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SEMI E36-0704 1995, 2004 3 4.4 Conf orming Element - A conforming element is one that uses the names and markup r ules defined i n Semiconduct or Equipm ent Manufactu ring Information Tagging for the class of el ement.…
SEMI E36-0704 1995, 2004
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• associated information models such as SGML and
XML Document Type Definitions (DTDs) and
schema, and
• the documentation for these information models,
including at least a comprehensive Tag Library.
Semiconductor Equipment Manufacturing Information
Tagging does not include implementation advice,
suggestions, or notes on how to implement the models
described here. This material will be presented in the
form of Auxiliary Information associated with
Semiconductor Equipment Manufacturing Information
Tagging.
Semiconductor Equipment Manufacturing Information
Tagging by design does not include tutorials on SGML,
XML, how to use the defined elements or modules, or
how to create document content.
2.3 SGML and XML – Any documents marked up
according to Semiconductor Equipment Manufacturing
Information Tagging will be “valid” XML documents:
that is, “well-formed” XML documents that have an
associated document type declaration and that comply
with the constraints expressed therein. Since valid
XML documents are by definition type-valid SGML
documents, such documents will be valid SGML
documents as well.
Initially, information models will be maintained in both
XML and SGML, with all changes made in parallel.
SEMI will issue a dual set of models whenever a
change is made, and both will always be (within the
limits of their syntax) the same. Although parallel
maintenance is unfortunate, it is intended to make it
easier for members to create documents using current
SGML or XML tools. As Web-SGML
implementations and alternative XML schema syntax
become more common, modules may be maintained in
other syntactic forms.
2.4 Examples of SEMI Content Specifications - There
are other SEMI standards and specifications that
regulate the content of a document. Semiconductor
Equipment Manufacturing Information Tagging is
expressly not in conflict with any of them, since it
specifies only how to identify the content present in the
documents, and in some contexts, how to electronically
structure the content. Semiconductor Equipment
Manufacturing Information Tagging does not address
what information is to be included. Examples of SEMI
content-related or content guideline-related standards
and specifications can be seen in section 7.
3 Referenced Documents
Semiconductor Equipment Manufacturing Information
Tagging references the following information
standards, which should be referred to in their entirety
for full details:
3.1 ISO Standards
1
International Standard for SGML; ISO-8879-1986 as
modified by Amendment 1, of 1988
HyTime Standard ISO 10744 revision 2, which is
referenced for hypertext linking
3.2 Other references
2
The Extensible Markup Language (XML)V 1.0
Recommendation of the World Wide Web Consortium
(W3C)
The draft W3C specifications for Extensible Linking
Language (XLL).
4 Terminology
4.1 Attribute - An attribute is a markup construct that
resides within the start tag of an element to provide
additional information about the element. (Note: the
start tag is the tag that is placed directly before the
element in the datastream and determines where the
element begins.)
4.2 Conforming Authoring Application - A conforming
authoring application must be able to produce
conforming documents. There is no requirement that all
internal work in the application be performed in the
markup described by Semiconductor Equipment
Manufacturing Information Tagging, only that the end
product, exported for interchange, must be a
conforming document.
4.3 Conforming Document - A conforming document is
one that meets the markup rules and specific
information models defined in Semiconductor
Equipment Manufacturing Information Tagging for the
class of document. This specification comprises three
parts: this base document, a set of information models,
and the documentation for those models. A conforming
document must conform to all three parts.
A conforming document created by one application
must be interchangeable with a conforming application
without significant information loss.
NOTE: Explicit rendering instructions such as font
family and type size are not considered to be significant
information.
1
ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-
1211 Genevè 20, Switzerland. http://www.iso.ch
2
World Wide Web Consortium, Massachusetts Institute of
Technology Laboratory for Computer Science, 545 Technology
Square, Cambridge, MA 02139. http://www.w3.org
SEMI E36-0704 1995, 2004
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4.4 Conforming Element - A conforming element is
one that uses the names and markup rules defined in
Semiconductor Equipment Manufacturing Information
Tagging for the class of element. A conforming element
created by a conforming application must be
interchangeable with another conforming application
without information loss.
4.5 Conforming Rendering Application - Rendering
(presentation) is the process and means by which the
elements in a document shall be made visually or
otherwise understandable to the end user, for example,
printing a document on paper, browsing a series of
elements on screen, or stating a series of elements
through voice synthesis. A conforming rendering
application must be able to print or display conforming
documents without significant loss of information. The
presentation should be consistent with the intent of the
originating system.
A conforming rendering application may not impose
structural requirements that are not required by the
DTD or other document models as stated in the second
part of Semiconductor Equipment Manufacturing
Information Tagging. For example, a rendering engine
may not require an element which is optional in the
models or require an attribute that is implied. A
rendering application may require that the rules in this
Base Specification and those in the Tag Library are
followed.
For example, if the DTDs say that an element is
optional, a Rendering Application may not require that
it be present. If the Tag Library says that the contents
of an element must be some particular information, the
Rendering Application may require that it be so. More
specifically, if the <description> element is optional, a
Rendering Application may not fail to process a
document because it does not contain <description>s.
If the Tag Library says that the contents of a
“datechanged” attribute is a date in YYYYMMDD
format, a Rendering Application may fail if the attribute
does not contain a valid date.
4.6 Document - A logical assembly of elements, that, if
correctly ordered, is a means of transmitting an
internally consistent piece of information. A document
is made up of one or more elements which must all be
contained in one “root” element.
4.7 Document Class - A document class consists of all
of the documents or information fragments that follow a
single set of markup rules, including the same elements
and element relationships. In general, a class of
documents can be considered to be documents that are
nearly the same in structure and have similar types of
content. A document class is usually (but not
necessarily) defined by a structural model (such as a
DTD or Schema) that governs its existence.
4.8 Document Exchange - For SEMI E36, “document
exchange” is synonymous with “document interchange”
(see definition).
4.9 Document Interchange - Document interchange
entails passing one or more elements, usually as a
document, from one conforming system to one or more
other systems (also known as “exchange”).
4.10 Document Model - “Document model” is a term
for a set of structural rules that describe the legal
markup for a particular class of documents. DTDs and
Schema are types of document models.
4.11 Document Type Definition (DTD) - A DTD is a
document model or list of markup rules, which may be
used in both SGML and XML. As specified in the
SGML standard, ISO 8879, a DTD is:
“Rules, determined by an application, that apply
SGML to the markup of documents of a particular
type. A document type definition includes a formal
specification, expressed in a document type
declaration, of the element types, element
relationships and attributes and references that can
be represented by markup. It thereby defines the
vocabulary of the markup for which SGML defines
the syntax.” (ISO 8879 4.105)
4.12 Element - An element is one named, contiguous
piece of information in the information stream. Usually
the data within an element has a semantic or structural
relationship as well, for example a person’s surname, an
error code, a pointer to external data, a paragraph, or a
procedure that contains steps. In the previous version
of this specification (i.e., in SEMI E36-95) an element
is also referred to as an “information component.”
An element is:
• A uniquely addressable unit of information within
the document; and/or
• An identifier to an addressable unit of information
outside the document.
4.13 Markup - For Semiconductor Equipment
Manufacturing Information Tagging, markup is defined
as additional data characters that are added to data to
provide information about the data and make the data
more useable. The markup described by Semiconductor
Equipment Manufacturing Information Tagging is
internal markup, that is, markup which resides in the
same data stream as the data — in specific SGML and
XML markup.
4.14 Nonconforming Document - A non-conforming
document is one that does not use the markup properly
SEMI E36-0704 1995, 2004
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or follow the markup rules defined in Semiconductor
Equipment Manufacturing Information Tagging.
4.15 SGML - SGML is “Standard Generalized Markup
Language.” The Standard Generalized Markup
Language is an International Organization for
Standardization (ISO) standard. The ISO Reference
Number is ISO 8879:1986(E). SGML is a meta-
language for constructing markup. See also XML
(Extensible Markup Language).
4.16 Tag - A tag is a string of characters delimited by
rules set out in the SGML standard (and used in XML
and HTML). Tags are placed in the datastream to
indicate where an element begins and ends. In
Semiconductor Equipment Manufacturing Information
Tagging, tags match as closely as possible the names of
the elements in English.
4.17 XLL (Extensible Linking Language) - When
released, XLL is intended to be the syntax and
semantics for both simple hypertext linking (as
exemplified by HTML) and more complex linking,
providing such functionality as multi-way links, multi-
ended links, and addressing from an external document
based on structure. A W3C Working Group is in the
process of producing a draft specification, which uses
many of the concepts from HyTime
(Hypermedia/Time-based Document Representation
Language ISO/IEC 10744) and the TEI (Text Encoding
Initiative) extended pointers.
4.18 XML (Extensible Markup Language) - XML is a
W3C Recommendation that describes a subset of
SGML syntax and functionality intended for use on the
World Wide Web. XML is, by design, simpler, less
complex, and easier to implement than SGML. XML is
also, by design, far less flexible than SGML because it
includes only the most commonly implemented SGML
features.
XML is a family of Recommendations that includes a
linking specification (XLL); it may in the future include
other specifications such as a stylesheet specification
(XSL). The XLL linking specification will provide the
syntax for hypertext links defined in Semiconductor
Equipment Manufacturing Information Tagging. The
XSL stylesheet language will be neither mandated nor
prohibited in SEMI E36-98.
5 Design and Principles
5.1 Information Markup - For purposes of interchange,
information will be marked-up according to the
conventions established in Semiconductor Equipment
Manufacturing Information Tagging. The defined
markup will:
• Identify the start and end of elements, which may
contain named information content or structural
components;
• Provide information concerning the identified
elements; and
• Specify connections among elements and between
elements and external objects.
Applications will be able to utilize this markup to:
• Select, limit, and organize specific elements for
reuse or interchange;
• Start and stop behavior, such as print formatting,
complex screen display, and the actuation of
programs;
• Limit retrieval (for increased precision);
• Generate navigation aids such as indexes and tables
of contents; and
• Validate document structure or content.
5.2 SGML Standard and XML Family of
Recommendations - The intent of Semiconductor
Equipment Manufacturing Information Tagging is to
define the rules and markup that can be used to create
XML data (which is, by definition, SGML data) for
maximum interchangeability and movement across both
internets and intranets. Therefore all markup and rules
will be designed to be fully conforming with the W3C
XML Recommendation. It is also the intent to describe
hypertext linking in conformance with the XLL
(Extensible Linking Language), as much as it is known,
and to migrate in the direction of that recommendation
as the recommendation is finished.
Since the intent of Semiconductor Equipment
Manufacturing Information Tagging is to create data
that is both valid XML and type-valid SGML:
• The DTDs, which will be written in both SGML
and XML syntax, will conform to the XML subset
of SGML by not using features and syntax that
XML prohibits such as exceptions and #CONREF
attributes;
• Tagged data produced according to Semiconductor
Equipment Manufacturing Information Tagging
will be valid XML. Early implementers using
SGML authoring or conversion tools should check
with their tool suppliers to make sure those tools
will work with their document without
modification.
Names of elements, attributes, and entities will be used
consistently within the SEMI E36 module set. While
some elements may have different content models from