semi合集-English.pdf - 第4278页

SEMI F79-0703 © SEMI 2003 15 SEMI Gas # Chemical Name Cate gory Symbol Formula Synonym 316 Tetraethyl lead 9 C8H20Pb (C 2 H 5 ) 4 Pb Plumbane, tetraethyl; UN1649 317 Tetraethyl silane 9 C8H20Si C 8 H 20 Si Tetraethylsi l…

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SEMI F79-0703 © SEMI 2003
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SEMI Gas # Chemical Name Category Symbol Formula Synonym
72 Perchloryl Fluoride 8 ClO3F ClO
3
F
143 Phosphorus Pentafluoride 8 PF5 PF
5
62 Phosphorus Trifluoride 8 PF3 PF
3
243 Rhenium Hexafloride 8 ReF6 ReF
6
325 Selenium Hexafluoride 8 SeF6 SeF
6
UN 2194; Selenium fluoride
88 Silicon Tetrafluoride 8 SiF4 SiF
4
110 Sulfur Hexafluoride 8 SF6 SF
6
86 Sulfur Tetrafluoride 8 SF4 SF
4
87 Sulfuryl Fluoride 8 SO2F2 SO
2
F
2
247 Tellurium Hexafluoride 8 TeF6 TeF
6
249 Tetrafluorodiborane 8 B2F4 B
2
F
4
157 Tetrafluorohydrazine 8 N2F4 F
2
NNF
2
Dinitrogen Tetrafluoride
261 Trifluorosilane 8 SiHF3 SiHF
3
121 Tungsten Hexafluoride 8 WF6 WF
6
123 Uranium Hexafluoride 8 UF6 UF
6
324 Xenon difluoride 8 XeF2 XeF
2
F
2
Xe; Xenon fluoride
6.9 Organo-metallic and
Siloxanes
9
212 Dichlorodimethylsilane 9 C2H6SiCl2 (CH
3
)
2
SiCl
2
188 Diethoxy Dimethyl Silane 9 C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
154 Diethylsilane 9 C4H12Si (C
2
H
5
)
2
SiH
2
214 Diethylzinc 9 C4H10Zn Zn(C
2
H
5
)
2
300 Dimethoxydimethyl silane 9 C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22
284 Dimethyl Selenide 9 C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl
164 Dimethylaluminum-hydride 9 C2H7Al (CH
3
)
2
AlH DMAH
218 Dimethylcadmium 9 C2H6Cd (CH
3
)
2
Cd
219 Dimethylsilane 9 C2H8Si (CH
3
)
2
SiH
2
220 Dimethyltellurium 9 C2H6Te (CH
3
)
2
Te
135 Dimethylzinc 9 C2H6Zn (CH
3
)
2
Zn
285 Ethoxy Silane 9 C2H8OSi C
2
H
8
OSi
224 Fluorotriethoxysilane 9 C6H15OSiF (C
2
H
5
O)
3
SiF
139 Hexamethyldisilane 9 C6H18Si2 (CH
3
)
3
Si
2
(CH
3
)
3
HMDSi, HMDS
227 Hexamethyldisilazane 9 C6H19Si2N (CH
3
)
6
Si
2
NH
228 Hexamethyldisiloxane 9 C6H18Si2O (CH
3
)
6
Si
2
O
279 Tantalum (V) Ethoxide 9 C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5
274 TEAsat 9 C6H15O4As (C
2
H
5
O)
3
AsO
161 Tertiarybutylarsine 9 C4H11As C(CH
3
)
3
AsH
2
TBA
162 Tertiarybutylphosphine 9 C4H11P C(CH
3
)
3
PH
2
TBP
144 Tetraethoxysilane 9 C8H20O4Si (C
2
H
5
O)
4
Si TEOS
SEMI F79-0703 © SEMI 2003 15
SEMI Gas # Chemical Name Category Symbol Formula Synonym
316 Tetraethyl lead 9 C8H20Pb (C
2
H
5
)
4
Pb Plumbane, tetraethyl; UN1649
317 Tetraethyl silane 9 C8H20Si C
8
H
20
Si Tetraethylsilane
315 Tetraethylgermane 9 C8H20Ge (C
2
H
5
)
4
Ge
(C2H5)4Ge; Germanium
tetraethyl
282 Tetrakis (diethylamino) titanium 9 C16H40N4Ti C
16
H
40
N
4
Ti
318
Tetrakis (dimethylamino)
titanium
9 C8H24N4Ti C
8
H
24
N
4
Ti
301 Tetramethoxy Silane 9 C4H12O4Si (CH
3
O)
4
Si Silicic Acid (H4SiO4)
299 Tetramethoxygermanium 9 C4H12GeO4 (CH
3
O)
4
Ge Ge(OMe)4
302 Tetramethyl Lead 9 C4H12Pb (CH
3
)
4
Pb
(CH3)4Pb; Plumbane,
tetramethyl;
252 Tetramethyl Tin 9 C4H12Sn (CH
3
)
4
Sn
158 Tetramethylcyclotetra-siloxane 9 C4H16Si4O4 (CH
3
)
4
H
4
(SiO)
4
TMCTS
250 Tetramethylgermanium 9 C4H12Ge (CH
3
)
4
Ge
251 Tetramethylsilane 9 C4H12Si (CH
3
)
4
Si
194 Titanium Tetraisopropoxide 9 C12H28O4Ti Ti(OC
3
H
7
)
4
146 Tributylaluminum 9 C12H27Al
(CH
3
CH
2
CH
2
CH
2
)
3
Al
TBAl
307 Triethoxy Arsine 9 C6H15AsO3 (C
2
H
5
O)
3
As Triethyl ester arsenous acid
312 Triethoxy Silane 9 C6H16O3Si (C
2
H
5
O)
3
SiH
308 Triethoxyborane 9 C6H15BO3 (C
2
H
5
O)
3
B Boron triethoxide;
311 Triethoxyphosphine 9 C6H15O3P (C
2
H
5
O)
3
P Triethyl phosphite; UN2323
306 Triethyl Arsine 9 C6H15As (C
2
H
5
)
3
As Arsine; Triethylarsenic
313 Triethyl Silane 9 C6H16Si (C
2
H
5
)
3
SiH (C2H5)3SiH;
257 Triethylaluminum 9 C6H15Al (C
2
H
5
)
3
Al
258 Triethylantimony 9 C6H15Sb (C
2
H
5
)
3
Sb
163 Triethylborate 9 C6H15O3B B(OC
2
H
5
)
3
TEB, Triethoxyborane
148 Triethylgallium 9 C6H15Ga (C
2
H
5
)
3
Ga TEGa
309 Triethylindium 9 C6H15In (C
2
H
5
)
3
In Indium triethyl
262 Triisobutylaluminum 9 C12H27Al (C
4
H
9
)
3
Al
287 Trimethoxy Silane 9 C3H10O3Si C
3
H
10
O
3
Si
131 Trimethoxyborine 9 C3H9BO3 B(OCH
3
)
3
TMB, Trimethylborate
190 Trimethyl Silane 9 C3H10Si (CH
3
)
3
SiH
149 Trimethylaluminum 9 C3H9Al Al(CH
3
)
3
TMA, TMAl
150 Trimethylantimony 9 C3H9Sb (CH
3
)
3
Sb Trimethylstibene
151 Trimethylarsenic 9 C3H9As (CH
3
)
3
As Trimethylarsine, TMAs
277 Trimethylborane 9 C3H9B (CH
3
)
3
B
152 Trimethylgallium 9 C3H9Ga Ga(CH
3
)
3
TMGa
153 Trimethylindium 9 C3H9In (CH
3
)
3
In TMIn
133 Trimethylphosphite 9 C3H9PO3 (CH
3
O)
3
P TMPi, Trimethoxyphosphine
SEMI F79-0703 © SEMI 2003
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SEMI Gas # Chemical Name Category Symbol Formula Synonym
132 Trimethylphosphorus 9 C3H9P (CH
3
)
3
P Trimethylphosphine, TMP
303 Trimethylvinylsilane 9 C5H12Si C
5
H
12
Si Vinyltrimethylsilane
6.10 Oxygen and Oxides and
Sulfides
10
8 Air 10 Air
25 Carbon Dioxide 10 CO2 CO
2
40 Carbon Disulfide 10 CS2 CS
2
9 Carbon Monoxide 10 CO CO
34 Carbonyl Sulfide 10 COS COS
298 Diethyl Sulfide 10 C4H10S C
4
H
10
S UN2375; Ethyl sulfide;
230 Iron Carbonyl 10 C5O5Fe Fe(CO)
5
47 Methyl Mercaptan 10 CH4S CH
3
SH
140 Nickel Carbonyl 10 C4O4Ni Ni(CO)
4
15 Oxygen 10 O2 O
2
30 Ozone 10 O3 O
3
32 Sulfur Dioxide 10 SO2 SO
2
246 Sulfur Trioxide 10 SO3 SO
3
273 Tungsten Hexacarbonyl 10 C6O6W W(CO)
6
20 Water Vapor 10 H2O H
2
O
6.11 Nitrogen and Nitrogen
Compounds
11
173 Acetonitrile 11 C2H3N CH
3
CN
276 Acrylonitrile 11 C3H3N CH
2
=CHCN Acrylon; Propenenitrile
29 Ammonia 11 NH3 NH
3
198 Borazine 11 B3N3H6 H
3
B
3
N
3
H
3
59 Cyanogen 11 C2N2 NCCN Oxalodinitrile
37 Cyanogen Chloride 11 ClCN ClCN
213 Diethylamine 11 C4H11N (C
2
H
5
)
2
NH
85 Dimethylamine 11 C2H7N (CH
3
)
2
NH
166 Dimethylethylaminealane 11 C4H14NAl (CH
3
)
2
C
2
H
5
NAlH
3
DMEAA
281 Diphenylmethan-4,4' -diisocyanat 11 C15H10N2O C
15
H
10
N
2
O UN2489
280 Diphenylmethylenediamine 11 C13H14N2 C
13
H
14
N
2
275 Hafnium Tetranitrate 11 HfN4O12 Hf(NO
3
)
4
50 Hydrazine 11 N2H4 H
2
NNH
2
269 Hydrazoic Acid 11 HN3 HN
3
52 Methylamine 11 CH5N CH
3
NH
2
Amino Methane
233 Monoethylamine 11 C2H7N C
2
H
5
NH
2
234 Monomethyl Hydrazine 11 CH6N2 CH
3
N
2
H
3
16 Nitric Oxide 11 NO NO