semi合集-English.pdf - 第2883页

SEMI E107-1102 © SEMI 2001, 2002 8 <xsd:simpleType name=" XMinPhysic" type=" unsignedIn t10Type" /> <xsd:simpleType name=" XMaxPh ysic" type=" unsignedInt10Typ e" /> &l…

100%1 / 7923
SEMI E107-1102 © SEMI 2001, 2002 7
<xsd:enumeration value=" TopLeftXY" />
<xsd:enumeration value=" BottomLeftXY" />
<xsd:enumeration value=" TopLeftYX" />
<xsd:enumeration value=" BottomLeftYX" />
<xsd:enumeration value=" TopRightXY" />
<xsd:enumeration value=" BottomRightXY" />
<xsd:enumeration value=" TopRightYX" />
<xsd:enumeration value=" BottomRightYX" />
</xsd:restriction>
</xsd:simpleType>
<! -- Complicated Lists -->
<xsd:complexType name=" errorClassListType" >
<xsd:element name=" ErrorClass" type=" errorClassType" minOccurs=" 1" maxOccurs=" 255" />
</xsd:complexType>
<xsd:complexType name=" errorClassType" >
<xsd:sequence>
<xsd:element name=" ErrorClassNumber" type=" charIntegerType" />
<xsd:element name=" ErrorQuality" type=" string16Type" use=" optional" />
<xsd:element name=" ErrorDescription" type=" string256Type" use=" optional" />
</xsd:sequence>
</xsd:complexType>
<xsd:complexType name=" failBitDataType" >
<xsd:sequence>
<xsd:element name=" failBitDataUnit" type=" failBitDataUnitType" minOccurs=" 1" maxOccurs=" unbounded" />
</xsd:sequence>
</xsd:complexType>
<xsd:simpleType name=" failBitDataUnitType" >
<xsd:list itemType=" failBitDataParticleType" />
</xsd:simpleType>
<xsd:simpleType name=" failBitDataParticleType" >
<xsd:union memberTypes=" Seq XAddress YAddress XMin XMax YMin YMax XCenter YCenter XSize YSize
Area DefectCate XMinPhysic XMaxPhysic YMinPhysic YMaxPhysic IoNumber XMinLogic XMaxLogic
YMinLogic YMaxLogic" />
</xsd:simpleType>
<xsd:simpleType name=" Seq" type=" unsignedInt10Type" />
<xsd:simpleType name=" XAddress" type=" int5Type" />
<xsd:simpleType name=" YAddress" type=" int5Type" />
<xsd:simpleType name=" XMin" type=" float14Type" />
<xsd:simpleType name=" XMax" type=" float14Type" />
<xsd:simpleType name=" YMin" type=" float14Type" />
<xsd:simpleType name=" YMax" type=" float14Type" />
<xsd:simpleType name=" XCenter" type=" float14Type" />
<xsd:simpleType name=" YCenter" type=" float14Type" />
<xsd:simpleType name=" XSize" type=" float14Type" />
<xsd:simpleType name=" YSize" type=" float14Type" />
<xsd:simpleType name=" Area" type=" float14Type" />
<xsd:simpleType name=" DefectCate" type=" string16Type" />
SEMI E107-1102 © SEMI 2001, 2002 8
<xsd:simpleType name=" XMinPhysic" type=" unsignedInt10Type" />
<xsd:simpleType name=" XMaxPhysic" type=" unsignedInt10Type" />
<xsd:simpleType name=" YMinPhysic" type=" unsignedInt10Type" />
<xsd:simpleType name=" YMaxPhysic" type=" unsignedInt10Type" />
<xsd:simpleType name=" IoNumber" type=" unsignedInt10Type" />
<xsd:simpleType name=" XMinLogic" type=" unsignedInt10Type" />
<xsd:simpleType name=" XMaxLogic" type=" unsignedInt10Type" />
<xsd:simpleType name=" YMinLogic" type=" unsignedInt10Type" />
<xsd:simpleType name=" YMaxLogic" type=" unsignedInt10Type" />
<xsd:complexType name=" analogDataType" >
<xsd:sequence>
<xsd:element name=" analogDataUnit" type=" analogDataUnitType" minOccurs=" 1" maxOccurs=" unbounded" />
</xsd:sequence>
</xsd:complexType>
<xsd:simpleType name=" analogDataUnitType" >
<xsd:list itemType=" analogDataParticleType" />
</xsd:simpleType>
<xsd:simpleType name=" analogDataParticleType" >
<xsd:union memberTypes=" XAddress YAddress TestNumber Note Measure MeasureUnit Std Parameter
ParameterUnit UpperLimitData LowerLimitData TestResult" />
</xsd:simpleType>
<xsd:simpleType name=" TestNumber" type=" long7Type" />
<xsd:simpleType name=" Note" type=" string256Type" />
<xsd:simpleType name=" Mesure" type=" float14Type" />
<xsd:simpleType name=" MeasureUnit" type=" analogUnitType" />
<xsd:simpleType name=" Std" type=" float14Type" />
<xsd:simpleType name=" Parameter" type=" float14Type" />
<xsd:simpleType name=" ParameterUnit" type=" analogUnitType" />
<xsd:simpleType name=" UpperLimit" type=" float14Type" />
<xsd:simpleType name=" LowerLimit" type=" float14Type" />
<xsd:simpleType name=" TestResult" type=" string256Type" />
<xsd:simpleType name=" analogUnitType" >
<xsd:restriction base=" xsd:string" >
<maxLength Value=" 4" fixed=" true" />
</xsd:restriction>
</xsd:simpleType>
<xsd:simpleType name=" string14Type" >
<xsd:restriction base=" xsd:string" >
<maxLength Value=" 14" fixed=" true" />
</xsd:restriction>
</xsd:simpleType>
<xsd:simpleType name=" string16Type" >
<xsd:restriction base=" xsd:string" >
<maxLength Value=" 16" fixed=" true" />
</xsd:restriction>
</xsd:simpleType>
SEMI E107-1102 © SEMI 2001, 2002 9
<xsd:simpleType name=" string256Type" >
<xsd:restriction base=" xsd:string" >
<maxLength Value=" 256" fixed=" true" />
</xsd:restriction>
</xsd:simpleType>
<xsd:simpleType name=" charIntegerType" >
<xsd:restriction base=" xsd:unsignedShort" >
<xsd:minInclusive value=" 0" />
<xsd:maxInclusive value=" 255" />
</xsd:restriction>
</xsd:simpleType>
<xsd:simpleType name=" unsignedInt10Type" >
<xsd:restriction base=" xsd:unsignedLong" >
<xsd:totalDigits value=" 10" />
</xsd:restriction>
</xsd:simpleType>
<xsd:simpleType name=" int5Type" >
<xsd:restriction base=" xsd:int" >
<xsd:totalDigits value=" 5" />
</xsd:restriction>
</xsd:simpleType>
<xsd:simpleType name=" long7Type" >
<xsd:restriction base=" xsd:long" >
<xsd:totalDigits value=" 7" />
</xsd:restriction>
</xsd:simpleType>
<xsd:simpleType name=" float14Type" >
<xsd:restriction base=" xsd:float" >
<xsd:pattern value=" [1-9].\ d{ 9} (+ | -)\ d{ 2} " />
</xsd:restriction>
</xsd:simpleType>
<xsd:complexType name=" failBitDataTemplateType" >
<xsd:list itemType=" failBitDataItemNameType" />
</xsd:complexType>
<xsd:simpleType name=" failBitDataItemNameType" >
<xsd:restriction base=" xsd:string" >
<xsd:enumeration value=" Seq" />
<xsd:enumeration value=" XAddress" />
<xsd:enumeration value=" YAddress" />
<xsd:enumeration value=" XMin" />
<xsd:enumeration value=" XMax" />
<xsd:enumeration value=" YMin" />
<xsd:enumeration value=" YMax" />
<xsd:enumeration value=" XCenter" />
<xsd:enumeration value=" YCenter" />
<xsd:enumeration value=" XSize" />