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SEMI 30.1-0200 © SEMI 1998, 2000 27 to the equipment. “PROCESS-B LD-GROUP” includes th e name of a specific “TABLE- ANOMALY-DEF” in the parameter AnomalyTableName. If not all of the ano malies given in that “TABLE-ANOMAL…

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SEMI 30.1-0200 © SEMI 1998, 2000 26
12.4.3 Modifying Process Program Variable
Parameters — The remote commands of PP-SELECT,
PP-ASSIGN, or PP-UPDATE are used to modify any
of the identified process program variable parameters
within the process program. The modification is done
by including CPNAME/CPVAL pairs within the
“PROCESS-BLD-GROUP”, which is part of the
remote commands of PP-SELECT or PP-ASSIGN, or
by including a different list name in the PP-UPDATE
remote command. A CPNAME in a process program
shall be identical to the process program variable
parameter name as specified in the “PROCESS-BLD-
GROUP”. See next section for details of these
parameters.
12.5 Use of Process Programs, Remote Commands,
and “PROCESS-BLD-GROUP” — This is a brief
description of the steps involved in using the process
program structure, the process program variable
parameters, the TABLE-DEFs, and the modification of
process program variable parameters through the use of
“PROCESS-BLD-GROUP” and CPNAME/CEPVAL
pairs in the enhanced remote command (S2,F49).
• A process program is created with certain items in
the body identified as process program variable
parameters, along with their default values.
• The host sends to equipment one or more TABLE-
DEFs: such as “TABLE-AREA-DEF” and
“TABLE-ALIGN-DEF”, along with the names of
those tables using Stream 13 commands (See SEMI
E5). These tables are now resident on the
equipment.
• The host sends an enhanced remote command
(S2,F49) to the equipment (either PP-SELECT or
PP-ASSIGN) that contains the information needed
for processing (“CARRIERBLD”). The
“CARRIERBLD” contains a “PROCESS-BLD-
GROUP” for each different set of run parameters
that are needed during the inspection or review
process.
• “PROCESS-BLD-GROUP” shall contain the
ProcessBuildGroupID to identify which program is
selected.
• If the default list of slots in the process program
needs to be changed for this run, then “PROCESS-
BLD-GROUP” contains a “MATERIALLIST” and
the list of selected slots or substrates, designated by
SlotIDs or SubstrateIDs.
• If the default set of inspection areas in the process
program needs to be changed for this run, then
“PROCESS-BLD-GROUP” contains the name of a
specific “TABLE-AREA-DEF” (in AreaTable
Name). If not all of the inspection areas given in
that “TABLE-AREA-DEF” are needed for this run,
then “AREALIST” is used and includes a list of the
names of the specific inspection areas which are
needed. Those names refer to inspection areas
defined in the “TABLE-AREA-DEF”.
• If the default set of alignment sites in the process
program needs to be changed for this run, then
“PROCESS-BLD-GROUP” contains the name of a
specific “TABLE-ALIGN-DEF” (in AlignTable
Name). If not all of the alignment sites given in
that “TABLE-ALIGN-DEF” are needed for this
run, then “ALIGNLIST” is used and includes a list
of the names of the specific alignment sites which
are needed. Those names refer to alignment sites
defined in the “TABLE-ALIGN-DEF”.
• If the SEMI M21 coordinate system is being used
and a pattern has been defined with pattern element
names and if only certain of those elements need to
be inspected for this run, then “PROCESS-BLD-
GROUP” contains an “ELEMENTLIST” and the
list of selected elements, designated by
ElementIDs.
• If certain equipment-specific process program
variable parameters need to have different values
for this run, then for each needed parameter,
“PROCESS-BLD-GROUP” contains a CPNAME
(unique name of a specific process program
variable parameter) and the new CEPVAL (new
value for that parameter).
• The equipment executes the process program with
the new values.
• If indicated in the process program, the equipment
generates the list of anomalies found and sends it to
the host in the format of a “TABLE-ANOMALY-
DEF” using the ISEM table definition and Stream
13 transfer messages (see SEMI E5 for format
specification).
• The host would send the “TABLE-ANOMALY-
DEF” to a review equipment. The host might need
to modify part of the table if required by the review
equipment. This anomaly table is now resident on
the review equipment. (NOTE: The host might
choose to not send all of the table of anomalies, but
rather a desired selection of them.)
• The host sends the equipment the enhanced remote
command (PP-SELECT or PP-ASSIGN) that
contains a “CARRIERBLD”. The
“CARRIERBLD” has a “PROCESS-BLD-
GROUP” for each different set of run parameters
that is needed by the review equipment. It is
required for the host to use the Enhanced Remote
Command S2,F49 for transferring the information
SEMI 30.1-0200 © SEMI 1998, 200027
to the equipment. “PROCESS-BLD-GROUP”
includes the name of a specific “TABLE-
ANOMALY-DEF” in the parameter
AnomalyTableName. If not all of the anomalies
given in that “TABLE-ANOMALY-DEF” are
needed for this run, then either “ANOMALYLIST”
or “M21-ANOMALYLIST” is used and includes a
list of the names of the specific anomalies which
are desired. Those names refer to anomalies
defined in the named “TABLE-ANOMALY-DEF”.
• The equipment runs the process program using the
selected values and reviewing the specific
anomalies indicated.
• The equipment adds review information to the
ANOMALYATTRIBUTE list. Then the review
equipment sends this modified “TABLE-
ANOMALY-DEF” to the host.
13 Remote Commands
The purpose of this section is to identify remote
commands, command parameters, and valid commands
versus states pertinent to the SEM.
13.1 Requirements
• The equipment shall support the SEMI E30
required remote commands.
• All the remote commands defined by ISEM are
required unless they have been qualified by the
statement “if the equipment supports this
functionality, it shall use this command.” In this
case, they are only required if the equipment
supports the functionality necessary to support the
command. A good example of this is the MAP-
CARRIER command. If the equipment does not
have the hardware necessary to scan a carrier for
the presence of substrates in slots, then the
command is not required by the ISEM.
• The alphanumeric strings defined by ISEM for
RCMD and CPNAME are required.
Host Command Parameter (CPNAME/CPVAL) — A
parameter name/value associated with a particular host
command when using stream function (S2,F41) and a
(CPNAME/CEPVAL) parameter name/value when
using the enhanced remote command (S2,F49). This
document specifies unique names (CPNAMEs) and
values (CPVALs and CEPVALs) for many command
parameters. Note that if there are no associated
parameters, a zero length list is sent.
The purpose of the remote commands is to allow host
control over the following capabilities:
• Start processing
• Stop processing
• Temporarily suspend processing
• Resume processing
• Abort processing
• Select process programs, material, and/or sites to
measure
• Report location of material found
The following remote commands (RCMDs) shall be
supported as described below:
NOTE 3: The terms “current cycle” and “safe point” used
below are to be defined by the supplier.
13.2 Remote Commands Description
1. ABORT — Terminate the current cycle prior to its
completion. ABORT has the intent of immediately
stopping the process and is used because of
abnormal conditions. ABORT makes no guarantee
about the subsequent condition of material except
as noted in the “ABORTLEVEL” description.
2. CLEANUP — De-selection of the current ISEM
job (“CARRIERBLD”) and process program
(“PROCESS-BLD-GROUP”), including the
removal of all material to output locations and any
equipment-specific activities needed to transition
into the IDLE state. Completion of this command
should generate a collection event report. If the
equipment supports this functionality, it will use
this command.
3. MAP-CARRIER — Requests the equipment to
provide a list of carrier slots that contain material.
MAP-CARRIER has the intent of providing the
host with enough information about the location
and/or ID of material so it may select material for
processing accordingly. Completion of this
command shall generate a collection event report.
If the equipment supports this functionality, it must
use this command.
4. NEXT-MATERIAL — Processing of the current
substrate is halted at the first safe point and
unloaded to the target carrier location. NEXT-
MATERIAL has the intent of allowing the host to
skip measurement of the current substrate. This is a
trigger for processing state transition from
WORKING to UNLOAD. If the equipment
supports this functionality, it will use this
command.
5. PAUSE — Suspend processing temporarily at the
next safe point. PAUSE has the intent of resuming
the process at the same point where it was paused.
SEMI 30.1-0200 © SEMI 1998, 2000 28
RESUME or PP-UPDATE may be used to resume
the process.
6. PP-ASSIGN — Instructs the equipment that
supports queuing to create a new ISEM job
(“CARRIERBLD”) for the specified port
(“LOCATIONID”) when more than one port is
available for processing. If only one port is
available, “LOCATIONID” is not required.
Priority may optionally be specified with this
command. The “PRIORITY” specifies the priority
of the newly created job in the ISEM job queue (a
value of 0 (zero) assigns the highest priority to the
job). Without specifying a priority, the job is
queued with the default priority. Jobs with equal
priority are queued in the order the PP-ASSIGN
commands are received. This command is valid in
all PROCESSING states.
7. PP-SELECT — Instructs the equipment to make
the requested ISEM job(s) (“CARRIERBLD”)
available in the execution area. This is a trigger for
the processing state transition from IDLE to
SETTING UP. The first process program
(“PROCESS-BLD-GROUP”) specified in the
“CARRIERBLD” is also validated during
SETTING UP.
8. PP-UNASSIGN — Removes the ISEM job
assignment (“CARRIERBLD”) for a carrier or
port. The carrier or port is removed from the
process queue.
9. PP-UPDATE — Provides the ability to alter the
current process program being executed during the
PAUSED state. The process program variables
specified in the PP-UPDATE command will
replace previous definitions in the “PROCESS-
BLD-GROUP”. This command will trigger
transition to CHECKING for process program
parameter verification. A RESUME command is
implied with the validation of “all” replaced values
to resume the process. If the PP-UPDATE fails, the
process program variables present prior to the PP-
UPDATE are retained. If no parameters values are
specified, the defaults are used.
10. RESUME — Resume processing from the point
where the process was paused. This is the trigger
for processing state transition from PROCESS
PAUSE to the previous PROCESS state.
11. START — Instructs the equipment to initiate
processing. This is the trigger for the processing
state transition from READY to LOAD. An
“AUTOSTART” command parameter may be
included to allow for continuous processing.
12. STOP — Complete the current cycle, stop in a safe
condition, and return to the IDLE processing state.
Stop has the intent of stopping the process entirely.
This command can be used to both: stop the current
ISEM job or to stop all queued jobs. The
equipment is not required to support the
continuation of processing.
13.2.1 Remote Commands and Associated Host
Command Parameters — This table describes the
allowable command parameters (CPNAME) for each
remote command (RCMD). Equipment shall support all
parameters. The column marked Req/Opt specifies
which parameters are required to be sent by the host
and which parameters may be optionally sent by the
host.
Table 8 Allowable Command Parameters
Parameters
Remote Command
CPName Req/Opt Comments
ABORT “ABORTLEVEL” R
CLEANUP “CARRIERID”
“LOCATIONID”
“SLOTID”
O
O
O
PORT and SLOT may be used to define a
different carrier/slot destination for the
substrates.
MAP-CARRIER “CARRIERID”
“LOCATIONID”
R*
R*
* One is required.
NEXT-MATERIAL “CARRIERID”
“LOCATIONID”
“SLOTID”
O
O
O
PORT and SLOT may be used to define a
different carrier/slot destination for the
substrates.
PAUSE None NA None
PP-ASSIGN “PRIORITY”
“CARRIERBLD”*
O
R
* More than one “CARRIERBLD” may be
specified.
PP-SELECT “CARRIERBLD”* R * More than one “CARRIERBLD” may be
specified.
PP-UNASSIGN “CARRIERBLD” R None