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SEMI E109-0305 © SEMI 2001, 2005 4 6 Requirements 6.1 Reticle and Pod Management compliant equipment is required to provide certain capabilities defin ed by other standards: accessibility to status information, event rep…

SEMI E109-0305 © SEMI 2001, 2005 3

5.2.13 Multi-Reticle Pod — TBD

5.2.14 object instantiation — the act of storing of information related to a physical or logical entity so that it can be

recalled on demand based on its public identifier.

5.2.15 on-line equipment — equipment that is connected to, and able to communicate fully with, the host.

5.2.16 pod — in this document pod refers to an RSP or a Multi Reticle SMIF Pod.

5.2.17 PodID — a readable and unique identifier for the pod.

5.2.18 PodID read — the process of the equipment reading the PodID from the carrier.

5.2.19 PodID tag (tag, ID tag) — a physical device for storing PodID and other information. There are two basic

types of tags, read-only tags and read/write tags. [SEMI E99]

5.2.20 process equipment — equipment used to produce product, such as semiconductor devices. This excludes

metrology and material handling equipment.

5.2.21 production equipment — equipment used to produce product, such as semiconductor devices, including

substrate sorting, process, and metrology equipment and excluding material handling equipment.

5.2.22 properties — a set of name value pairs assigned to an object or used in a service message to include

additional information about the object (i.e., pod, port, etc.).

5.2.23 re-initialization — a process where production equipment is either powered off then on or when some kind

of hardware or software reset is initiated to cause the equipment to reset and possibly reload its software. On

production equipment that contains some kind of mass storage device this can also be called a “reboot”.

5.2.24 read position — any position where the tag on a pod can be read.

5.2.25 reticle — a mask that contains the patterns to be reproduced on a substrate; the image may be equal to or

larger than the final projected image.

5.2.26 Reticle SMIF Pod (RSP) — minienvironment compatible carrier capable of holding one 6 inch or one 230

mm reticle in a horizontal orientation during transport and storage and is compatible with a Standard Mechanical

Interface (SMIF) per SEMI E19.4.

5.2.27 single communication connection — exactly one physical connection using exactly one logical session and a

standard set of messages.

5.2.28 slot map –– the information that relates which slots in a reticle pod hold reticles, both correctly and

incorrectly.

5.2.29 slot map read –– the process of the equipment reading the slot map for substrate position and placement

within the pod.

5.2.30 standard message set — messages conforming to standard message specifications.

5.2.31 transfer unit

— maximum number of pods allowed in a specific transfer service:

 AA is the maximum number of pods allowed for acquisition at the transfer source.

 BB is the maximum number of pods allowed for deposit at the transfer destination.

 CC is the maximum number of carrier pods allowed for transfer in one transport vehicle.

The transfer unit is the minimum of AA, BB, and CC.

NOTE 1: At the time this document was originally written, December 2000, transfer unit for reticle transfer to process

equipment is expected to be equal to one. Transfer unit to other equipment may be greater than one.

5.2.32 unload — the operation of removing a pod from a load port.

5.2.33 write position — any position on a load port or in an internal buffer from which the tag on a pod can be

written to. This position may vary on any particular equipment depending on the write technology selected by the

end user. The read position and the write position may or may not be the same position.

SEMI E109-0305 © SEMI 2001, 2005 4

6 Requirements

6.1 Reticle and Pod Management compliant equipment is required to provide certain capabilities defined by other

standards: accessibility to status information, event reporting, alarm management, and equipment control. These

requirements shall be satisfied through compliance to the following sets of standards:

6.2 Generic Equipment Model Standard (GEM) SEMI E30

 Event Notification

 Status Data Collection

 Equipment Constants

 Alarm Management

 Equipment Control

 Remote Control

 Error Messages

 Dynamic Event Report Configuration

6.3 Object-Based Standards

 Object Services Standard (SEMI E39)

 Event Reporting (SEMI E53)

 Exception Management (SEMI E41)

7 Conventions

7.1 Objects

7.1.1 Whenever the equipment is required to know about specific kinds of entities, and required to manage

information concerning these entities, it is useful to treat these entities as objects that comply with the basic

requirements of SEMI E39 (OSS). This is especially true whenever there are a large number of objects of a given

type or when the entities are transient rather than permanent. In both cases, it is difficult to describe a general way

for the host and equipment to specify which particular entity is referenced and to get information related only to a

specific one out of many.

7.1.2 By defining these entities as objects that comply with SEMI E39, it is only necessary for the host to specify

the type of object and its specific identifier in order to inquire about one or more properties of the specific entity of

interest.

7.1.3 Object Properties

7.1.3.1 A property (attribute) is information about an individual object that is presented as a name/value pair. The

name is a formally reserved text string that represents the property, and the value is the current setting for that

property.

7.1.3.2 Properties shall be accessible to the host via the service GetAttr and SetAttr for the Reticle Pod object,

Reticle object, and Reticle location object:

 get the list of IDs for the current reticle pods at the equipment, and

 get the specified properties for one or more individual reticle pods.

7.1.4

Rules for Object Properties

 Attributes with RO access can not be changed using SetAttr service as defined in OSS.

 Attributes with RW access can be changed using SetAttr service as defined in OSS.

SEMI E109-0305 © SEMI 2001, 2005 5

 Additional attributes may be specified by the user or the equipment supplier by using an attribute name starting

with “UD” (User Defined). Care should be taken to ensure the name of the attribute is unique.

7.1.5 Object Attribute Table

7.1.5.1 The object attribute table is used to list all the attributes related to the defined object as shown below the

access is defined as Read only (RO) or Read/Write (RW). The REQD column is used to specify whether the

attribute is required for implementation. Finally, the Form column is used to specify the format of that particular

attribute.

Table 1 Object Attribute Table

Attribute Name Definition Access Reqd Form

ObjType Object type RO Y Text = “Carrier”

7.2 State Model Methodology

7.2.1 A state model has three elements: definitions of each state and sub-state, a diagram of the states and the

transitions between states, and a state transition table. The diagram of the state model uses the Harel State Chart

notation. An overview of this notation is presented in an Appendix of SEMI E30. The definition of this notation is

presented in Science of Computer Programming 8, “Statecharts: A Visual Formalism for Complex Systems”, by D.

Harel, 1987.

7.2.2 State Model Requirements

7.2.2.1 The state models included in this standard are a requirement for RPMS compliance. A state model consists

of a state model diagram, state definitions, and a state transition table. All state transitions in this standard, unless

otherwise specified, shall correspond to collection events.

7.2.2.2 A state model represents the host’s view of the equipment, and does not necessarily describe the internal

equipment operation. All Reticle and Pod Management state model transitions shall be mapped sequentially into the

appropriate internal equipment collection events that satisfy the requirements of those transitions. In certain

implementations, the equipment may enter a state and have already satisfied all of the conditions required by the

RPMS state model for transition to another state. In this case, the equipment makes the required transition without

any additional actions in this situation.

7.2.2.3 Some equipment may need to include additional sub-states other than those in this standard. Additional sub-

states may be added, but shall not change the Reticle and Pod Management defined state transitions. All expected

transitions between Reticle and Pod Management states shall occur.

7.2.2.4 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each

state transition. A transition table contains columns for Transition number, Previous State, Trigger, New State,

Actions, and Comments. The “trigger” (column 3) for the transition occurs while in the “previous” state. The

“actions” (column 5) includes a combination of:

 Actions taken upon exit of the previous state,

 Actions taken upon entry of the new state, and

 Actions taken which are most closely associated with the transition.

Table 2 State Transition Table

Num Previous State Trigger New State Actions Comments

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