semi合集-English.pdf - 第5024页

SEMI M18-0704 © SEMI 1990, 2004 10 6.14 Flatness/Site Acronym: 2 [ ] [ ] [ ] [ ] Value : [ ] µ m Site Size ___×___ mm Total Sites___ % Usable Area___ [ ] Include partial sites [ ] Offset : x = [ ] mm, y = [ ] mm 100043 1…

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SEMI M18-0704 © SEMI 1990, 2004 9
5.2 Front Surface Thin
Film(s) Appl
[ ]None [ ]Description: 100023
5.3 Denuded Zone [ ]None [ ]Description: 100024
5.4 Extrinsic Gettering
Treatment
[ ]None [ ]Description: 100025
5.5 Backseal [ ]None [ ]Description: 100026
5.6 Annealing [ ]None [ ]Description: 100027
6. MECHANICAL CHARACTERISTICS
THE ITEMS LISTED IN THIS SECTION MAY BE
6.01 [ ] Specified According to SEMI M1_____ 100028
OR SPECIFIED INDIVIDUALLY
♦
6.1 Diameter
1
Nominal [ ] ± Tolerance [ ] mm 100029
♦
6.2 Primary Flat
Length/Diameter Notch
Dimensions
1
[ ]SEMI M1._______; [ ]Other:___mm 100030
♦
6.3 Primary Flat/Notch
Orientation
1
[ ]SEMI M1._______; [ ]Other: 100031
♦
6.4 Secondary Flat Length
1
[ ]SEMI M1._______; [ ]Other:___mm; [
]None
100032
♦
6.5 Secondary Flat Location
1
[ ]SEMI M1._______; [ ]Other:___; [ ]None 100033
♦
6.6 Edge Profile
1
[ ]SEMI Standard [ ]Other:_____ 100034
♦
6.7 Thickness
1
Nominal [ ] ± Tolerance [ ] µm 100035
Method [ ]SEMI MF533; [ ]SEMI MF1530; [ ]JIS H
611;
[ ]DIN 50441/1; [ ]Other
6.8 Thickness Variation
(TTV)
1
[ ]SEMI M1._______; [ ]Other: [ ] µm 100036
Measurement Position [ ]SEMI MF533; [ ]SEMI MF657; [ ]SEMI
MF1530; [ ]JIS H 611; [ ]DIN 50441/1; [
]Other:_____
♦
6.9 Surface Orientation [ ]0.00 ± 0.50; [ ]2.50 ± 0.50; [ ]4.00 ± 0.50;
[ ] Other:_____
100037
Method [ ]SEMI MF26; [ ]JEIDA 18; [ ]DIN 50433;
[ ]Other:_____
6.10 Bow
1
[ ]SEMI M1._______; [ ]Other:___ µm 100038
Method [ ]SEMI MF534; [ ]JIS H 611; [ ]Other:_____
6.11 Warp
1
[ ]SEMI M1._______; [ ]Other: ___ µm
Method [ ]SEMI MF657; [ ]SEMI MF1390;
[ ]Other:_____
100039
100040
SEMI
MF657
SEMI
MF1390
6.12 Sori [ ]_______µm 100041
Method [ ] SEMI MF1451; [ ] JEIDA 43
6.13 Flatness/Global Acronym:
2
[ ] [ ] [ ] [ ] Value: [ ]µm
100042
Method [ ]SEMI MF1530;
[ ]DIN 50441/3; [ ]Other:_____
SEMI M18-0704 © SEMI 1990, 2004 10
6.14 Flatness/Site Acronym:
2
[ ] [ ] [ ] [ ] Value: [ ]µm
Site Size ___×___ mm
Total Sites___
% Usable Area___
[ ] Include partial sites
[ ] Offset: x = [ ] mm, y = [ ] mm
100043
100044
100045
100046
100047
100048
100049
100050
100221
SF3R
SF3D
SFLR
SFLD
SFQR
SFQD
SBIR
SBID
SFSD
6.15 Fixed Quality Area Value: [ ]mm dia 100164
7. FRONT SURFACE CHEMISTRY
7.1 Surface Metal Contamination
Sodium [ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100051
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]Other:_____
Aluminum [ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100052
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]Other:_____
Potassium [ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100053
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF); [ ]Other:_____
Chromium [ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100054
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]SIMS; [
]Other:_____
Iron [ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100055
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]SEMI MF1617
(SIMS); [ ]Other:_____
Nickel [ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100056
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]Other:_____
Copper [ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100057
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]Other:_____
Zinc [ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100058
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]Other:_____
Others (List Separately)
[ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100059
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]SIMS;
[ ]Other:_____
[ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100060
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]SIMS;
[ ]Other:_____
[ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100061
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]SIMS;
[ ]Other:_____
[ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100062
SEMI M18-0704 © SEMI 1990, 2004 11
Method []ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]SIMS;
[ ]Other:_____
[ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100063
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]SIMS;
[ ]Other:_____
[ ]Not greater than [ ]atoms/cm
2
; [ ]Other
100064
Method [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1526 (TXRF);
[ ]SEMI M33 (TXRF); [ ]SIMS;
[ ]Other:_____
7.2 Surface Organics [ ]Not greater than [ ]ngrams/cm
2
100065
Method [ ]SEMI MF1982; [ ]Other:_____
8. FRONT SURFACE VISUAL INSPECTION CHARACTERISTICS
THE ITEMS LISTED IN THIS SECTION MAY BE
8.01 [ ] Specified According to SEMI M1 Table 1 100066
OR SPECIFIED INDIVIDUALLY
8.1 Scratches
3
[ ]SEMI M1 Table 1 [ ]Other: 100067
8.2 Pits
3
[ ]SEMI M1 Table 1 [ ]Other: 100068
8.3 Haze
3
[ ]SEMI M1 Table 1 [ ]Other: 100069
8.4 Localized Light
Scatterers (LLS)
3
[ ]SEMI M1 Table 1
[ ]Other:
Size: [ ] µm Count: ≤ [ ]
Size: [ ] µm Count: ≤ [ ]
Size: [ ] µm Count: ≤ [ ]
Size: [ ] µm Count: ≤ [ ]
Size: [ ] µm Count: ≤ [ ]
100070
100071
100072
100073
100074
100075
100076
100077
100078
100079
100080
100081
100082
100083
100084
100085
100086
100087
100088
100089
100090
≥0.50 µ
≥0.30 µ
≥0.20 µ
≥0.19 µ
≥0.18 µ
≥0.17 µ
≥0.16 µ
≥0.15 µ
≥0.14 µ
≥0.13 µ
≥0.12 µ
≥0.11 µ
≥0.10 µ
≥0.09 µ
≥0.08 µ
≥0.07 µ
≥0.06 µ
≥0.05 µ
≥0.04 µ
≥0.03 µ
≥0.02 µ
Method [ ]SEMI MF523; [ ]SEMI MF1620; [ ]JIS H
614;
[ ]JEIDA 24; [ ]Other:______
8.5 Contamination/Area
3
[ ]SEMI M1 Table 1 [ ]Other: 100091
8.6 Edge Chips
3
[ ]SEMI M1 Table 1 [ ]Other: 100092
8.7 Edge Cracks
3
[ ]SEMI M1 Table 1 [ ]Other: 100093
8.8 Cracks, Crow's Feet
3
[ ]SEMI M1 Table 1 [ ]Other: 100094
8.9 Craters
3
[ ]SEMI M1 Table 1 [ ]Other: 100095
8.10 Dimples
3
[ ]SEMI M1 Table 1 [ ]Other: 100096
8.11 Grooves
3
[ ]SEMI M1 Table 1 [ ]Other: 100097
8.12 Mounds
3
[ ]SEMI M1 Table 1 [ ]Other: 100098
8.13 Orange Peel
3
[ ]SEMI M1 Table 1 [ ]Other: 100099
8.14 Saw Marks
3
[ ]SEMI M1 Table 1 [ ]Other: 100100
8.15 Dopant Striation Rings [ ] 100101