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SEMI E5-1104 © SEMI 1982, 2004 268 S6,F3: Discrete Va riable Data Send may be used to transfer data to the host. R1-5.6.5 Typical T a sks for Mat erial C ontrol an d Transport R1-5.6.5 .1 Material Stat us Information — T…

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SEMI E5-1104 © SEMI 1982, 2004 267
Messages for All Equipment — Strongly Recom-
mended
A. Messages Generated by the Equipment
1. S2,F25: String Diagnostic Request
B. Messages Recognized by the Equipment
1. S2,F26: String Diagnostic Data
R1-5.6.3 Note that messages are identified by a
“stream” number and a “function” number. All primary
messages have an odd-numbered function, and the
corresponding reply is the next consecutive even-
numbered function. Thus, many messages are paired.
For example, the Stream 1, Function 1 (S1,F1) message
generated by either host of equipment has the reply of
Stream 1, Function 2 (S1,F2).
R1-5.6.4 Reports of Measurements or Process Actions
— The simplest task for measurement and process
equipment is to report their measurements or actions to
the host. This report could also include equipment
setup parameters and sample identification. The ability
to accurately transfer this data from equipment to a
factory host is of prime importance in automating
production. Depending on the equipment requirements,
the function can be far greater.
R1-5.6.4.1 Measurements or Action Reports — Given
an equipment requirement to relay data to a host
computer, the equipment must handle one or both of the
following messages as defined by SEMI E5.
S6,F3: Discrete Variable Send
S6,F9: Formatted Variable Send
R1-5.6.4.2 Equipment Alarm Reports — These
messages are unsolicited by the host, they transmit
information warning of conditions threatening personal
safety, equipment safety, or out of limit equipment
parameters which may cause harm to the product or
indicate equipment malfunction:
S5,F1: Alarm Report Send
R1-5.6.4.3 Remote Request for Equipment Condition
or State — This is the method where the host requests
data from the equipment.
Messages Transmitted to the Equipment:
S6,F7: Data Transfer Request
Messages Transmitted by the Equipment in Reply:
S6,F8: Data Transfer Data
R1-5.6.4.4 Operator Interface to the Host — Many
equipment systems will have an interactive operator’s
console; some will have computer terminals used for
this purpose. SECS-II has a message type to transfer
text from host to the equipment console. There are also
messages through which equipment operators may
transmit text from their console, directly to the host.
This text may include desired information which is not
accessible by the equipment computer directly.
Message Transmitted by the Equipment:
S10,F1: Terminal Request
Message Recognized by the Equipment:
S10,F3: Terminal Display, Single
R1-5.6.4.5 Remote Access to Process Programs —
SECS-II defines a means for storing or retrieving
equipment process programs. This function allows
upload and download of such programs through the
SECS interface. By this means, programs for
equipment may be archived in the host computer
system. Either the host or the equipment may request
the transfer of a Process Program from the other. To do
this:
The Requestor transmits:
S7,F5: Process Program Request
The Sender of the Process Program replies:
S7,F6: Process Program Data
In addition, either host or equipment may initiate
sending the Process Program. In this case:
The sender transmits:
S7,F1: Process Program Load Inquire,
Receiver replies with:
S7,F2: Process Program Load Grant,
Sender transmits:
S7,F3: Process Program Send,
The receiver answers:
S7,F4: Process Program Acknowledge.
R1-5.6.4.6 Remote Commands — The host can initiate
a command to the equipment in a manner similar to an
operator pressing a button.
The host transmits:
S2,F21: Remote Command Send,
The equipment replies:
S2,F22: Remote Command Acknowledge.
R1-5.6.4.6.1 Execution of the remote command may
cause the equipment to transmit a message to the host at
a time greater than the reply time required for the
S2,F22 message. If this type of reply is desired, the
SEMI E5-1104 © SEMI 1982, 2004 268
S6,F3: Discrete Variable Data Send may be used to
transfer data to the host.
R1-5.6.5 Typical Tasks for Material Control and
Transport
R1-5.6.5.1 Material Status Information — The host
may query the equipment for material-in-process
information. The information is transmitted only as a
answer to a host request.
The equipment recognizes:
S3,F1: Material Status Request.
The equipment transmits:
S3,F2: Material Status Data.
R1-5.6.5.2 Material Transport Control — The SECS-
II protocol includes the means to affect automated
transfer of material from one SECS-compatible device
to another. Baseline compatibility requires the
equipment to perform a simple material transfer
process, an actual implementation may require means
for graceful error recovery as well. This
recommendation does not include messages to handle
error conditions.
Receiving Material:
Equipment Recognizes S4,F1:
Ready to Send Material
Equipment Transmits:
S4,F3: Send Material,
S4,F5: Handshake
Sending Material:
Equipment Transmits:
S4,F1: Ready to Send Material
Equipment Recognizes:
S4,F3: Send Material,
S4,F5: Handshake Complete
Equipment Recognizes:
S4,F2: RTS Acknowledge
R1-5.7 Conclusion — The baseline requirements for
equipment using the SECS standards includes all of
SECS-I and a limited selection of messages from
SECS-II. The choice of SECS-II messages, and data
contained therein, is dictated by the equipment and
system requirements. The benefits in using the
standards are many, including support for growth in
equipment function, and standardization needed for
effective automation. The results include automated
process monitoring and all of the associated benefits.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standard set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E30-1103 © SEMI 1992, 2003
1
SEMI E30-1103
GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF
MANUFACTURING EQUIPMENT (GEM)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese
Regional Standards Committee on August 8, 2003. Initially available at www.semi.org October 2003; to be
published November 2003. Originally published in 1992; previously published July 2003.
CONTENTS
1 Introduction
1.1 Revision History
1.2 Scope
1.3 Intent
Figure 1.1, GEM Scope
1.4 Overview
Figure 1.2, GEM Components
1.5 Applicable Documents
2 Definitions
3 State Models
3.1 State Model Methodology
3.2 Communications State Model
Figure 3.0, Example Equipment Component Overview
Figure 3.2.1, Communications State Diagram
Table 3.2, Communications State Transition Table
3.3 Control State Model
Figure 3.3, Control State Model
Table 3.3, CONTROL State Transition Table
3.4 Equipment Processing States
Figure 3.4, Processing State Diagram
Table 3.4, Processing State Transition Table
4 Equipment Capabilities and Scenarios
4.1 Establish Communications
4.2 Data Collection
Figure 4.2.1, Limit Combination Illustration: Control
Application
Figure 4.2.2, Elements of One Limit
Figure 4.2.3, Limit State Model
Table 4.2, Limit State Transition Table
4.3 Alarm Management
Figure 4.3, State Diagram for Alarm ALIDn
Table 4.3.1, Alarm State Transition Table
Table 4.3.2
4.4 Remote Control
4.5 Equipment Constants
4.6 Process Program Management
4.7 Material Movement
4.8 Equipment Terminal Services
4.9 Error Messages
4.10 Clock
4.11 Spooling
Figure 4.11, Spooling State Diagram
Table 4.11, Spooling State Transition
4.12 Control
5 Data Items
5.1 Data Item Restrictions
5.2 Variable Item List
6 Collection Events
Table 6.1, GEM Defined Collection Events
7 SECS-II Message Subset
STREAM 1: Equipment Status
STREAM 2: Equipment Control and Diagnostics
STREAM 5: Exception (Alarm) Reporting
STREAM 6: Data Collection
STREAM 7: Process Program Load
STREAM 9: System Errors
STREAM 10: Terminal Services
STREAM 14: Object Services
STREAM 15: Recipe Management