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SEMI G84-0303 © SEMI 2001, 2003 6 10 Description 10.1 See SEM I G81 for further definitions of the strip map re quired items. 10.2 Strip Ma p Required At tributes 10.2.1 The following set of Data Items are mandatory in t…

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SEMI G84-0303 © SEMI 2001, 2003 5
Attribute Name Definition Access Required Format
ContainerID A character code that may be printed or
encoded on the substrate carrier, which
uniquely identifies the substrate carrier.
ContainerID can be MagazineID, CarrierID or
CassetteID.
RW N A
WaferID A character code that may be printed or
encoded on the wafer, which uniquely
identifies the wafer. Used when equipment
reports wafer id with or in parallel with strip
map data.
RW N A
XYPosition XYPosition represents the X and Y coordinate
position of the die on the wafer. XYPosition
must be in (X,Y) order multi-item and shall be
made up of data items DieX and DieY (See
SEMI G81).
For each XYPosition a WaferID is given.
This information is used when wafer id and
die location on the wafer is to be associated
with the strip id and location of the
unit/package/device/cell on a strip.
XYPosition is set to 32767, 32767 when a
strip is removed from the equipment. This
represents no wafer die information.
Valid range for X and Y is −32768 .. 32767
RW N I2
9.3 Map Data Protocol
9.3.1 The strip mapping standard implementation shall
use the SECS/GEM standard Object Services
(S14,F1/F2) and standard Collection Event S6,F11/F12
Streams and Functions for the transfer of Strip Maps to
and from equipment (see SEMI E5).
9.3.2 The use of object services will allow the
equipment to request the type of information from the
host with predefined attributes. The host will then reply
with the list of attributes requested. This will enable
application specific behavior of the mapping process by
equipment types.
9.3.3 The use of the Collection Event Streams and
Functions will allow event-based communication from
the equipment to the host on the status of the strip
mapping process.
9.3.4 Strip Map Download
9.3.4.1 The equipment shall request a strip map
download from the host using the Standard Object
Services (OSS) command, S14,F1 GetAttribute Request
(GAR). Please refer to Section 9.2.1.
9.3.4.2 The equipment shall include all mandatory data
attributes in GAR request as well as any optional
information required by the particular equipment to
implement the strip mapping capability.
9.3.4.3 The host will respond to the GetAttribute
Request with an S14,F2, Get Attribute Data (GAD).
9.3.5 Strip Map Upload
9.3.5.1 The equipment will provide updates to the strip
map via the S6,F11 event.
9.3.5.2 All mandatory data items are required to be
included in the upload event along with any optional
equipment specific data items. Please refer to Section
9.2.2 for examples.
SEMI G84-0303 © SEMI 2001, 2003 6
10 Description
10.1 See SEMI G81 for further definitions of the strip map required items.
10.2 Strip Map Required Attributes
10.2.1 The following set of Data Items are mandatory in the uploads and downloads scenarios for strip maps.
• Strip ID
• Rows
• Columns
• OriginLocation
• CellStatus | CellGrade
10.2.2 Each equipment shall have an attribute for the product or strip type that will describe the standards process
direction and physical origin of the strip. If the physical origin and the factory defined origin are not the same, it is
the responsibility of the equipment to perform the appropriate translations to maintain integrity of the strip map
information.
10.3 Strip Map Data Protocol Examples
10.3.1 Strip Map Download (Example)
S14,F1 GetAttr Request (GAR) S,H<-E
10.3.1.1 Description: This message is used to request a set of specified attributes for one or more objects.
Structure: L,5
1. <OBJSPEC = ‘’>
2. <OBJTYPE = ‘StripMap’>
3. L,1
1. <OBJID1 = StripID = ‘A1000001’>
4. L,0 (always zero list, no filters defined)
5. L,5 (any length and order of data items)
1. <ATTRID = OriginLocation >
2. <ATTRID = ‘Rows '>
3. <ATTRID = ‘Columns '>
4. <ATTRID = ‘CellStatus'>
5. <ATTRID = ‘LotID'>
NOTE: This is an example only. Each equipment must request all mandatory data items and can additionally request any optional
data items that it needs to fully implement strip mapping capability.
S14,F2 GetAttr Data (GAD) M,H->E
10.3.1.2 Description: This message is used to transfer the set of requested attributes for the specified object(s). The
order of attributes is retained from the primary message.
Structure: L,2
1. L, 1
1. L,2
1. <OBJID = StripID = ‘A1000001’>
2. L,5
1. L,2
1. <ATTRID = ‘OriginLocation’ >
2. <ATTRDATA = ‘0’>
2. L,2
1. <ATTRID = ' Rows’>
2. <ATTRDATA = 6>
SEMI G84-0303 © SEMI 2001, 2003 7
3. L,2
1. <ATTRID = ' Columns '>
2. <ATTRDATA = 24>
4. L,2
1. <ATTRID = ' CellStatus'>
2. <ATTRDATA = 6>
5. L,2
1. <ATTRID = ' LotID '>
2. <ATTRDATA = 'Lot1>
2. L,2
1. <OBJACK = 0>
2. L,0
10.3.2 Strip Map Upload (Example)
S6,F11 Event Report M, H<-E
10.3.2.1 Description: This message is used to report the current map status. This event will occur at the end of a
strip as well as at any point during the processing of the strip when the equipment enters a condition where an
operator may have the opportunity to handle the strip or the equipment has an opportunity for error. This event shall
always be sent with the current status of the map at the time the equipment gets changed from local to remote.
10.3.2.1.1 For a description of filters, see S6,F11.
Structure: L,3
1. <DATAID>
2. <CEID>
3. L,1
1. L,2
1. <RPTID>
2. <L,n
1. <xxxx>
n. <yyyy>
S6,F12 Event Report Acknowledge H->E
Description: Acknowledge or Error
Structure: <ACKC6>