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SEMI E54.3-0698 © SEMI 1998, 2004 4 defined beha vior. These objects are o nly incl uded in the figures to ai d in the visualization of the device. 8.1.2 This docum ent defines in deta il all of the component objects uni…
SEMI E54.3-0698 © SEMI 1998, 2004 3
Integer(range of 1 to 31)
5.2.6 double integer (DINT) — an integer, four bytes
long, in the range -2
31
to 2
31
–1.
5.2.7 enumerated byte — a byte with assigned meaning
to the values 0 through 255. May take on one of a
limited set of possible values.
5.2.8 full scale range — the defined 100% value of an
attribute in its assigned units. This value is not
necessarily the maximum value for the attribute. As an
example, the indicated flow attribute value may attain
120% of the full scale range.
5.2.9 gas calibration — a reference to a set of
parameters or methods which are used to calibrate or
correct the device for a particular gas type, range, and
units.
5.2.10 gas standard number — a number that refer-
ences a gas type. The number and its referenced gas
type are defined in SEMI E52.
5.2.11 gas standard symbol — a text symbol that
references a gas type. The symbol and its referenced
gas type are defined in SEMI E52.
5.2.12 last valid value (LVV) — the most recent value
successfully assigned to an attribute.
5.2.13 long integer (LINT) — an integer, eight bytes
long, in the range -2
63
to 2
63
-1.
5.2.14 long real (LREAL) — a double floating point
number, eight bytes long, as defined in IEEE 754.
5.2.15 manufacturer — in the context of this docu-
ment, this refers to the manufacturer of the device.
5.2.16 mass flow controller (MFC) — a self-contained
device, consisting of a mass flow transducer, control
valve, and control and signal-processing electronics,
commonly used in the semiconductor industry to
measure and regulate the mass flow of gas.
5.2.17 mass flow device (MFD) — a device which is
either a mass flow controller or mass flow meter.
5.2.18 mass flow meter (MFM) — a self-contained
device, consisting of a mass flow transducer and sig-
nal-processing electronics, commonly used in the
semiconductor industry to measure the mass flow of
gas.
5.2.19 null character — a byte with a value of zero.
5.2.20 programmed gas calibration — a reference to a
particular gas type, range, and units for which the
device is currently calibrated.
5.2.21 real (REAL) — a floating point number, four
bytes long, as defined by IEEE 754.
5.2.22 short integer (SINT) — an integer, one byte
long, in the range -128 to 127.
5.2.23 signed integer (INT) — an integer, two bytes
long, in the range -32768 to 32767.
5.2.24 text string — a string of one-byte characters.
See Section 5.1 for a definition of a character.
5.2.25 unsigned integer (UINT) — an integer, two
bytes long, in the range 0 to 65535.
5.2.26 unsigned short integer (USINT) — an integer,
one byte long, in the range 0 to 255.
6 Requirements
6.1 In order to implement this standard in a Mass Flow
Device, it is necessary to also implement SEMI E54.1
and one of the Sensor/Actuator Network
Communication standards. See Section 2 for more
information on a complete interoperability standard.
7 Conventions
7.1 This document embraces the Harel State Chart
notation, the transition table definition format, the
object attribute representation formats, service message
definition formats, and behavior definition formats as
specified in SEMI E54.1.
7.2 Figure 1 describes the convention for object
representation used throughout this specification.
OBJECT NAME
-------------------------
Attributes
-------------------------
Services
Figure 1
Object Representation
8 Device High Level Structure
8.1 General Description — The high level object view
of a Mass Flow Meter (MFM) device and a Mass Flow
Controller (MFC) Device is shown in Figure 2.
8.1.1 Note that the “MFM” and the “MFC” objects are
depicted in Figure 2 only for the purposes of illustrat-
ing a high level view of the device and its component
objects. In the context of this document, these objects
are not addressable, do not have addressable attributes,
do not have accessible services, nor do they exhibit any
SEMI E54.3-0698 © SEMI 1998, 2004 4
defined behavior. These objects are only included in the
figures to aid in the visualization of the device.
8.1.2 This document defines in detail all of the
component objects unique to the MFC and the MFM
devices. References, rather than definitions, are
included for the DM, the SAC, and other objects
defined in SEMI E54.1.
8.1.3 Many of the objects defined in this document
inherit properties from other objects. The properties
inherited include attribute, service, and behavior
definitions. These other objects are specified here or in
SEMI E54.1.
8.1.4 This document provides for future extensions, as
well as manufacturer-specific enhancements, by
reserving object attribute identifiers and object service
identifiers. Specifically, all object definitions in this
document specify or reserve the first 64 attribute
identifiers (A1 through A64) and the first 64 service
identifiers (S1 through S64), allowing manufacturers to
specify identifiers beyond these ranges. Additionally,
byte-enumerated attributes are specified or reserved
from 0 to 63, allowing manufacturers to specify
enumerations beyond this range (64 to 255).
8.1.5 Mass Flow Meter (MFM) Device Description —
A Mass Flow Meter device profile is composed of the
component objects and object relationships shown in
Figure 2.
8.1.6 Mass Flow Controller (MFC) Device Description
— A Mass Flow Controller device profile is composed
of (1) all of the component objects and object
relationships of the Mass Flow Meter Device in
addition to (2) the component objects and object
relationships as shown in Figure 2.
SAC
(defined in CDM)
DM
(defined in CDM)
MFM Device
Controller
(defined in CDM)
Actuator-AO-MF
--------------------
ValveType
Override
Assembly-MFM
-----------------
Sensor-AI-MF
-------------------------
FlowTotalizer
FlowHours
ZeroingStatus
ZeroOffsetMode
AutoRangeStatus
-------------------------
PerformZeroOffset
AutoRange
QuerySupportedGasType
SelectProgrammedGasType
InsertGasType
DeleteGasType
GetGasCalibrationDataValue
SetGasCalibrationDataValue
MFC Device
Sensor-AI-Aux
------------------
Assembly-MFC
--------------------
SISO-Setpoint
-------------------
RampType
RampRate
Ratio
SISO
------------------
Input
Output
DataType
Sensor-AI
(defined in CDM)
Sensor-AI
(defined in CDM)
Local Link
(defined in CDM)
Local Link
(defined in CDM)
Local Link
(defined in CDM)
Actuator-AO
(defined in CDM)
Sensor-AI-AT
------------------
Sensor-AI
(defined in CDM)
Assembly
(defined in CDM)
Assembly
(defined in CDM)
Figure 2
Mass Flow Meter Device and Mass Flow Controller Device
High Level Structure
SEMI E54.3-0698 © SEMI 1998, 2004 5
8.1.7 General Requirements
8.1.7.1 Device Objects — All objects are defined in terms of their object name and instance identifier. Identifiers
for all objects described in this document are summarized in Table 2.
Table 2 Mass Flow Device Objects
R
eferenced Document
Section
Object Name
Object
Identifier
MFC
Minimum
Instances
MFM
Minimum
Instances
Maximum Instances
8.2 Device Manager
(DM)
MFD1 1 1 1
8.3 Sensor Actuator
Controller (SAC)
MFD2 1 1 1
8.4 Sensor-AI-MF MFD3 1 1 Manufacturer-Specified
8.5 Sensor-AI-AT MFD4 0 0 Manufacturer-Specified
8.6 Assembly-MFM MFD5 0 0 1
8.7 Sensor-AI-Aux MFD6 0 0 Manufacturer-Specified
8.8 Actuator-AO-MF MFD7 1 0 Manufacturer-Specified
8.9 Controller MFD8 1 0 1
8.10 Local Link MFD9 2 0 Manufacturer-Specified
8.11 SISO MFD10 0 0 Manufacturer-Specified
8.12 SISO-Setpoint MFD11 0 0 Manufacturer-Specified
8.13 Assembly-MFC MFD12 0 0 Manufacturer-Specified
— Reserved MFD13–
MFD64
– – —
— Manufacturer-
Specified
> MFD64 – – —
8.1.7.2 Object Services — Not all object services listed in this document can necessarily be requested over the
network. They are included in this document because their behavior may generate network activity.
8.1.7.3 Object Behavior — For all service requests received over the network that are unsupported by the object, or
contain a parameter value which is beyond the supported range, or which is otherwise invalid, a network-specific
service error response is generated as specified in SEMI E54.1.
8.2 Device Manager Object (DM)
8.2.1 The Device Manager object instance is the device component responsible for managing and consolidating the
device operation as specified in SEMI E54.1. The following sections specify the components of the DM object that
are not specified in the Common Device Model.
8.2.2 Device Manager Object Attributes — Required and optional DM object instance attributes are listed in Table
3.
Table 3 DM Object Attributes
Attribute Name
Attribute
Identifier
Access Network
Required
Form
Device Type A1 R Yes Refer to CDM (SEMI E54.1).
Exception Detail Alarm A13 R No Refer to CDM (SEMI E54.1).
Exception Detail Warning A14 R No Refer to CDM (SEMI E54.1).
Reserved A33–A64 — — Reserved for SDM future expansion.
Manufacturer-Specified > A64 — — Manufacturer-Specific attributes