Measure the

specimen length using calipers.

6.2 Attach the chuck to the TMA.

6.3 Zero the recorder.

6.4 Set the Thermal Ramp to 10°C/minute, the

maximum temperature to 400°C, and the load to 2.0 ±

0.2 grams.

6.5 Initiate the test sequence and obtain a chart record

of Elongation of the specimen versus Temperature (see

Figure 1).

6.6 Repeat for all specimens.

6.7 Calculation of Results

6.7.1 Coefficient of Thermal Expansion (k) —

Calculate the CTE using the following equation:

∆

×∆

where

L is the length (mm) of the

specimen at room temperature.

∆

L is the elongation of the

specimen (mm) for a given

temperature difference, ∆ T (=C). °

These values are taken from the

chart as shown in Figure 1.

6.7.2 Glass Transition Temperature (Tg)

6.7.2.1 On the chart, draw a best-fit tangent line to the

curve between Point (A) and (B) and a second tangent

between Point (C) and (D) (see Figure 1).

SEMI G75.8-0698 © SEMI 1998 2

Figure 1

Coefficient of Thermal Expansion (CTE)

6.7.2.2 Extend the lower tangent line above its highest

temperature and the higher tangent line below its lowest

temperature until they intersect. The temperature at the

intersection point is the Glass Transition Temperature.

6 Related Documents

NOTE: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

6.1 SEMI Standard

SEMI G13 — Standard Test Method for Expansion

Characteristics of Molding Compounds

6.2 ASTM Specification

ASTM D 669 — Standard Test Method for Coefficient

of Linear Thermal Expansion of Plastics

6.3 JIS Specification

JIS K 6911 — Testing Methods for Thermosetting of

Plastics

1 American Society of Testing and Materials, 100 Barr Harbor Drive,

West Conshohoken, PA 19428-2959 (all cited standards may be

found in Volume 10.05 of the Annual Book of ASTM Standards)

2 Japanese Standards Association, 1-24, Akasaka 4 Chome, Minato-

ku, Tokyo, Japan