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SEMI C40-0699 © SEM I 1999 3 15 Tier B P rocedures 15.1 This section does not apply to t h i s chemical. 16 Tier C P rocedures 16.1 This section does not apply to t h i s chemical. 17 Tier D P rocedures 17.1 This section…

SEMI C40-0699 © SEMI 1999 POTASSIUM HYDROXIDE, 45% SOLUTION2

connected through a spray trap to a condenser, the end

of which dips beneath the surface of 10 mL of 0.1 N

hydrochloric acid. For the standard, take 50 mL of

water in a similar flask, and add 10 mL of the stock

solution and 1 mL of the nitrogen standard solution

(0.01mg N/mL). To each flask add 0.5 g of aluminum

wire in small pieces, allow to stand for 1 hour, and

slowly distill to about 35 mL. To each distillate add 2

mL of freshly boiled 10% sodium hydroxide reagent

solution, dilute with water to 50, add 2 mL of Nessler

reagent, and mix. Any color in the solution of the

sample should not exceed that in the standard.

8.7 Chloride  Dilute l0 mL of the stock solution

with water to 50 mL. Filter, if necessary, through a

chloride-free filter. To 10 mL of this solution, add 5

mL of water, 2 mL of nitric acid, and 1 mL of silver

nitrate reagent solution. Any turbidity developed

should not exceed that produced by 0.02 mg of chloride

(CI) ion in an equal volume of solution containing the

quantities of reagent used in the test.

8.8 Phosphate  To 50 mL of the stock solution, add

15 mL of hydrochloric acid and evaporate to dryness on

a steam bath. Dissolve the residue in 25 mL of 0.5 N

sulfuric acid. Add 1 mL of ammonium molybdate

reagent solution and l mL of p-(methylamino)phenol

sulfate reagent solution. Allow the solution to stand for

2 hours at room temperature. Any blue color developed

should not exceed that produced when 0.02 mg of

phosphate (PO

) ion is treated as the sample.

8.9 Sulfate  To 20 mL of the stock solution, add 5

mL of hydrochloric acid and evaporate to dryness on a

steam bath. Dissolve the residue in 20 mL of water and

evaporate again to dryness. Dissolve the residue in 20

mL of water, filter if necessary, and add 1 mL of dilute

hydrochloric acid (1+19) and 1 mL of barium chloride

reagent solution. Allow to stand for 10 minutes. Any

turbidity developed should not exceed that produced

when 0.04 mg of sulfate (SO

) ion is treated as the

sample.

8.10 Heavy Metals (as Ag)  To 60 mL of the stock

solution cautiously add 15 mL of nitric acid. For the

standard add 0.05 mg of silver ion (Ag) to 10 mL of the

stock solution and cautiously add 15 mL of nitric acid.

Evaporate both solutions to dryness over a low flame or

on an electric hot plate. Dissolve each residue in about

20 mL of water, filter if necessary through a chloride-

free filter, and dilute with water to 25 mL. Adjust the

pH of the standard and sample solutions to between 3

and 4 (using a pH meter) with 1 N acetic acid or

ammonium hydroxide (10% NH

). Dilute each solution

with water to 40 mL and stir. Add 10 mL of freshly

prepared hydrogen sulfide water to each solution and

stir again. Any color developed in the sample should

not exceed that in the standard.

8.11 Iron  Neutralize l0 mL of the stock solution

with hydrochloric acid, using a phenolphthalein

indicator solution, add 2 mL of HCI in excess, and

dilute with water to 50 mL. Add 30 to 50 mg of

ammonium peroxydisulfate crystals and 3 mL of

ammonium thiocyanate reagent solution. Any red color

developed should not exceed that produced when 0.01

mg of iron (Fe) ion is treated as the sample.

8.12 Nickel  Dilute 20 mL of the stock solution to

50 mL with water and neutralize with hydrochloric acid

using a pH meter. Dilute to 85 mL with water and add

ammonium hydroxide to make the solution barely basic

(pH 8). Add 5 mL of bromine water and 5 mL of

alcoholic 1% dimethylgy1oxime solution. Any red

color developed should not exceed that produced when

0.02 mg of nickel (Ni) ion is treated as the sample.

8.13 Sodium  Dilute 10 mL of the stock solution

with water to 100 mL to form the sample solution. To

prepare the standard solution, add 0.6 mg of sodium

(Na) ion to 10 mL of the stock solution and dilute with

water to 100 mL.

8.13.1 Using flame emission spectroscopy, observe

the emission of the standard solution at the 589 nm

sodium line. Observe the emission of the sample

solution at the 589 nm sodium line and also at a

wavelength of 580 nm. The difference between the

intensities observed for the sample solution at 580 nm

and 589 nm should not exceed the difference observed

at 589 nm between the sample solution and standard

solution (see SEMI Cl, Section 3.7, Flame Emission

Spectroscopy).

9 Grade 2 Procedures

9.1 This section does not apply to this chemical.

10 Grade 3 Procedures

10.1 This section does not apply to this chemical.

11 Grade 4 Procedures

11.1 This section does not apply to this chemical.

12 Grade 5 Procedures

12.1 This section does not apply to this chemical.

13 VLSI Grade Procedures

13.1 This section does not apply to this chemical.

14 Tier A Procedures

14.1 This section does not apply to this chemical.

SEMI C40-0699 © SEMI 19993

15 Tier B Procedures

15.1 This section does not apply to this chemical.

16 Tier C Procedures

16.1 This section does not apply to this chemical.

17 Tier D Procedures

17.1 This section does not apply to this chemical.

Table 1 Impurity Limits and Other Requirements for Potassium Hydroxide, 45% Solution

Previous SEMI Reference # --

Grade 1

(Specification)

Assay (KOH) 45.0 - 47.0%

Insoluble Matter 50 ppm max

Nitrogen Compounds (as N) 5 ppm max

Ammonium Hydroxide Precipitate 50 ppm max

Chloride (Cl) 50 ppm max

Phosphate (PO

) 2 ppm max

Potassium Carbonate (K

)0.5% max

Sulfate (SO

) 10 ppm max

Heavy Metals (as Ag) 5 ppm max

Iron (Fe) 5 ppm max

Nickel (Ni) 5 ppm max

Sodium (Na) 0.03% max

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI C41-0705

SPECIFICATIONS AND GUIDELINES FOR 2-PROPANOL

This specification was technically approved by the global Liquid Chemicals Committee. This edition was

approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available

at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1978; previously

published in 2003.

NOTICE: This document was completely rewritten in 2005.

NOTICE: Paragraphs entitled NOTE are not an official part of this document and are not intended to modify or

supercede it.

1 Purpose

1.1 The purpose of this document is to standardize requirements for 2-propanol used in the semiconductor industry

and testing procedures to support those standards. Test methods have been shown to give statistically valid results.

2 Scope

2.1 The scope of this document covers all grades of 2-propanol used in the semiconductor industry.

2.2 The VLSI grade purity level is typically required by semiconductor devices with geometries of 0.8–1.2 microns.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Referenced Standards and Documents

3.1 SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

3.2 ASTM Standards

ASTM D5127 — Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

4 Terminology

None.

5 Physical Property (for information only)

Density at 25ºC 0.78 g/mL

Boiling Point 82.3ºC

6 Requirements

6.1 The requirements for 2-propanol for Grades 1, 2, 3, 4 & VLSI Guidelines, are listed in Table 1.

7 Grade 1 Procedures

NOTE 1: Each laboratory is responsible for verifying the validity of the method within its own operation.

7.1 Assay — Analyze the sample by gas chromatography (see SEMI C1, ‘Assay by Wide Bore Column Gas

Chromatography’). The parameters cited have given satisfactory results.

1 American Society for Testing and Materials, 100 Barr Harbor Drive, West Conshohocken, Pennsylvania 19428-2959, USA. Telephone:

610.832.9585, Fax: 610.832.9555, www.astm.org