semi合集-English.pdf - 第3751页
SEMI F3-94 © SEMI 1990, 2003 6 APPENDIX 2 HEXAVALENT CHROMIUM ALERT NOTE: This related information is not an officia l part of this SEMI guide and is not intended to modif y or supercede the official guide. It has been d…
SEMI F3-94 © SEMI 1990, 2003 5
A1-4.8 Sub-assemblies, after completion, shall be
purged and covered for subsequent installation in the
field.
A1-4.9 A backing shield (purge through the weld head)
is required during welding.
A1-4.10 Where a weld is found defective, the
preceding two welds should be tested as described in
Paragraph 7.3.2 of SEMI F3. If either of these welds
shows signs of poor penetration, joint contamination,
lack of joint soundness, surface oxidation,
discoloration, pitting, cracking, defects of fit-up, or
defects of workmanship, then all welds made since the
last welding procedure was established should be
removed and replaced.
A1-4.11 On-site work sample welds shall be made
before each series of welding operations. On-site
sample welds shall also be made at the start of each
workday and any time any welding parameter is
changed.
A1-4.12 Sample test welds shall be made periodically.
These tests shall be compared to the on-site work
sample. Deviation from the on-site work sample shall
be cause for rejection. The sample test welds shall be
made at/when:
1. The beginning of each shift.
2. The end of each shift.
3. Any change in welding procedure, materials, tubing
size, equipment, or equipment adjustments are
made.
4. Any time a concern or deviation to the weld quality
has occurred.
A1-4.13 If the system becomes contaminated due to a
fabrication technique, the contaminated sections shall
be re-cleaned.
A1-4.14 Welding at the job site shall be enclosed in a
clean work area.
A1-4.15 When the welding is performed in a clean
envelope, the envelope shall have openings for the tube
to extend in two directions, a clean polyester film
window, and openings for the hands. HEPA-filtered air
shall be supplied to the envelope under pressure to
ensure a clean working environment.
A1-4.16 The envelope shall be installed prior to
removal of the tube caps. Full purge through the tube to
be welded shall be completed before removing the
clean envelope to attach the weld head.
A1-4.17 Final positioning of the weld head and weld
process shall be performed within the clean envelope.
SEMI F3-94 © SEMI 1990, 2003 6
APPENDIX 2
HEXAVALENT CHROMIUM
ALERT
NOTE: This related information is not an official part of this
SEMI guide and is not intended to modify or supercede the
official guide. It has been derived from the cited document.
Publication was authorized by full letter ballot procedures.
Determination of the suitability of the material is solely the
responsibility of the user.
A2-1 General
A2-1.1 Hexavalent chromium, which is given off when
stainless steel is welded, causes lung cancer in humans.
For information about hexavalent chromium, refer to
HESIS Hazard Alert, June 1992, Hazard Evaluation
System & Information Service, California Occupational
Health Program, 2151 Berkeley Way, Annex 11, Third
Floor, Berkeley, CA 94704.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproductio
n
of the contents in whole or in part is forbidden without express writte
n
consent of SEMI.
SEMI F4-1000 © SEMI 1990, 20001
SEMI F4-1000
SPECIFICATION FOR PNEUMATICALLY ACTUATED CYLINDER
VALVES
This specification was technically approved by the Global Facilities Committee and is the direct
responsibility of the North American Facilites Committee. Current edition approved by the North American
Regional Standards Committee on August 28, 2000. Initially available on SEMI OnLine September 2000; to
be published October 2000. Originally published in 1990; previously published February 2000.
1 Purpose
1.1 This specification establishes t he minimum design
and performance requirements for pneumatically
actuated cylinder valves used in semiconductor
manufacturing. It is also intended as an aid in the
procurement of these valves.
2 Scope
2.1 This specification applies to pn eumatically
actuated valves for use on cylinders containing gases
used in semiconductor manufacturing facilities and in
comparable research and development areas.
2.2 This specification does not pur port to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this specification to
establish appropriate safety and health practices and
determine the applicability of regulatory limitations
prior to use.
3 Limitations
3.1 This specification is not a repl acement for safety
regulations. It is the responsibility of the user to ensure
that pneumatically actuated cylinder valves comply
with all applicable safety regulations.
3.2 This specification excludes design or performance
requirements for any electrically operated devices used
in conjunction with, or as a replacement for, pneumatic
actuators.
4 Referenced Standards
4.1 SEMI Standards
SEMI F1 — Specification for Leak Integrity of High-
Purity Gas Piping Systems and Components
SEMI F19 — Specification for the Finish of the Wetted
Surfaces of Electropolished 316L Stainless Steel
Components
SEMI F20 — Specification for 316L Stainless Steel
Bar, Extruded Shapes, Plate and Investment Castings
for Components Used in High Purity Semiconductor
Manufacturing Applications
SEMI F32
Test Method for Determination of Flow
Coefficient for High Purity Shutoff Valves
SEMI S5 — Safety Guideline for Flow Limiting
Devices
4.2 ASME Document
1
B1.1 — Unified Inch Screw Threads (UN and UNR
Thread Form)
4.3 CGA Standards
2
CGA G-4.1 — Cleaning Equipment for Oxygen Service
CGA S-1.1 — Pressure Relief Device Standards - Part
1 - Cylinders for Compressed Gases
CGA S-7 — Method for Selecting Pressure Relief
Devices for Compressed Gas Mixtures for Cylinders
CGA V-1 — Compressed Gas Cylinder Valve Outlet
and Inlet Connections
CGA V-9
Compressed Gas Association Standard for
Compressed Gas Cylinder Valves
4.4 ISO Standards
3
ISO 68 — General Purpose Screw Threads - Basic
Profile
ISO 261 — General Purpose Metric Screw Threads -
General Plan
4.5 US Code of Federal Regulations
4
Title 49 CFR, Parts 100–199 —Transportation
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 Definitions
5.1.1 burst pressure — a pressure at which rupture or
uncontrolled leakage of one or more of the pressure
retaining components of the device occurs.
1 American Society of Mechanical Engineers, 345 East 47th Street,
New York, NY 10017
2 Compressed Gas Association, Inc., 1725 Jefferson Davis Highway,
Suite 1004, Arlington, VA 22202
3 International Organization for Standardization, Case Postale 56,
Geneve 20, CH-1211, Switzerland
4 Department of Transportation, Superintendent of Documents, U.S.
Government Printing Office, Mail Stop: SSOP, Washington, D.C.
20402-9328